Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

HRX-OM-W032

10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig. 8-3: Cooling Capacity 8.5 Pump Capacity 0.6 60 Usable flow rate range 0.5 50 Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1 10 Circulating fluid return 0.0 0 0 10 20 30 40 50 60 70 80

CEx-OMQ0011

R03-J8M 23 6-1 () ML2 B 25 500 L Z73 B 25 25mm 32 32mm 40 40mm 2 s 1 n n () S () 2 s 1 B () L L (mm) (mm) 25 32 40 12000(1mm) 25 MY-A25L 25 MY-S25A MY-S25B 32 MY-A32L 32 MY-S25A MY-S25B 40 MY-A40L 40 MY-S32A MY-S32B 6-2 CEU2 NPN P PNP 24 6-3 CE1-R 05 5m 10 10m 15 15m 20 20m C A B CD E F G () 25 7-1 AA BB CC DD EE HA KA KB KK 9 45.5 5.5 M5x0.8 9.5 69 30.5 16 M6x1 11 54 6.5

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMV0016 Bellows assembly, Nut assembly 16 25 40 50 Valve size Description Part indication No. Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

155

V or less at 10 mA (2 V or less at 40 mA) 4 V or less 100 A or less at 24 VDC Leakage current 0.8 mA or less Indicator light Red LED illuminates when turned ON.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

R1 P 13 13 5 5 10 10 5-M5 0.8 (Piping port) 10 10 28 5-M5 0.8 (Piping port) 28 [ ] for AC Other dimensions are the same as the grommet type. [ ] for AC Other dimensions are the same as the grommet type. 27 Series SYJ3000 Valve Drawings 3 Position Closed Center / Exhaust Center / Pressure Center (mm) 3 4 5 G H Grommet (G), (H) : SYJ3 40-M5 10 9 5 10 16.5 33.5 23.2 (Mounting holes) Manual

Card Motor

[mm] Table Displacement (Reference Values) Displacement through the entire stroke when a load is applied to the point indicated by the arrow Table displacement due to yaw moment load Table displacement due to roll moment load Table displacement due to pitch moment load 40 A1 40 A1 40 LAT3m-10, -20, -30 LAT3m-10, -20, -30 LAT3m-10, -20, -30 0 0.4 0.9 1.3 lbf 0 0.4 0.9 1.3 lbf 0 0.4 0.9 1.3

High Vacuum L Type Valve

AS568-025-XN1 7 XL-OMS0001-B Bellows assembly, Nut assembly 16 25 40 50 Valve size Description Part indication No. Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM01301 10.

OMR0032

LAT3LAT3MLAT3F600 350 700 Min. travel time [ms] Min. travel time [ms] Min. travel time [ms] Load weight1000g Load weight1000g Load weight1000g 300 600 [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel

Vacuum Equipment

Selection Graph (2)-1 Pad Diameter Selection Graph by Lifting Force Vertical Lifting (2 to 50) Selection Graph (1)-1 Pad Diameter Selection Graph by Lifting Force Horizontal Lifting (2 to 50) 50 40 32 25 20 16 13 10 8 50 40 32 25 20 16 13 10 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

MHx-OMU0057

6 MHZ2-16 M40.7 1.6 4.5 MHZ2-20 M50.8 3.3 8 L L MHZ2-25 M61 5.9 10 MHZ2-32 M61 5.9 10 MHZ2-40 M81.25 13.7 13 Nm Lmm MHZ2-10 M30.5 0.69 5 MHZ2-16 M40.7 2.1 8 MHZ2-20 M50.8 4.3 10 MHZ2-25 M61 7.3 12 MHZ2-32 M61 7.9 13 MHZ2-40 M81.25 17.7 16 Nm MHZ2-10 M2.50.45 0.49 MHZ2-16 M30.5 0.88 MHZ2-20 M40.7 2.1 MHZ2-25 M50.8 4.3 MHZ2-32 M50.8 4.3 MHZ2-40 M61 7.3 D-Y59 D-Y69 D-Y7P 7 - 1. 2. 1.

High performance type Step Motor Controller (Servo/24 VDC)

Setting Data Entry 37 7.1 Step data 37 7.2 Basic parameter 40 7.3 Return to origin parameter 43 8.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

pressure: 0.5 MPa 10 20 50 0.15 0.3 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 40 0.6 0.1 0.2 30 0.4 5 10 20 0.05 0.1 0.2 10 0 0 0 0 0 10 20 5 10 5 10 0 Number of needle rotations Number of needle rotations Number of needle rotations 15-9-62 Speed Controller for Low Speed Operation Standard Type (

Trimmer Auto Switch

to 40 Parallel style MHZL2 10 to 25 Wide type MHL2 10 to 40 Parallel style MHS2 (2 fingers) 32 to 63 Auto switch mounting screw Parallel style MHS3 (3 fingers)/MHS(L)3 32 to 63 Parallel style MHS4 (4 fingers) 32 to 63 Auto switch Angular style MHC2 10 to 25 1.

PF-OMN0009_C

* , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12

BP1000

40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Refer to Handling Precautions for SMC Products (M-E03-3) for Safety Instructions and Vacuum Equipment Precautions. 50 40 40 40 30 20 20 20 Caution Maximum suction flow 10 Refer to the vacuum equipment model selection on Best Pneumatics No.r for the selecting and sizing of Series ZQ. 0 0.1 0.2 0.3 0.4 0.5 0 5 10 15 20 25 Suction flow (l/min(ANR)) Supply pressure (MPa) 3 Space Saving Vacuum

Digital Flow Switch (Integrated display type)

to 92.7 4 to 186 8 to 371 Instantaneous CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Setting/Display flow range flow CO2 0.8 to 18.5 1.8 to 46.3 4 to 93 8 to 185 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Min. setting/display unit 0.1 CFM x 10-2 0.1 CFM x 10-2 1 CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x

PA3000/5000/PAX1000

40 Air consumption 100l/min (ANR) 30 Air consumption 200l/min ANR) 30 Air consumption 100l/min (ANR) Air consumption 50l/min (ANR) 20 20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.