3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 4-13-8 9 3

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 5 Series VKF300 Dimensions/Manifolds

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Lead wire length 300 mm 2-M5 x 0.8 4(A), 2(B) port Direct manual override Indicator light 0.5 0.5 4 (11) 11 2 5.5 0.6 0.6 15 5.3 5.3 13 34 33 25.5 29 6 3 L plug connector (L) 21.5 4 2-3.5 mounting hole 28.5 49 50.5 2-M5 x 0.8 1(P), 3(R) port 3 1 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

3 x 5 0 depth 10 (A, B, C common view) M5 x 0.8 thread depth 5 16 70 (76) Vacuum suction port 11 25 6 x M5 x 0.8 thread depth 10 (A, B, C common view) 2 4 5-0.03 0 5-0.03 0 12-0.05 0 Open: 37, Closed: 19 2 x M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 With Auto Switch: MDHR2-30R 11221122MDHR2-30E port location B 3 x M5 x 0.8 thread depth 10 P.C.D.43 (Mounting

Bernoulli Gripper

For pressure sensor details, refer to the PSE540 series in the Web Catalog and the Operation Manual. 11 Bernoulli Gripper ZNC Series Dimensions: 20 (With mounting plate) Basic type (24) 7.5 2 x M2.5 thread depth 4.2 16.5 M5 x 0.8 thread depth 3.7 Multi-port2, 4, 5 11.8 2 x M3 x 0.5 thread depth 6 45 6.5 Counterbore diameter 8.5, depth 0.8 35 11.3 20 16 With a plug attached: 2.2 M5 x 0.8 thread

10

A B C +0.030 4H9 0 depth 4 2 x 6.6 through (Body mounting hole) 2 4 3 52 1 Dimensions of auto switch mounting groove (Enlarged view) 4 x M6 x 1 thread depth 12 (Mounting thread) +0.052 27H9 0 depth 1.5 5 +0.030 4H9 0 depth 4 Auto switch mounting groove (4 locations)1 M5 x 0.8 (Finger opening port) 4 x M6 x 1 (Piston rod and rack screw) H 65 M5 x 0.8 (Finger closing port) 28.2 11 1 20 10 10

Manifold Specifications

DIN Rail Manifold DIN Rail Manifold Common SUP/Common EXH Note) For more than 11 stations, supply air to both sides of 1(P) port and exhaust air from both sides of 3(R) port.

MQQ

x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc

MQQ

0.5 M4 x 0.7 7 35 + Stroke 35 + Stroke 7 Standard type: MQQT CC 40 + Stroke 8.5 13 to 17 M5 x 0.8 M6 x 1 45 + Stroke 9 RB 7.5 50 + Stroke 8 to 11 M3 x 0.5 65 + Stroke M4 x 0.7 7 J Anti-lateral load type: MQQL (Built-in ball bushing type) 70 + Stroke 5.5 80 + Stroke 8 13 to 17 M5 x 0.8 M6 x 1 D6.5 85 + Stroke 105 + Stroke 7 -X : Stroke 20Data 10-5-11 11 Series MQQ Dimensions Basic style (Through-hole

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

X 0.8 thread depth 10 P.C.D43 (Mounting thread) 80 120 15.5 120 C A 54 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 14 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 25 25 6-M5 X 0.8 thread depth 10 (A, B, C common view) 50 3-5 +0.02 0 depth 10 16h9 0 0.043 (A, B, C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 -0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed:19 2-M5 X

JCRB-OM00003

Table 1 Model Solenoid valve (CV) Speed Controller Tubing CRB10 CRB15 0.05 AS-M5 4/ 2.5 6/ 4 AS-M3(Type270) CRB20 CRB30 CRB40 0.1 to 0.2 AS-M5 4/ 2.5 6/ 4 Note) The speed controllers must be used in a meter-out control. (Do not use a speed controller for slow speed.) 9 4.

CYP_EN

Applicable grease pack Grease pack Weight GR-X-005 5 g 10/11 10-1. Model Selection 1 11/11 10-2.

3 Port Solenoid Valve

Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 5 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Body ported S070C-G-32 Grommet

Rotary Actuator/Vane Style Series CRB1

(Example) For M3: L1 = 6 Applicable shaft types: S, Y L2 + (3 x P) L1 + ( 3 x P) Q1 = M Y axis S axis (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2= 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 Q2 = M M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A33 Machine

Ionizer

Note) Bar length (mm) KJH04-M5-X34 460 to 700 860 to 1580 1660 to 2220 Note) Plug (M-5P-X112) 1 pc. is shipped together. Symbol X13 2 Non-standard power supply cable length Available in 1 m increments from 1 m to 20 m. Note 1) 11 m or longer power cables are not CE Marking-compliant. Note 2) Use standard power cables for 3 m and 10 m lengths.

V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

Support Guide/11-LEFG Series

11-LEFG16-S-200 294 207 280 6 2 200 11-LEFG16-S-250 344 257 330 11-LEFG16-S-300 394 307 380 8 3 300 11-LEFG16-S-350 444 357 430 11-LEFG16-S-400 494 407 480 10 4 400 11-LEFG16-S-450 544 457 530 11-LEFG16-S-500 594 507 580 12 5 500 40 11-LEFG25-S 45 64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10

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M5 148.5 For M5 M5 150.5 For M6 M6 165.5 For M6 M6 169.5 For M8 M8 196.5 For M8 M8 201 For M8 M8 214 10 Coolant Valve Series SGH External pilot solenoid type U F L S K Manual override (Non-locking) Pilot port Pilot EXH port Q: Female thread for (Filter standard installation) mounting bracket 4 threads on each side. 8 threads in total.

Angle Seat Valve

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.