CLQ

Flange Style CLS A + Stroke L FT B + Stroke G 4-FD FZ FX Without auto switch With auto switch Bore size (mm) Stroke range FD FT FV FX FZ G L L1 M CLQ A A B B 92 36 10 to 50 63 9 9 80 92 108 38 18 43.5 60 46 102 102 46 75, 100 MLGP 106.5 43.5 10 to 50 80 11 11 99 116 134 43 20 53.5 77 53.5 116.5 116.5 53.5 75, 100 RLQ 125 53 10 to 50 100 11 11 117 136 154 50 22 53.5 94 63 135 L1 Rod end nut

VFS

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 900 Perpendicular, upward actuation Horizontal

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

Compact manifold regulator ARM5 Series

X 5.5 L3=50+R+V L4=50+T+X 50 SMC H H L L S S O O U U C C P P K K R 8 S U 57 (at knob locked) DIN rail part no.

Auto Switch Guide

RS Q G RS H A RZQ Weight MI W S Auto Switch Internal Circuit D-F7NV (g) CEP1 D-F7NV D-F7PV D-F7BV Auto switch model DC (+) Brown CE1 11 13 13 0.5 Lead wire length (m) 50 57 57 3 Main circuit of switch CE2 OUT Black 81 92 92 5 ML2B DC () Blue Dimensions C J G5-S 3.5 mounting hole D-F7PV CV Indicator light DC (+) Brown MVGQ Main circuit of switch Main circuit of switch CC OUT Black RB DC ()

51

(mm) Rod Flange Symbol F GB B A AL B1 C D FT FX FD ZZ E GA H H2 H1 I J MM KA NA P S Bore size (mm) 20 25 32 40 50 63 80 100 12 15 15 20.5 26 26 32.5 32.5 14.5 17.5 17.5 23.5 29 29 35.5 35.5 8 10 12 14 18 18 22 26 12 14 18 25 30 32 40 50 5 6 6 8 11 11 13 16 79 85 87 93 121 121 151 152 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 2 2 2 2 2 2 3 3 28 32 38 46 58

LX

s) Time (s) LXFH5BD LXPB2BD/LXSH2BD LXPB5BD/LXSH5BD 80 80 80 Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load Transfer load 10kg 10kg Transfer load 50 50 50 3kg 6kg 6kg 2kg 3kg 3kg 1kg 0kg 0kg 0kg 0.01 0.02 0.03 0.04 0.01 0.02 0.03 0 0 0.01 0.02 0.03 0 Time (s) Time (s) Time (s) Acceleration Time Guide/Ball Screw Specification (Vertical) Caution LXPB2BC/LXSH2BC LXPB5BC/LXSH5BC Transfer

CG5-S

11 85 15 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 11 93 15 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 15 109 21 80 22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 23 130 32 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 CG-E080SUS 258 23 131 32 Plug

MXS Series Air Slide Table

Z ZZ (NN-1) X H G H 29 11.5 29 11.5 A B 9.5 5.1 11 11 30 1.5 A B 5H9 5 deep +0.030 0 6 NN-M6 X 1 thread 12 deep 5H9 5 deep +0.030 0 HA GA Cross section AA Cross section BB (mm) Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA M 83 83 83 93 108 147 200 254 306 NA 2 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

S. T. Manufacturing Co., Ltd.

CXS

20 CY 15 10 MG 0.1 10 CX 0.1 6 6 D-X 0.03 5 5 10 20 30 40 50 100 10 20 30 40 50 100 20Overhang L (mm) Overhang L (mm) Graph (4) V = Up to 800 mm/s (Up to 700 mm/s for 15, 20) Data CXSJM CXSJL Graph (3) V = Up to 600 mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15

CXS

mm/s CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 8-28-7 7 Series CXS Horizontal Mounting Graph (6) Up to 30 mm stroke Graph (5) Up to 10 mm stroke V = Up to 400 mm/s V = Up to 800 mm/s V = Up to 400 mm/s V = Up to 800 mm/s 0.2 0.2 0.1 0.1 Weight m (kg) Weight

JXCx-OMY0006

mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 Controller power supply To PWR 24VDC PC Power supply plug (Included) or USB cable AWG20 (0.5mm2) (AminiB type) Part No:LEC-W2-U Teaching box (3m cable is provided.)

C95Series

I-B DA DB DL lou number II:, Imm) IDe OX D E DO (>"UN 'u, O S DH Z DDH9-: 32 164 10"" 36 18' 12 ' 45 202 ". . . , 46 31 21 18 5 38 26 51 6.5 6.6 11 7 41 28 54 6.5 6.6 11 9 ' 50 32 65 7.5 9 15 11 52 35 24 22 5.5 65 45 33 30 6 50 222 16' '" 52 40 67 7.5 9 15 11 66 50 86 10 11 16 12.5 ' 75 50 37 35 6.5 95 60 47 40 6,5 63 250 16 ' ." 76 60 96 10 11 18 1 3 5 71 70 20 114 70 55 50 7.5 ~, Rotating

CNG

0.5 1000 1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP 200 200

1.1

Circulating fluid temperature setting (SV) Circulating fluid present temperature (PV) Circulating fluid temperature setting (SV) HRGC001--S HRGC002--S HRGC005--S Applicable model 9 (RD), 10 (SD), 11 (SG) Connector no.

Possible to transfer a workpiece at low-speed.

A S G D L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BE BU F H J JA JB JJ K Size Rotation angle 20 30 40 90, 180 50 25 2.5 63 (11) 14 34 14.5 30.4 10 30 M8 x 1.25 11 6.5 3 90, 180 M5 x 0.8 depth 6 68 30 3 69 (11) 14 39 16.5 49 16 34.7 12 32 M10 x 1.5 14 8.5 4 90, 180 M6 x 1 depth 7 76 32 3 78 (13) 16 47 18.5 55 16 40.4 15 36 M10 x 1.5 14

NCA1

2~20in/s 2~20in/s (50~500mm/s) (50~500mm/s) (50~500mm/s) Mounting Basic, foot Basic, foot Basic, foot, rear flange,clevis center trunnion front flange, side tapped side tapped center trunnion, center trunnion side tapped, head trunnion, side lug side lug rod trunnion Non-Rotating Accuracy n/a n/a 0.50c *Rod and head trunnion maximum operating pressure for 325 and 400 bore is up to 150 psi

2/3 Port Valve

Rated voltage 2 200V AC 50/60Hz 1 100V AC 50/60Hz S Z L 3 110V AC 50/60Hz 4 220V AC 50/60Hz 5 24V DC 6 12V DC 7 240V AC 50/60Hz Other 9 Option Option Part No.

Speed Controller with One-touch Fitting

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19