Pin Clamp Cylinders

10 to 60C (No freezing) Cushion None Lubrication Non-lube Piston speed (Clamp speed) 50 to 150 mm/sec Port size (Cylinder port) Rc1/8 * Minimum operating pressure is 0.2 MPa when cylinder part and locking part use the same piping.

IZx-OMP0064

50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to 2000 300 to 2000 10 200 to 300 200 to 1400 200 to 2000 200 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 15 200 to 300 200 to 1400 150 to 2000 100 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000 20 150 to 250 150 to 1300 100

Ionizer

Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Autobalance sensor [Body-mounting type] Installation height of sensor: 10 mm 20 Discharge time (s) 15 Without sensor 10 With sensor 5 0 500 1000 1500 2000 Distance (mm) Static neutralization features are based on the data using the charged plate (size: 150 mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

Electric Actuator / Low profile slider type

Note 10) A reference value for correcting an error in reciprocal operation. -10- (3) LEMH (Linear guide single axis type) / LEMHT (Linear guide double axis type) Model LEMH25/LEMHT25 LEMH32/LEMHT32 50, 100, 150, 100, 150, 200, 250, 300, Stroke (mm) Note 1) 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) 350, 400, 450, 500, 550, 600, (700), (800), (900

Adsorption Plate

Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

W1 TY TF TT TH Z TR TS TO TE TX TC TA TU TD-H10 (Hole) TL CXW 40 50 63 80 100 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 62 60 45 12 17 93 9 10 17 119 85 102 10 60 80 15 CA1-S04 74 60 45 12 17 103 9 10 17 129 95 112 10 60 80 15 CXS CA1-S06 90 73 55 14 22 107 11 10 20 150 110 130 15 70 100 18 110 100 75 17 24 129 13.5 12 26 192 140 166 15 90 120 25 CA1-S08 CXT 130 100 75 17 24 135 13.5 12

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Z TA TD-H10 (Hole) TL TU TC TX TE TO TR TT TS TH TF TY W1 CLS 40 50 63 80 100 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 10 93 80 60 10 102 85 119 17 9 17 12 45 60 62 15 CA1-S04 10 103 80 60 10 112 95 129 17 9 17 12 45 60 74 15 CB CA1-S06 10 107 100 70 15 130 110 150 20 11 22 14 55 73 90 18 12 129 120 90 15 166 140 192 26 13.5 24 17 75 100 110 25 CV/MVG CA1-S08 12 135 120 90 15 188 162

48

20 25 30 50 100 150 200 12 (10 x 2) 0.13 0.10 0.08 0.06 0.04 [kg] Bore size Stroke [mm] 10 20 25 30 50 100 150 200 12 (10 x 2) 0.9 0.7 0.5 0.4 0.2 16 (12 x 2) 0.14 0.11 0.09 0.07 0.04 16 (12 x 2) 0.9 0.7 0.6 0.4 0.2 20 (16 x 2) 0.27 0.22 0.16 0.10 0.07 20 (16 x 2) 1.3 1.0 0.8 0.5 0.3 25 (20 x 2) 0.54 0.45 0.34 0.21 0.15 25 (20 x 2) 2.3 1.9 1.4 0.9 0.6 32 (25 x 2)

Basic Type/Direct Mount Type

Standard stroke 6 10 15 20 25 32 40 50 63 6mm 10mm 15mm Port thread type 20mm Bore size 6, 10, 15 Type M thread Rc NPT G Symbol 25mm 32mm Nil 20, 25, 32, 40 40mm TN TF 50, 63 50mm 63mm Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) 300 6 50, 100, 150, 200 500 10 15 20 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100

LEC-OM02904

10 . 2 10.1 . 2 10.2 . 3 10.3 . 5 10.3.1 . 5 10.3.2 . 6 10.4 . 7 10.5 . 7 10 1 10 10 10.1 10.11(50) 2(51) 70% 04575 LECSS(115% (full load current)) 1000 1000 100 100 10 10 [s] [s] [s] [s] 1 1 0.1 0.1 100 200 300 350 0 50 150 250 100 200 300 400 0 50 150 250 350 1,2[%] 1,2,3[%] (12) [] [] (123) LECSS-S5 LECSS-S7, LECSS-S8 1.()30r/min100%, 2.300~350%LE--350% 10.1 10 2 10 10.2

3 Position Cylinder Series RZQ

Full stroke 5 10 10 15 15 15 20 20 15 2 pcs.

30

-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 8 10 10 12 12 12 16 16 1 1.5 1 1.25 1.5 1.75 1.5 2 D-X Technical Data 1139 JC Series Dimensions of Accessories Rod end nut (mm) d: Thread nominal size Model Order number M8 x 1 M8 x 1.25 M10 x 1 M10 x 1.25 M10 x 1.5 M12 x 1.25 M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 H 5 5 6 6 6 7 7 7 8 10 10 11

VQZ1000/2000/3000

part number consists of 10 units.

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

e

Heavy load Standard load Medium load Light load [mm/s] Switch and Speed Note 1) Switch and Acceleration Note 2) [m/s2] Nominal size Low speed Medium speed Standard speed 16 25 E-MY2BH1612 Stroke 1 2 3 4 5 6 7 8 9 10 10 20 30 40 50 75 100 300 500 1000 50 75 100 125 150 200 250 300 500 1000 100 200 300 400 500 600 700 800 900 1000 1 2 3 4 5 6 7 8 9 10 0.25 0.49 0.74 0.98 1.23 1.47 1.72 1.96

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

90

to 24 VDC 10%, Ripple (P-P) 10% or less 15 mA or less 2% F.S.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Model Cushion Rubber Air Bore size (mm) Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Relief type Vacuum suction type 10-/21-CJ210 10 15, 30, 45, 60, 75, 100, 125, 150 Double 10-/21-CJ216 M5 x 0.8 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Band mounting only Standard acting, Non-lube 10-/22-CJ210 15, 30, 45, 60, 75, 100, 125, 150 10 Single rod 10-/22-

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Model Cushion Rubber Air Bore size (mm) Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Relief type Vacuum suction type 10-/21-CJ210 10 15, 30, 45, 60, 75, 100, 125, 150 Double 10-/21-CJ216 M5 x 0.8 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Band mounting only Standard acting, Non-lube 10-/22-CJ210 15, 30, 45, 60, 75, 100, 125, 150 10 Single rod 10-/22-

Fieldbus System

Core wire colors Brown: Not connected Note 1), 24 VDC 10% (Control power supply) Note 2) White: 24 VDC +10%/5% (Solenoid valve power supply) Blue: Not connected Note 1), 0 V (Control power supply) Note 2) Black: 0 V (Solenoid valve power supply) Gray: Not connected Brown: 24 VDC +10%/5% (Solenoid valve power supply) White: 0 V (Solenoid valve power supply) Blue: 24 VDC 10% (Control power