Vacuum Pad

E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x

Vacuum Pad

E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x

Vacuum Pad

E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x

Vacuum Pad

E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x

CNA

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/

CNA

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/

SV

8 @2 @1 SOL.B Station 11 SOL.A @5 Light/Surge voltage suppressor @1 @6 !

0.4

AXT100-1-P Note 3) U S U S U S w U S AXT100-1-J 20 Note 3) U S AXT100-1-F Note 3) e r AXT100-1-GU20 Note 1) Suffix -XP to the end of the part number for dust-protected SI unit.

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Model T1 T2 (1) (1) (1) Max. number 16 14 16 16 14 8 8 16 16 Note 1) Due to the limitation of internal wiring.

Speed Controller with Indicator

11 (S) 3/8" 15.5 26.7 37 35.9 15.6 48 (49) AS321FSG-03-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 28.7 55.4 54 50.2 48.8 13.3 24.5 28.5 9.3 19.2 38 (39) AS321FSG-03-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-03-11 (S) 3/8" 15.5 26.7 37 28.2 15.6 39 (40) AS421FSG-04-11 (S) 3/8" 1/2 24 (23.8) 15.5 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FSG-04-13 (S) 1/2" 19.3 30.9

smcmaintenancepartslist

6 Single acting, spring return Piston seal Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Gasket Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

=Fo-r-s-:-ta-n~d:-a-rd;-:*~*7"1:-:-ty-p-e-m-o-d:-u;-le-s 02 2 stations X200 For AB2 modules .The use of serial interface Sl module must be ornerd separately technology offers advantages such as reduced wiring, quicker installation time, easier start-up and simplified maintenance. 11 11 stations Includes 1 station to mount 81 unit.

C85

-25 6-11-25 25 Series C85 Construction [First angle projection] Single acting, Single rod Spring return: C858 to 16-S (Disassembly is not possible.) !

VS 8-2/VS 8-4

[Option] Conforms to ISO 15407-2 Standard Size 18 mm, 26 mm Plug-in Type 5 Port Solenoid Valve Series VS 8-2/VS 8-4 S R S R Series VS 8-4 S R Series VS 8-2 S R Conforms to ISO 15407-2 Standard S R S R ISO Standard: Interface conforming to 18 mm size (VS 8-2) and 26 mm size (VS 8-4) Accommodates IP65 enclosure.

C85

-25 6-11-25 Series C85 Construction [First angle projection] Single acting, Single rod Spring return: C858 to 16-S (Disassembly is not possible.) !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9 16 32 VQZ 17 4 VQD 10 4 10 P = 11 L2 36.5 41.5 L1 45 M plug connector (M) D side U side Stations 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 4(A), 2(B) port C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P = 11 L plug connector (L) Dimensions n: Stations n L 11

Compact Manifold Regulator Series ARM5

IN side OUT side Straight R Straight V Straight R Straight V Fitting size Elbow S Elbow T Elbow U Elbow W Elbow X Elbow Y Fitting size Elbow S Elbow T Elbow U Elbow W Elbow X Elbow Y 4, 5/32 4, 5/32 2.5 6 11 35.5 2.5 6 11 35.5 2.5 6 11 37.5 2.5 6 11 37.5 6 6 3 6.5 11 36 3 6.5 11 36 3 6.5 11 38 3 6.5 11 38 1/4 1/4 6.5 6 11.5 38.5 6.5 6 11.5 38.5 6.5 6 11.5 40.5 6.5 6 11.5 40.5 488 Regulator

Programless controller Step motor (servo 24 VDC)

1200 90 1200 10 250 1400 150 1400 100 1400 11 300 1600 180 1600 110 1600 12 350 1800 210 1800 120 1800 13 400 2000 240 2000 130 2000 14 450 2500 270 2500 140 2500 15 500 3000 300 3000 150 3000 LEY40A / LEYG40A LEY40B / LEYG40B LEY40C / LEYG40C Speed [mm/s] Acceleration Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] [mm/s2] 0 24 200 12 200 6 200 1 32 300 20 300 10 300

Modular F.R.L. Units

v*11 v*11 v*11 v*11 *1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

2/3 Port Valve

Fluid Table q Rated voltage-Electrical entry-Electrical option Standard specifications Option (1) G C Class B D, T Class H G, C T S(1) S L, Z L, Z S Air (general, dry) Vacuum (up to 1Torr) Turbine oil, Carbon dioxide gas (CO2), Nitrogen gas (N2) Freon 11, 113, 114 Air (dry) (T) High temp, water (D, E) Argon, helium (F) Insulation Electrical entry Electrical option 1 (100V) 2 (200V) 3 (110V