Filter Regulator

155 45 38.4 M621.5 30 45 0 42.5 82.5 42.5 82.5 42.5 82.5 Optional specifications Semi-standard specifications Metal bowl Metal bowl with PC/ PA bowl level gauge With auto Model Bracket mount Panel mount With barb With drain With drain With drain With drain With drain drain fitting guide cock guide cock guide Q R U V W Y Z B B B B B B B AW20-D 30 34 43.9 5.4 15.4 55 2.3 29.7 28.5 14 6

Support Guide/11-LEFG Series

32 30 LES Vacuum port Rc1/8 n x 5.5 LEPY LEPS 60 LER 150 D x 150 (= E) B 15 LEH LEY -X5 11LEFS 11LEFS Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG32-S-50 200 57 180 4 11-LEFG32-S-100 250 107 230 11-LEFG32-S-150 300 157 280 11-LEFG32-S-200 350 207 330 6 2 300 11-LEFG32-S-250 400 257 380 11-LEFG32-S-300 450 307 430 11-LEFG32-S-350 500 357 480 8 3 450 11-LEFG32-S-400 550 407

VDW

Model Port size P B B1 E F C D J K M Grommet Q R 20 VDW1 VDW2 M5 42.5 15 4 11 15.5 30 20 10 6 11 M2.5 M5, 1/8 52 5 15 17 36.5 22 11 8 13.5 M3 Body material Stainless Steel Grommet D 300 Q F Full wave rectifier (AC type) R E C A 2 x P Port size B B1 M 2 x J thread depth K (mm) Mounting method Electrical entry Model Port size P A B D E F B1 C J K M Grommet Q R 52 VDW1 VDW2 12 20 15 6 11 M2.5

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

Rotary Table/

3H9 3 11 12 Rotary Table/Rack-and-Pinion Type Series MSQ Size: 10, 20, 30, 50, 70, 100, 200 How to Order Size 10 20 30 50 High Precision Type A F9B MSQ A 10 MSQ B 10 A F9B Basic Type Number of auto switch 2 pcs. 1 pc. n pcs.

0.4

screw R R B B B B B B B B X X P P 7.7 18.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Mini Free Mount Cylinder

acting 10 12 30 D C D UJ B F8N Number of auto switches Clean Series Nil 2 pcs. 1 pc.

CJ5-S

18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25 59 3 44 60 3.5 M10 x 1.25 35.5 1/8 85 16 6 131.5 40 Up to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 1/8 93 16.5 6.5 150 50 Up to 1200 35 32 27 69 32 20 21 14 58 11 58 M8 x 1.25 7 18 10 40 74 4 66 90 5.5 M18 x 1.5 55 1/4 21.5 11.5 176.5 109 63 Up to 1200 35 32 27 81 38 20 21 14 58 11 72 M10 x 1.5 7 18 12 45 74

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Low speed cylinder Bore size 32 40 50 63 2 pcs. 1 pc. n pcs.

10

Q F G1/2 23 Y C R E C R (1.5) (1.5) Y E B1 B A B1 B A 2 x P Port size 2 x P Port size Terminal part U W M U W M Flat terminal connector 250 Series X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole 11 9 6.5 15 (mm) Mounting bracket dimensions Port size P 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 Size A B B1 C D E F M 12.8 19 19 U 46 56 56 W 36 46 46 X 11 13 13 Y 6 7 7 1 2 19 24 24 30 43 45 45 50

HRX-OM-Q026

15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-10: Cooling Capacity (HRSH250-A-20/40-) 8.4 Cooling Capacity HRSH Series 8-14 HRX-OM-Q026 Chapter 8 Documents 8.4.5 HRSH300-A-20/4035 Ambient temperature: 32 oC 30 25 Ambient temperature: 43 oC Cooling capacity [kW] Ambient temperature: 45 oC 20 15 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-11: Cooling Capacity

HRX-OM-Y098

6 B contact (normally closed) By default HRL Series 5.4 Description of the Screen 5-61 HRX-OM-Y098 Chapter 5 Display and Setting of Various Functions Table 5.4-30 Signal type for contact output signal 4 to 6 No.

VQ4000

double check: VQ460 0 1 2 position double: VQ420 3 position closed center: VQ430 3 position exhaust center: VQ440 3 position pressure center: VQ450 0 1 0 1 0 1 0 1 181 108 73 90 50 11 (12.5) 2(B) port 11 (12.5) 4(A) port Indicator light Indicator light 167 181 59 73 50 90 108 2 4 24.6 38 48 11 (12.5) 11 (12.5) B A 4(A) port 2(B) port 14 12 1 5 3 4 2 30 45 24.6 A B 2-5.6 Mounting hole Manual

HRX-OM-T002

the piping: Circulating fluid temperature: 30 This product Users equipment Serial communication Fluid discharge temperature: 30 Heat dissipation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 When only the "set circulating fluid temperature" needs to be the same as the circulating temperature supplied to the user's equipment: Use "MODE 1" of the

SFOD-OMT0009CN

1 BUSY2 30 +COM4 21 BUSY3 11 1) 2 N.C.

1.1

IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 Mass (kg) 275 259 355 299 320 35 355 299 320 42 IDF-TR-8 E C G B D A 4 x F (mm) A 540 B 400 C 260 D 300 E 11 F 30 G 94 Transformer part no.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

A 11 17.5 A B 14 77.2(GZ:79.2) [79.2] G : About 300 H : About 600 78.8(GZ:80.2) [82.2] (Lead wire length) (Non-locking) Manual override 41.5 [48] 33.5 29.1 22.5 R2 R1 P 13 5 10 10 28 5-M5 0.8 (Piping port) [ ] for AC L type plug connector (L) : SYJ3240L -M5 M type plug connector (M) : SYJ3240M -M5 37 37 23.2 (Mounting holes) 23.2 (Mounting holes) 22 2.5 22 2.5 B A B A 11 11 17.5 17.5 A B

MB1

B A+B+90 32, 40 50, 63 80, 100 25 40 30 45 60 55 160 190 175 7 Standard Type Double Acting: Single Rod Series MB1 Accessory Dimensions 30 Rod end nut (standard equipment) Knuckle joint pin Clevis pin Dd9 d 2-d D C L l m H B Bore size (mm) Clevis Knuckle Part No.

CLQ

to 50 80 116.5 53.5 11 11 99 116 134 43 20 53.5 77 53.5 116.5 75, 100 53 125 10 to 50 100 135 63 11 11 117 136 154 50 22 53.5 94 L1 Rod end nut 63 135 75, 100 Rear flange type: CLQG/CDLQG FV M Rear flange type (mm) 4-FD Without auto switch With auto switch Bore size (mm) FZ FX A + Stroke L FT B + Stroke G Stroke range FD FT FV FX FZ G L L1 M A A B B 36 91 10 to 50 63 101 46 9 9 80 92 108