RHC

D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5

A

Y P E B R A C K E T Spacer with L-type bracket A B C D E F G R L Y10L 20 12 4.5 3 25 5 8 2.25 27 Y20L 24 15 5.5 3 30 5 10 2.75 33 Y30L 35 16 7 4 41 7 11 3.5 45 Y40L 40 22 9 4 50 7 14 4.5 50 Y50L 40 22 9 4 50 7 14 4.5 50 Y60L 50 24 12 4 70 10 15 6 62.5 T TYPE BRACKET H O W T O O R D E R T T Y P E B R A C K E T Spacer with Bracket Bracket Only 1000 S E R I E S Y10T .B110T 2000 S E R I E S Y20T

10

Q F G1/2 23 Y C R E C R (1.5) (1.5) Y E B1 B A B1 B A 2 x P Port size 2 x P Port size Terminal part U W M U W M Flat terminal connector 250 Series X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole 11 9 6.5 15 (mm) Mounting bracket dimensions Port size P 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 Size A B B1 C D E F M 12.8 19 19 U 46 56 56 W 36 46 46 X 11 13 13 Y 6 7 7 1 2 19 24 24 30 43 45 45 50

Compact Cylinder with Air Cushion

Hs A Auto switch mounting height mm Proper auto switch mounting positions mm D-F9 D-F9V D-F9W D-F9WV D-A9V D-F9V D-F9WV D-A9 D-A9V D-F9BAL Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs A B A B A B 20 22.5 24.5 22 20 25 9.5 3 13.5 7 12.5 6 24.5 26.5 24 25 32 11 5.5 15 9.5 14 8.5 27 29 26.5 32 40 12.5 4.5 16.5 8.5 15.5 7.5 30.5 32.5 30 40 50 17 7 21 11 20 10 36.5 38.5 36 50 63 17 12.5 21 16.5

Rotary Actuator/Vane Type

[mm] 2 x d CRBU2 Series [mm] CRJ Size CRB2, CRBU2 Q M N 10 M3 8.5 9.5 15 M3 11 10 20 M5 14 13 30 M5 15.5 14 40 M5 21 20 Size CRB2, CRBU2 d 15 3.4 20 4.5 30 5.5 40 5.5 (Viewed from the long shaft side) CRA1 CRQ2 A port B port A port B port MSQ (Standard) (Altered) MSZ Symbol: C3 Symbol: C4 The position of the screws for tightening the actuator body is changed.

CJ5-S

85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5

CJ5-S

85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19 13 50 8 47 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 M6 x 1.0 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5

C76

A B 32 8 7 7 6 40 14 12 13 11 Aim at this number.

C76

A B A B A B A B A 32 8 (6) 7 (5) 8.5 (6.5) 14.5 (11.5) 9 (7) 8 (6) 7 (5) 6 (4) 6 (5) 12 (9) 40 10 (11) 12 (9) 7.5 (5.5) 12.5 (9.5) 15 (12) 13 (10) 13 (10) 11 (8) 5 (3) 11 (7) Aim at this number ( ) For air cushion type Auto Switch Mounting Height (mm) D-F7/J79 D-F7W D-J79W D-F7BAL D-F79F D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-A7 D-A80 D-A7H D-A80H D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C

Magnetically Coupled Rodless Cylinder

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

2 1 2 3 1 2 1 2 A B C A B A B A B LVA B B B B LVH LVD LVQ Note) For each body class, the second and later numbers or symbols indicate reducing.

TABLE OF CONTENTS

B A A B . . LEAD EGRESS .11 (2.8) DIA. WIRE LEAD EGRESS .11 (2.8) DIA. WIRE 1.31 (33.3) 1.31 (33.3) R.18 (4.6) TYP . R.15 (3.8) TYP . R.18 (4.6) TYP . R.15 (3.8) TYP . .66 (16.8) .66 (16.8) .15 (3.7) DIA. THRU (2) PLACES .15 (3.7) DIA. THRU (2) PLACES Mtg. HOLES #6-32 UNC THD. X .22 (5.6) MFT 2 PLACESAS SHOWN Mtg. HOLES #6-32 UNC THD.

Compact Cylinder with Air Cushion Series RQ

32 40 50 63 80 100 A B A B A B A B Bore size CUJ 20 25 32 40 50 63 80 100 31.5 32.5 38.5 35 38 34 CU 35 36 42 38.5 41.5 37.5 13.5 5.5 14 6 11 3 19 11 41 42 48 44.5 47.5 43.5 18 8 18.5 8.5 15.5 5.5 23.5 13.5 CQS 47.5 48.5 54.5 51 54 50 18 13.5 18.5 14 15.5 11 23.5 19 57.5 58.5 64.5 61 64 60 20.5 16.5 21 17 18 14 26 22 CQ2 67.5 68.5 74.5 71 74 70 25.5 20 26 20.5 23 17.5 31 25.5 32 26 32.5 26.5

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGZR Double Power Cylinder/ Without Non-rotating Mechanism Double Clevis Bracket DX B Z + Stroke DB DD 4 x DT B DS DH 4 x DR DA DU DU DL DC DE DO DO Bore size (mm) 22 22 30 30 45 45 60 DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6 9 9 11 11 13.5 9 9

CQS

size (mm) E C OA D OB Q RA RB T H I K M N With/Without auto switch A 45.5 45.5 55.5 59 F 7.5 7.5 9 11 B 32 32 41 44 L 13.5 13.5 14.5 15 A 25.5 25.5 34 37.5 B 22 22 29.5 32.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 B 17 17 19.5 22.5 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 6 8 10 12 M4 x 0.7 25 29 36 40 6 8 7 12 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 M3 x 0.5 5 6 8 10 32 38 47 52 15.5 20 25.5

CLQ

Flange Style CLS A + Stroke L FT B + Stroke G 4-FD FZ FX Without auto switch With auto switch Bore size (mm) Stroke range FD FT FV FX FZ G L L1 M CLQ A A B B 92 36 10 to 50 63 9 9 80 92 108 38 18 43.5 60 46 102 102 46 75, 100 MLGP 106.5 43.5 10 to 50 80 11 11 99 116 134 43 20 53.5 77 53.5 116.5 116.5 53.5 75, 100 RLQ 125 53 10 to 50 100 11 11 117 136 154 50 22 53.5 94 63 135 L1 Rod end nut

Electric Actuators

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length(L)[m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 15 (5.5) (6.3) Actuator side (14) (18) (Terminal

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS40S-200523.5 563.5 206 260 6 1 200 80 11-LEJS40S-300623.5 663.5 306 360 6 1 200 180 11-LEJS40S-400723.5 763.5 406 460 8 2 400 80 11-LEJS40S-500823.5 863.5 506 560 8 2 400 180 11-LEJS40S-600923.5 963.5 606 660 10 3 600 80 11-LEJS40S-7001023.5 1063.5 706 760 10 3 600 180 11-LEJS40S-8001123.5 1163.5 806 860 12 4 800 80 11-LEJS40S-9001223.5

Slide Unit Series CX2/CXWM/CXWL

-X Individual -X 463 Slide Unit/Double Rod Type Series CX2 Slide Bearing: 10, 15, 25 How to Order Port thread type Symbol Type M thread Rc 1/8 NPT 1/8 G 1/8 Bore size 10, 15 Nil TN TF 25 CX2 N 15 100 B C X2 N 15 B 100 J79W DB With auto switch Made to Order Cylinder with auto switch Refer to page 465 for Made to Order specifications.

Slide Unit Series CX2/CXWM/CXWL

-X Individual -X 463 Slide Unit/Double Rod Type Series CX2 Slide Bearing: 10, 15, 25 How to Order Port thread type Symbol Type M thread Rc 1/8 NPT 1/8 G 1/8 Bore size 10, 15 Nil TN TF 25 CX2 N 15 100 B C X2 N 15 B 100 J79W DB With auto switch Made to Order Cylinder with auto switch Refer to page 465 for Made to Order specifications.