0.55

2 4(A) (B) (A) (B) (A) 2 4 2 4 B (EB)3 5(EA) 1 (P) VF3000 VF5000 = 2(B) (A)4 5 1 3 1 5 3 (EA) (P) (EB) (P) (EA) (EB) (EA)5 1 3(EB) ; B (P) 2-position double Symbol @ = : 2-position single > > : @; VF1000 4(A) (B)2 (A) (B) (B) (A) 4 2 2 4 5(EA) 1 (EB)3 (P) VF3000 VF5000 2(B) (A)4 5 1 3 3 1 5 = (EA) (P) (EB) (EB) (P) (EA) (EA)5 1 3(EB) ; (P) 3-position closed center/exhaust center/pressure

Square Tube Type Air Cylinder Series MB1

(Refer to Rod boot/Air cushion on page 11.)

Magnetically Coupled Rodless Cylinder

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

Air Cylinder Series MB

, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-F5LF D-P5DWL Bore size (mm) A A A A B A A A A B B B B B B B 32 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 40 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 50 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 63 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 80 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 100

Thermo-con/Rack Mount Type

Signal contents HECR008 HECR012 N 100-240 VAC 200-240 VAC L 100-240 VAC 200-240 VAC E PE PE 8 7 6 5 4 3 2 Pin no. Signal contents 1-2 Unused 3 Terminal A of resistance temperature detector 4 Terminal B of resistance temperature detector 5 Terminal B of resistance temperature detector 1 E 2.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300

JXCx-OMT0001CN

(14.2) (b) (8) 2 1 (a) (14) (18) B1 A1 (17.7) 6 5 (c) 2 1 A6 B6 15 16 L (11) (30.7) 12.4 [820m] (a) (b) L E C P -* A B-1 2 L A A-1 1 B B-2 6 ) 8 8m B A-2 5 COM-A/COM B-3 3 ) A 10m COM-B/ A-3 4 ) B 15m (c) Shield ) C 20m Vcc B-4 12 GND A-4 13 A B-5 7 ) A A-5 6 () B B-6 9 B A-6 8 3 (14.2) (b) 2 1 (5.5) (14) (a) B1 A1 5 (17.7) 6 (c) 2 1 (18) A6 B6 (6.3) 16 15 L (11) (30.7) -82No.JXC-OMT0001CN-C

JXCx-OMT0061CN

1 2 L A A-1 1 B (B-2) 6 1 1.5m B (A-2) 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m (3) Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 S B (B-6) 9 B (A-6) 8 3 (14.2) (2 ) 2 1 (8) (1 ) B1 A1 (14) (18) (17.7) 6 5 (3 ) 2 1 B6 A6 15 16 (11) (30.7) 15.2 [820m] (1) (2) -L A B-1 2 A A-1 1 B (B-2) 6 8 8m* B (A-2) 5 COM-A/COM B-3 3 A 10m* COM-B/ A-3 4 B 15m* (3) Shield

1.1

block C 45 B A 220 4 x 11 (mm) A B 240 C 14 Transformer part no.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

MXS Series Air Slide Table

3H9 2.5 deep +0.025 0 5 M 0.5 18 20 Z ZZ (NN-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5

VQC

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

K35-OMW0030

Cylinder stroke 200 200 mm 250 250 mm 300 300 mm 350 350 mm 450 450 mm 530 530 mm 15 (6) Rod boot Part number Bore size Stroke (mm) (mm) Silicone rubber material Nylon tarpaulin 125 200 C96A2G-1461V-R C96A2G-0294Y-R 160 200 C95A6G-471AQ-R CS1-J16-300 300 200 200 C95B0G-472AQ-R C95B0G-0304Y-R 300 250 350 C95B5G-533AQ-R C95B5G-574EQ-R 450 200 C1SC2G-1468V-R CS1-J25-200 350 C1SC2G-1470V-R CS1

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Applicable bore size MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16 MY-S20 MY-S25 MY-S32 61 67 81 100 120 142 172 26 38 50 64 4.9 6.4 8 11.7 3 4 5 6 6.5 8 9.5 11 3.4 4.5 5.5 6.6 A B A B A B

MY1

64 11.7 6 11 6.6 M8 x 1.25 B 120 142 MY-S40A M10 x 1.5 55 80 14.8 8.5 14 9 B 142 164 MY-S63A 172 202 M12 x 1.75 70 100 18.3 10.5 17.5 11.5 B A set of side supports consists of a left support and a right support.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 623 3 Port Pilot Solenoid

51

Head Flange (mm) Bore size (mm) Standard stroke A AL D J B B1 C H1 H ZZ E F FX FD FT GA GB I KA MM NA P S 20 25 32 40 50 63 80 100 12 12.5 11 10.5 15 15 17 20 85 92 94 101 130 130 162 166 14.5 17.5 17.5 23.5 29 29 35.5 35.5 5 6 6 8 11 11 13 16 14 16.5 20 26 32 38 50 60 20 23 23 29 35 35 44 44 Up to 200 12 15 15 20.5 26 26 32.5 32.5 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 8 10 12

VQ7-6/7-8

ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 12 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA