3 Port Solenoid Valve

Kyodo turbine 32 Fuji Kosan Co., Ltd. Fucoal turbine 32 Kygnus Oil Co. Turbine oil 32 Contact SMC regarding Class 2 turbine oil (with additives), ISO VG32. Back page 3 3 Port Solenoid Valves/Common Precautions 3 Be sure to read before handling. Air Supply Maintenance Warning Warning 1. Perform maintenance procedures as shown in the instruction manual.

42

2 x 5.6 Mounting hole 2 x 5.6 Mounting hole 30 45 Manual override 129 91.5 41.3 32 30.6 27 78.8 41.3 32 30.6 27 PE X PE X R1 R2 P R2 P R1 14.5 14.5 19.5 (21) 19.5 (21) 1/8" External pilot port 1/8" PE. port 31 31 1/4", 3/8" 19.5 (21) 19.5 (21) 1/8" PE. port 31 31 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/4", 3/8" 1(P), 4(A), 2(B), 5(R1), 3(R2) port : Values for 3-position ( ): Values for 3/8

Vacuum Gripper

TQ1230001-OM105-A 3. Specifications 3.1.

End Lock Cylinder Series CBG1

63 35 32 27 38 20 16.5 32 2 14 14 58 11 45 59 72 M10 x 1.5 depth 16 to 1400 80 40 37 32 50 25 19 40 3 20 20 71 13 53.5 68 89 M10 x 1.5 depth 22 to 1500 100 40 37 41 60 30 20 50 3 20 20 71 16 64.5 79 110 M12 x 1.75 depth 22 Bore size (mm) K KA MM MO NA P RF S TA TC TDH9 TE TF TG WL ZZ 20 +0.08 0 5 6 M8 x 1.25 15 24 1/8 11 81 11 M5 x 0.8 8 4 0.5 5.5 15 118 25 5.5 8 M10 x 1.25 15 29 1/8 11

VXA21/22

P P Model Orifice size (mm) Model Connecting port size Rc(PT) VXA3114 , 1 8 1 4 , 1 8 1 4 , 1 8 1 4 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 1.5 2.2 VXA3124 VXA3134 VXA3224 VXA3234 3 2.2 3 MaterialO Body Seal Brass, Stainless steel NBR, FPM, EPR 4 VXA3244 4.1-67 VXA31/32 Common (C.O.)

Electric Actuator / Low profile slider type

LEM-OM00203 PRODUCT NAME Electric Actuator / Low profile slider type MODEL / Series / Product Number LEM Series Applicable models: LEMB, LEMC, LEMH, LEMHT L LE EM MB B 2 25 5/ /3 32 2 L LE EM MC C 2 25 5/ /3 32 2 ( (C Ca am m f fo ol ll lo ow we er r g gu ui id de e t ty yp pe e) ) ( (B Ba as si ic c t ty yp pe e) ) L LE EM MH H 2 25 5/ /3 32 2 L LE EM MH HT T 2 25 5/ /3 32 2

Table of Contents

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

VQZ1000/2000/3000

(A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

MHS

C C 2 5 3 mm Nm 16 M2.50.45 2 0.3 20 M30.5 2.5 0.6 25 M30.5 2.5 0.6 32 M40.7 3 1.4 40 M40.7 3 1.4 50 M50.8 4 2.8 63 M50.8 4 2.8 80 M61 5 4.8 21 1.

VQ7-6/7-8

38(53) 50(63) 32(42) 5 3 1 23(30) 38(53) 32(42) 1 23(30) 2-3/8, 1/2, 3/4 30(42) 30(42) X(PE) port 1/8 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 3/8, 1/2, 3/4 R1, R2 port P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-25 Series VQ7-8 Construction DIN Terminal Type Metal seal Rubber seal type VQ7-8-FG-SVQ7-8-FG-S-R !

JXCx-OMX0009

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield (3) Cable color Terminal No.

AKH/AKB Series Check Valve with One-touch Fitting

Connection thread NPT H Effective area (mm) Weight g A L M Model (Width across flats) Applicable tubing AKH03-U10/32 AKH03-N01S AKH07-U10/32 AKH07-N01S AKH07-N02S AKH09-N01S AKH09-N02S AKH09-N03S AKH11-N02S AKH11-N03S AKH11-N04S AKH13-N03S AKH13-N04S 8 11.11 10-32 UNF 1/8 10-32 UNF 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 31 31.7 21.2 20.6 22.7 22.9 25 27.7 36 35.5 48.3

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

Cylinder with Lock Series CLS

(Example) CDLSL140-100 3 wire (NPN equiv.)

Air-hydro Unit

Combinations Converter nominal size Control valve Valve unit size Combined valve 2 0, 1, 2, 3 0, 1, 2, 3 0, 1, 2, 3 2 0, 1, 2, 3 0, 1, 2, 3 0, 1, 2, 3 2 0, 1, 2, 3 0, 1, 2, 3 2 0, 1, 2, 3 0, 1, 2, 3 0 1 2 3 0 1 2 3 0 1 2 0 1 2 S 63 Speed controller Combined valve (Stop valve, Skip valve) The stop valve for intermediate stopping and the skip valve for last-forwarding are compound integrated

Speed Controller with Uni One-touch Fitting AS Series

33 33 34 36 54 55 57 54 55 57 94 96 14.5 5 32" 1 8 14.2 36.1 31.1 30.5 25.5 14.3 3 16" 16.5 17 18.5 14.5 16.5 17 18.5 21 17 18.5 21 17 18.5 21 21 22 12 1 4" 5 16" 5 32" 3 16" 17.2 17 1 4 1 4" 18.5 39.4 34.4 32.0 26.6 5 16" 3 8" 19 1 4" 1 4 45.9 40.9 38.1 33.1 23.0 19 20.3 5 16" 3 8" 1 4" 5 16" 19.4 45.0 40.0 37.6 32.6 19 3 8 23.0 3 8" 3 8" 1 2 18.6 24 22.4 54.6 47.1 44.5 37.0 1 2" Note 1

Vacuum Module Series ZX

Rc G Note) Station 8 only 8 (Ordering example) If installed on station 1 and station 3: ZZX106-R 1 pc. ZX1101-K15LZ-EL(-Q) 6 pcs. ZX1-R1-1 ZX1-R1-3 ZX1-R16 (Dummy spacer) 4 pcs. NPTF When spacers are mounted alternately, specify them together. When retrofitting, 3 pcs. of M2.5 x 32 (for ZX) are necessary.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

8 43 116 11 19 15 63 55 80 R0.5 M10 x 1.5 28 8 80 60 22.4 30 17 17 22 10 25 M18 x 1.5 30 3/8 47 120 11 21 15 80 65 90 R2.5 M12 x 1.75 32 8 100 75 28 32 22 20 26 13 29 M22 x 1.5 35 1/2 57 132 11 26 25 100 80 100 R2.5 M12 x 1.75 38 6.5 118 90 35.5 35 27 19 27 13 34 M27 x 2 35 1/2 66 140 12 34 32 125 80 100 R2.5 M14 x 2 38 6.5 140 112 35.5 35 27 19 27 15 34 M27 x 2 35 1/2 77 140 12 34 32 160

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

wire (NPN) 3 wire (PNP) IC circuit A96 A96V 5V F9N F9NV F9P F9PV 2 wire F9B F9BV Relay, PLC Grommet Yes 12V 24V 3 wire (NPN) 3 wire (PNP) F9NW F9NWV Diagnostic indication F9PW F9PWV 2 color indicator 2 wire F9BW F9BWV Lead wire length symbols: 0.5m Nil (Example) F9NW 3m...

ZCUK

Non-rotating Rod Accuracy (No load/At retraction of the rod at the locking plateside) Bore size (mm) 10 0.8 16 20 25 0.5 32 Non-rotating rod accuracy Allowable Rotational Torque Bore size (mm) 10 16 20 25 32 0.20 Allowable rotational torque (Nm) Minimum Operating Pressure 0.02 0.04 0.10 0.15 (MPa) Bore size (mm) 10 16 20 25 32 3.