HRX-OM-Z015

setting status signal B EnabledOpen A Output the input signal as it is SW1 Pass through signal of the contact input signal 1 B Reverse output of the input signal A Output the input signal as it is SW2 Pass through signal of the contact input signal 2 B Reverse output of the input signal A Selected alarm occurrence : Close A.SEL Selected alarm status signal B Selected alarm occurrence : Open

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

Stopper Cylinder Adjustable Mounting Height Type Series RSG

U Values inside ( ) are for D-H7LF D-H7C B Approx.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Drain cock Oil bowl B' C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth

Line filter

With drain With drain With drain With drain With drain gauge guide cock guide cock guide B B B B B B B B B AFF20 159. 6 159. 4 146. 1 142. 1 148. 6 AFF30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AFF40 263.3 265.1 265.1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: August 2021 Addition

Micro Mist Separator

With drain With drain With drain With drain With drain gauge guide cock guide cock guide B B B B B B B B B AMD20 159. 6 159. 4 146. 1 142. 1 148. 6 AMD30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AMD40 263. 3 265. 1 265. 1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: August 2021 Addition

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Conduit terminal: VP3145-T A B DIN terminal: VP3145-D A B [105] 76 Light (For TL, TZ) 30 31.3 Max.12 G1/2 Applicable cable 6 to 12 Light position (For DL, DZ) G1/2 [196] NO NO 190.6 194 181.5 166 PE PE 26 26 83 83 32 32 36 36 80 80 [ ]: With indicator light (TL, TZ) 1310 Large Size 3 Port Solenoid Valve VP3165 Series Dimensions: VP3165 Grommet: VP3165-G A B 113 87.4 54 30 71 101 G1/2 1

DOC1003626

Consecutive 8 bits of the message are added, and the result without carry (overflow) is converted to 2's complement.

High Vacuum Slit Valve

How to order B B XGT 3 1 2 50336 1 C Auto switch and connector (See below) Material of O-ring of gate 1 : FKM 2 : Kalrez4079 C Kalrez is a registered trademark of DuPont Performance Elastomers.

Mist Separator

With drain With drain With drain With drain With drain gauge guide cock guide cock guide B B B B B B B B B AM20 159. 6 159. 4 146. 1 142. 1 148. 6 AM30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AM40 263. 3 265. 1 265. 1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: September 2020 Addition

Mist Separator Regulator

B B B B B B AWM20-D 30 34 43.9 5.4 15.4 55 2.3 29.7 28.5 14 6 117.9 104.4 100.4 106.9 AWM30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 157.1 123.9 122.2 117.8 122.3 137.8 142.3 AWM40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 186.9 155.6 153.9 149.6 154.1 169.6 174.1 The dimension C is the length when the filter regulator knob is unlocked. -40- 13-2.

Ｍ icro Mist Separator Regulator

B B B B B B AWD20-D 30 34 43.9 5.4 15.4 55 2.3 29.7 28.5 14 6 117.9 104.4 100.4 106.9 AWD30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 157.1 123.9 122.2 117.8 122.3 137.8 142.3 AWD40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 186.9 155.6 153.9 149.6 154.1 169.6 174.1 The dimension C is the length when the filter regulator knob is unlocked. -40- 13-2.

Digital Flow Switches

Connector pin numbers 2 1 (43.5) 4 3 A B Pin no. 1 2 3 4 Output specification Pin description DC(+) NC/Analog output DC() OUT A Pulse output only 42 62 52 Pulse output + Analog output 72 Flow direction 18 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 80 32 70 58 46 45 2-Port size 2 45 4-5.5 36 (43.5) A A B Output specification 63 Pulse output only 77 73 87 Pulse

IP Address Setting Tool (Interactive Type)

No.EX-OMV1026-B

EXxx-OML0010CN

JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

Process Pump

Diaphragm B moves to the right, and at the same time diaphragm A also moves to the right Air exhaust port (AIR EXH) Switching valve Air supply port (AIR SUP) Pilot valve B Pilot valve A Discharge port (FLUID OUT) Pump chamber A Pump chamber B Check valve Shaft Suction port (FLUID IN) Diaphragm A Diaphragm B Drive chamber A Drive chamber B Control unit pushing pilot valve A. 3.

Clean Regulator

material Grade B Fluororubber Weight 360 g 730 g 360 g 730 g Dimensions Dimensions other than below are the same as the standard type.

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers 2 1 (43.5) 4 3 A B Pin no. 1 2 3 4 Output specification Pin description DC(+) NC/Analog output DC() OUT A Pulse output only 42 62 52 Pulse output + Analog output 72 Flow direction 18 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 80 32 70 58 46 45 2-Port size 2 45 4-5.5 36 (43.5) A A B Output specification 63 Pulse output only 77 73 87 Pulse

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Catch the hook of the DIN rail bracket on the (b) side on the DIN rail. 2. Push side (a) onto the DIN rail and tighten the clamp screw.

EX500-Sx03_eng

Before Use Fieldbus system EX500-S 03 Wiring Product Summary LED Display Select the specified branch cable below.