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Table 1 shows the tightening torque for reference. LQHB Table 1 Tightening Torque of Union Nut TL TIL 6.

INFORMATION Pressure adjustment of water line Water Regulator Model/Specifications Model WR110--X224 WR110--X215 Port size Rc1/8, 1/4 Rc1/8, 1/4, NPT1/8, 1/4 Fluid *1 Water Ambient and fluid temperature 5 to 60C (No freezing) Proof pressure 1.72 MPa Maximum operating pressure 0.8 MPa Set pressure range 0.08 to 0.39 MPa 0.05 to 0.69 MPa Pressure gauge port size Rc1/8, 1/4 Rc1/8, 1/4, NPT1/

Emergency display Display: Red/display the error code on Lt;;D Pressure display 3 1/2 Digit LCD Se ~ diagnosIs functIOn Excess pressure/Data error/ NoIe2) Excess current/Pressure during O-clear Operating temp.range O~50 'C I Bottom mode Noise resistance 500Vp~p pulse width 1 itS standing 1 nS fbl/nn lULl Insulation resistance Between whole wires and case 2M Q (SOVDC by megameter) Vibration

Other lengths available based on minimum order quantity TG-2 TG-1 SMC Tubing Accessories TK-1 Tube Cutter (Tubing 13mm or less) TK-2 Tube Cutter (Tubing 18mm or less) TK-3 Tube Cutter (Low Cost) TG-1 Tube Release Tool (4, 6mm tube) TG-2 Tube Release Tool (1/8 , 1/4 tube) TK-3 TK-1 SMC Offers a Rainbow of Standard color choices 33 TIUB 05 BU 20 TU 0425 BU Polyurethane Tubing Polyurethane Tubing

JIS Symbol Construction/Dimensions AD402 AD600 Rc 1/4, 3/8, 1/2 Valve assembly Body Rc 3/4, 1 O-ring Body Gauze Lever Valve HA O-ring Chamber Piston assembly AT Float Spring Case ID Long hole of chamber Piston O-ring AMG Rc 3/4, 1 Drain guide Component Parts AFF Drain Rc 3/8 No. q Description Body Material Aluminum die-casted AM Working principle (AD402) When no pressure is applied internally

Fix switches outside 1 to 4 mm further than the values in the above table (if 1 switch is used, make sure that it turns ON and OFF properly; if 2 switches are used, make sure that both switches turn ON). Note 3) ( ) in column W is the dimensions of D-A93.

Metric size 4, 6 6, 8, 10 10, 12 Inch size 1/8, 1/16, 1/4 1/4, 3/8 3/8, 1/2 Orifice diameter 4.4 8 10 Flow characteristics Av x 10-6m2 12 33.6 52.8 VC Cv 0.5 1.4 2.2 Withstand pressure (MPa) 1 VDW Operating pressure (MPa) 0 to 0.5 Fluid temperature (C) 5 to 90 VQ Ambient temperature (C) 0 to 60 VX2 Weight (kg) 0.055 0.115 0.185 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

Fix switches outside 1 to 4 mm further than the values in the above table (if 1 switch is used, make sure that it turns ON and OFF properly; if 2 switches are used, make sure that both switches turn ON). Note 3) ( ) in column W is the dimensions of D-A93.

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + H Mounting Without mounting option With bracket With set nut a Nil B Note 4) + Without auto drain Float type auto drain (N.C.)

Specifications FGH200 FGH300 Model FGH100 Number of built-in elements (element length) (mm) 1(125) 1(250) 1(500) Operating pressure MAX. 1 MPa MAX. 80C (Not above the boiling point) Operating temperature Each kind of fluid (See the table of applicable fluids on pages 63 and 64) Applicable fluid Port size (Rc) 3/8, 1/2, 3/4, 1 Housing Stainless steel 316 (Electrolytic polishing) Material Seals

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Element Description Power supply connector 1 Unused. 1 Power input connector Supplies power for output devices.1 2 To obtain the operation manual about this product and control unit, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. Power LED Indicates the power supply status. 3 2 1: Refer to for the Wiring.

Do not supply air pressure from ports other than 1(P) port. The valve will malfunction when air pressure is supplied from other ports. 3. Do not use the valve under negative pressure. Component Parts No. Zinc die-casted Aluminium die-casted Material Note q Description Valve guide Body Chromated Chromated Chromated Selection w e Handle r Brass Valve Zinc alloy Caution 1.

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

(Refer to page 4, DIN rail and DIN rail mounting adapter for details.) 1 3 5 1 m 20 mm 3 m 30 mm 5 m Actuator cable length Nil ControllerNote 1) Without cable Nil 1 3 5 Without controller 1 m N P With controller (NPN) 3 m With controller (PNP) 5 m System Construction Note 3) Separately sold products Note 2) QController type Note 1) Provided by customer Option Note 1) QCounter cable QMulti-counterNote

EX510 Gateway-type Serial Transmission System Plug-in Unit Series SQ1000 [Option] How to Order Manifold SS5Q SB 3 1 08 D CE compliant Manifold series Nil Q CE compliant 1 SQ1000 SI unit output polarity 1(P), 3(R) port size Nil N Positive common Negative common 1(P), 3(R) port, One-touch fittings for 8 Nil 1(P), 3(R) port, One-touch fittings for 5/16" 00T Valve stations Symbol 1 station Note

Assembly example qResidual pressure relief 3 port solenoid valve VP517Y-5DZ1 1 pc. wAir combination AC30C-03DG 1 pc. eSpacer with bracket Y300T-A 1 pc. tPiping adapter *1 *2 rSpacer Y300-A 1 pc. tPiping adapter E300-03-A 1 pc. q Residual pressure relief 3 port solenoid valve Applicable Combinations/Attachment Part Nos. 3 port solenoid valve Applicable air combination Spacer Spacer with bracket