Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data 8-16-11 11 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F 10, 15, 25 How to Order CY1F R 10 300 F9BW Number of auto switches Magnetically coupled rodless cyinder, low profile guide type Nil S n 2 pcs. 1 pc. n pcs

Table of Contents

S page 11-3-4.

1

Standard type 8 to 16 XA0/1/10/11 CJ2 CJ2 C85W Standard type Single acting (Spring return/extend) XA0/1/10/11 Double acting, Double rod 8 to 16 XA0/1/10/11 CJ2W Available with air cushion Double acting, Double rod XA0/1/10/11 Double acting, Single rod 8 to 16 XA0/1/10/11 CM2 C85K Non-rotating rod type Double acting, Single rod XA0/1/10/11 Single acting(Spring return/extended) 8 to 16 XA0

NCG/CG1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 114 119 121 139 162 162 196 196 11 11 11 12 13 13 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 110 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 12 12 12 13 14 14 20 20 Up to 350 Up to

SMC Pneumatic Clean Series

-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note) Consult SMC for long stroke.

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

For details, refer to pages 11 and 12. Table 1.

Parallel Style Air Gripper Series MHZ

Standard Body Lead wire type In-line electrical entry type Perpendicular electrial entry type Explanatory drawing Auto switch model L L L Finger position D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7WV D-M9V D-M9WV D-M9AVL D-M9 D-M9W D-M9AL Air gripper model 11 13 3.5 6.5 4 11 13 5 7 5 3 8 6 5 3.5 5 3.5 No setting 9 11 1.5 4.5 2 9 11 3 5 3 1 6 4 3 1.5 3 1.5 13 15 5.5 8.5 3 6 4 13 15

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

11 10-0.022 0 12-0.027 0 With air cushion Air cushion type is not available for 21-/22-CJ2.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

11 10-0.022 0 12-0.027 0 With air cushion With air cushion type is not available for 21-/22-CJ2.

17

22 (10) 80 11 (5) 10 20 29 30 51 50 300 200 100 11 (5) 10 20 29 30 51 50 300 200 100 Stroke (mm) Stroke (mm) 13 Model Selection Series MGP L L m m Ball Bushing Horizontal Mounting (19) L = 50 mm, V = 400 mm/s (20) L =100 mm, V = 400 mm/s MGPL12 to 25, MGPA12 to 25 MGPL12 to 25, MGPA12 to 25 11 (5) 11 (5) 25 25 25 25 25 25 Load mass m lbs (kg) Load mass m lbs (kg) 20 20 20 20 20 20 16 16 16

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

Air Cylinder

/32 1 1 15/16 2.36 9/32 2 3/8 6.44 7/16-20 1.71 1.06 1.84 1.26 3/4 2 1/4 3 5/8 200 (2") 5/16-24 3/8 M16 x 1.5 7/16 1.81 5/16-18 2.6 0.3 7/8 9/16 1 1/8 5/8 11/32 1 1 15/16 2.40 11/32 2 1/2 3/8 6.44 7/16-20 1.75 1.06 2.19 1.30 3/4 2 3/8 3 3/4 250 (2.5") 5/16-24 3/8 M16 x 1.5 19/32 1.69 3/8-16 3.1 0 1 1/4 9/16 1 1/8 5/8 11/32 1 1 15/16 2.48 11/32 3 3/8 8.02 3/4-16 2.34 1.10 2.76 1.57 1 1/8 2

Basic Type/Direct Mount Type

400 50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 12 13 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 Distance from cylinder shaft center Lo (cm) 1464 Model Selection CY3B/CY3R Series

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

Compact Cylinder with Lock Series CLQ

107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 36 112 126 CD hole

Compact Cylinder with Lock Series CLQ

116.5 53.5 11 11 4 x FD FX FZ L G B + Stroke CLS A + Stroke 100 135 63 11 11 CLQ Bore size (mm) FV FX FZ G L L1 M 63 80 100 RLQ 80 99 117 92 116 136 108 134 154 38 43 50 18 20 22 43.5 53.5 53.5 60 77 94 L1 Rod end nut MLU Head Side flange style: CLQG/CDLQG Head Side Flange Style MLGP (mm) Stroke range Without auto switch With auto switch Bore size (mm) FD FT ML1C A A B B 36 46 43.5 53.5

CLQ

11 Series CLQ Construction: 20 to 32 i o !