XM, XY

G A A (mm) Model A 110 120 171 B 38 48 66 C 1 1 2 D 30 40 55 Fn 34 70 Fc 17 26 41 G 40 39 63 H J P.C.D L1 6 x 4.4 6 x 6.6 L2 XMC-16 XMC-25 XMC-40 40 50 65 26 28 36 P.C.D 27 P.C.D 58.7 XMC-50 to 80/Angle type C L2 D Fd Fc L1 (KF flange) Fn C (K flange) (CF flange) H J K B G A A (mm) Model A 183 209 250 B 80 100 117 C 31 39 45.5 D 75 87 114 Fn 95 110 Fd 114 Fc 52 70 83 G 77 76.5 105 H

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

Setting software for e-Actuator (e-Actuator setup tool)

8370: General rules for pneumatic systems JIS B 8361: General rules for hydraulic systems JIS B 9960-1: Safety of machinery Electrical equipment of machines (Part 1: General requirements) JIS B 8433: Industrial manipulating robots Safety, etc. 2) Industrial Safety and Health Law, etc.

VFR5000 Series

B side 3 COM Ground Terminal block Model A(1) B+(3) B(4) marking VFR510 A side COM VFR520 A side COM B side 3 VFR540 5 A side COM B side Terminal block assembly can be used as + and common regardless of markings. Do not remove jumper bar because it is used for common connection.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

"#$ S Q J K E B ! "#$ A !

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5 5.5(3.5) 10.5

MHZ2/MHZJ2

When closed 8.8 When open 22.8 7 Standard Type/Series MHZ2 Finger Position/Options Side Tap Mounting Type [1N1] Through Hole in Opening/Closing Direction [2N2] 4-MM Attachment mounting thread C C B A 4-H Attachment mounting hole S S O O B A Unit: mm Unit: mm Model A 3 4 5 6 Model A 3 4 5 6 B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 B 5.7 7 9 12 H 2.9 3.4 4.5 5.5 1

CYPSeries

x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis Cylinder

CYPSeries

x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis Cylinder

CJ2X/CUX/CQSX/CQ2X/CM2X

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution: Operator error could result in injury or equipment damage.

80

A B C D E F G H J 1.6 M5 2.3 3.2 For other special options, refer to page 462.

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Note 2) Drain guide is NPT1/8 (applicable to the 10-/21-AW20(K)-B) and NPT 1/4 (applicable to the 10-/21-AW30(K)-B to AW60(K)-B). Note 3) Drain guide is G1/8 (applicable to the 10-/21-AW20(K)-B) and G 1/4 (applicable to the 10-/21-AW30(K)-B to AW60(K)-B). Note 4) Option B, G, H are not assembled and supplied loose at the time of shipment.

2/3 Port Valve for Various

Option Symbol and Composition Fluid Name and Option Option symbol Seal material Coil insulation type Body, Shading coil material Fluid (Application) Option symbol and body material Brass or BC6 Stainless steel Applicable valve 10A to 50A 10A to 25A F, B L, J B J Note 1) Standard A B C D E F G H J K L N P Q S T NBR FKM Ethyl alcohol Ethylene glycol Caustic soda (25% ) Gas oil Silicon oil

ZP

D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105 13-11-95 Series ZPT/ZPR Replacement Parts

AC Servo Motor Driver (MECHATROLINK-III type)

Lead Series Lead (Including Pn20E Pn210 symbol pulley ratio) A 12 65536 750 LEY25/LEYG25 B 6 375 LEY25D/LEYG25D C 3 131072 375 A 20 65536 1250 LEY32/LEYG32 B 10 625 LEY63D C 5 131072 625 A 16 1000 LEY B 8 500 LEY32D/LEYG32D C 4 250 65536 A 20 1250 B 10 625 C 5 131072 625 LEY63 5(2.86) L 229376 625 (Pulley ratio 4/7) H 20 1250 LEFS25 A 12 750 B 6 375 H 24 1500 LEFS32 A 16 1000 B 8 500 LEF

OMU0023

AREA A position 2 The AREA signal is output commonly for the ranges set for both the AREA A and AREA B. AREA B Set as AREA 1 AREA 2. position 1 AREA B position 2 48 - Data (Saved data) Data is sent as hexadecimal numbers.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Hs Auto switch 24.5 A B 49.5 A 33 B Proper auto switch mounting positions (mm) D-G39 D-K39 D-A3 D-A44 D-H7 D-H7C D-H7W D-H7BAL D-C7 D-C80 D-C73C D-C80C D-B5 D-B64 D-G5NTL D-H7F D-B59W Bore size (mm) A B A A A A A A B B B B B B 16 15.5 7.5 12 14 17.5 12.5 11 19 20 8 4 6 9.5 4.5 25 17.5 13.5 17 7 15.5 19 10.5 14 20.5 7.5 3.5 5.5 9 4 32 20.5 16.5 9 20 18.5 22 23.5 12.5 17 9.5 5.5 7.5 11 6 40

Bag Filter

B to Nominal filtration accuracy of 5, 10, 25, 50, 100 m can be selected.

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

Pin Clamp Cylinders

A: Lock unit holding bolt R 075 CKQG32X B 08 CKQG32X CK1 B: Cylinder holding bolt Guide pin diameter * Refer to Table 1 (Symbol 2) below. Applicable hole diameter of workpiece * Refer to Table 1 (Symbol 1) below.