Vacuum Unit

6 p. 31 3 30 m ZK2 SC3 4 A Body gasket1 (10 pcs. per set) Construction !1 p. 31 Applicable nozzle size ZK2 BG5 A 4 For nozzle size 07, 10 6 For nozzle size 12, 15 1 Applicable type Release lever (10 pcs. per set) Construction !

Air Slide Table Series MXP

20 15, 25 20, 30 Model MXP6-5 MXP6-10 MXP8-10 MXP8-20 MXP10-10 MXP10-20 MXP12-15 MXP12-25 MXP16-20 MXP16-30 Exclusive body is to be used for the one with shock absorber.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mWV D-M9mAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mW 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9mA 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7m/A80 D-A7mH/A80H D-A73C/A80C 5 10 15 + 10

Mini Free Mount Cylinder

For Lateral Mounting Cylinder model Mounting bolt size For Axial Mounting Material: Structural steel Material: Structural steel C D A B 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 CDUJB12-5 -10 -15 -20 -25 -30 CDUJB16-5 -10 -15 -20 -25 -30 CDUJB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDUJS12-5 -10 -15 -20 -25 -30 CDUJS16-5 -10 -15 -20 -25 -30 CDUJS20-5 -10 -15 -20

Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

79 16 24 32 40 47 55 12 113 23 34 45 57 68 79 16 201 40 60 80 101 121 141 Standard Stroke Weight With Shock Absorber (g) (mm) Body weight Additional weight of magnet and rail Model MXP6-5 MXP6-10 MXP10-10 MXP10-20 MXP12-15 MXP12-25 MXP16-20 MXP16-30 Model Standard stroke 80 105 130 210 210 320 640 830 10 10 13 20 17 23 20 23 MXP6 5, 10 MXP10 10, 20 MXP12 15, 25 MXP16 20, 30 Shock Absorber

Compact Type Dual-Rod Cylinder Series CXSJ

Compact Type Dual-Rod Cylinder 15, 20, 25, 32 additionally released. Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

HRX-OM-T002

: 45 oC 12 12 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 9-5 Cooling capacity(HRS090-A-20/40/46) 9.4.2 HRS090-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 12 14 12 10 10 Cooling capacity [kW] Cooling capacity

EX120/121/122

to to to 5 5 11 10 9 8 8 9 10 11 1 + 2 + 3 + 4 + 5 + + 5 + 4 + 3 + 2 + 1 6 6 12 13 14 15 15 14 13 12 10 10 6 + 7 + 8 + 9 + 10 + + 10 + 9 + 8 + 7 + 6 PWR PWR 11 11 COM COM 15 15 11 + 12 + 13 + 14 + 15 + + 15 + 14 + 13 + 12 + 11 5A 5A 0V +24V +24V 0V 2 x M4 Mounting hole Shown with cover removed. 60 1711 Series EX510 Parts Description i w t Output Unit No.

CY1F

Bore size (mm) 10 15 25 10 15 25 Auto switch Nil Without auto switch Refer to the table below for auto switch model numbers.

4/5 Port Air Operated Valve Series SYJA3000

11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Mounting holes for manifold) [ ] for AC VZ L plug connector (L): SYJ5l2-lLll-M5 M plug connector (M): SYJ5l2-lMll-M5 VS 15.5 15.5 11 2.5 2.5 A A 11 13 8.5 13 8.5 34.7 34.7 65.5 51.9 300 (Lead wire length) 55.9 [57.2] (Lead wire length) 300 40.6 [47.1] 29.5 [36] 26.6 14.5 23 17.1 26.6 14.5 3 20 20 10.5 23 10.5 10 2-2.6 9 8 9 8 2-2.6 3 10 15 (Mounting holes) (Mounting holes) 15 50.7 50.7

ZP

Model Size C10 A 10 ZP10C B 12 C 4 D 13 E F Y 1.7 7.7 7.7 8.2 9.5 9.5 10 13.7 14.7 12 12 12.5 14 14 14.5 18.5 19.5 3.8 ZP10U to 50U C13 13 ZP13C 15 4 13 1.8 C16 16 ZP16C 18 4 13 1.2 C20 20 ZP20C 23 4 15 1.7 C25 25 ZP25C 28 4 15 1.8 C32 32 ZP32C 35 4 15 2.3 C40 40 ZP40C 43 7 18 3.3 C50 50 ZP50C 53 7 18 Deep (D) ZP10D to 40D Model Size U02 A ZP02U B 2.6 C 1.2 D E F Y 2 4 6 8 10 13 16 20 25

10

(0.1) 2.21 580 10 53.0 15 (0.1) 2.21 630 10 53.0 1/2 Normally Open (N.O.)

MTS

32 32 (47) 0 (15) 25 D-M9, D-M9V 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-F9W, D-F9WV 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-A9, D-A9V 0 (15) 0 0 50 50 (61) 38 38 (53) 0 (11) 32 D-M9, D-M9V 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-A9, D-A9V 0 (15) 0 0 54 54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

1.1

15 220 270 160 15 4 x 8 4 x 10 250 290 190 IDF-TR-5/6/7 Terminal block C 45 B A 220 4 x 11 (mm) A B 240 C 14 Transformer part no.