VM

Straight plunger Roller plunger Cross roller plunger 1.5 0.7 0.7 0.3 0.4 0.7 30 45 30 Roller lever VZM500 VZM400 VFM300 VFM200 One way roller lever 45 30 Straight plunger Roller plunger Flat button Groove 0.5 0.2 0.2 0.1 0.2 30 45 30 Roller lever Protrusion VM800 Adjustable roller lever 45 Adjustable rod lever Recessed portion Fastening ring Avoid abrupt angles on limit switch actuator.

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14

C92

11 15 17 10 14 18 18 22 26 27 36 5 7 8 8 10 10 13 16 23 27 30 31 37 40 45 55 11 11 14 14 19 19 42 52 74 84 90 98 116 126 160 180 17 19 24 24 30 30 41 55 136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32

Compressed Air Preparation Filter

70 50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS15-10 S SS ZZ Z 10 77.5 96.5 25 20 87.5 106.5 25 30 97.5 116.5 35 40 107.5 126.5 35 21-/2210-/11-/12CXS15-20 CXS15-30 CXS15-40 CXS15-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 117.5 136.5 45 21-/2210-/11-/1284 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS20, CXSL20 10-/11221221Air cylinder Rotary actuator Air gripper Directional control valve Fittings

Compact Cylinder

-45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 7.2 11 9 Fix the cylinder by using the OA thread that are provided with the cylinder tube.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

HRX-OM-X071

(It is invalid in continuous monitoring.) [7] "Time outside the temperature range monitoring range: set to" 45 sec ". [8] "TEMP READY alarm output": set to "OFF". [9] "Temperature range upper limit alarm switching": Set to "WRN". [10] "Add output of temperature range upper limit alarm": Set to "ON". [11] "Temperature range lower limit alarm switching": set to "WRN". [12] "Add output of temperature

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

HRX-OM-X084

(It is invalid in continuous monitoring.) [7] "Time outside the temperature range monitoring range: set to" 45 sec ". [8] "TEMP READY alarm output": set to "OFF". [9] "Temperature range upper limit alarm switching": Set to "WRN". [10] "Add output of temperature range upper limit alarm": Set to "ON". [11] "Temperature range lower limit alarm switching": set to "WRN". [12] "Add output of temperature

ZP

With buffer With buffer Buffer mounting (Male thread) Buffer mounting (Male thread) Mounting Male thread Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Vacuum Entry Port Female thread Common Page 13-11-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

, 15, 20 25, 30, 35, 40 45, 50 12, 16 20, 25 Dimensions ...10 &11 Series CQS How to Order . 1 12 16 20 25 5, 10 Construction . 12 Solid state switch D-M9N, F9NV D-M9P, F9PV D-M9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Dimensions ...13 to 16 Series CQSK How to Order . 1 12 16 5, 10, 15, 20, 25, 30 Construction . 17 20 25 5, 10, 15, 20, 25, 30 35, 40, 45, 50 Dimensions ...18 &19 Note

Plate Cylinder

K H ZZ + Stroke (mm) A 22 26 30 35 35 AL 19.5 23.5 27 32 32 B 24 28 32 39 50 BS 37 45 44 54 53 BT M5 x 0.8 depth 7.5 M6 x 1 depth 12 M8 x 1.25 depth 13 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 BX 9 6.5 8 10 11 BY 7 8 9 9 12 C 54 68 86 104 124 D 12 14 16 20 20 ET M5 x 0.8 depth 11 M6 x 1 depth 11 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M12 x 1.75 depth 15 EY 26 42 54 64 72 GX 10 8.5 9 11.5 11.5

LEC-OM02904

USB (MR Configurator MTLEC-MR-SETUP221) 11 18 11 (b) USB LEC-MR-J3USB () USB MR-J3USBCBL3M () USB USB CN5 11.4 LEC-MR-J3BAT 45 (1) LEC-MR-J3BAT 12.4 (2) LEC-MR-J3BAT LEC-MR-J3BAT 19X(10)Y(11)Z(12) 200410SERIAL 4X 11 19 11 11.5 SSCNET11.1.5 UVW600VEP (2PNCT) 10 UL/cUL12 30m (1) L1 U U L2 V V L3 () W W L11 L21 P1 B1 P2 B2 N C P C P BU BV BW OHS1 OHS2 .

CLQ

107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 36 112 126 CD hole

Compact Cylinder with Lock Series CLQ

107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 36 112 126 CD hole

Table of Contents

Series AS-FG Speed Controller with One-touch Fittin Stainless Series . 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.

CLK1

2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.