Flow ranges (lpm): 0.5-4, 2-16, 5-40; Port sizes (Rc, NPT, G): 3/8, 1/2, 3/4 (flow range dependent); Temperature rating: 0-90°C; Output options: PNP/NPN, 1-5V, 4-20mA; Accuracy: ±3% F.S. (display, analog out); ±5% F.S. (temperature sensor); Repeatability: ±2% F.S.

Flow ranges (lpm): 0.5-4, 2-16, 5-40; Port sizes (Rc, NPT, G): 3/8, 1/2, 3/4 (flow range dependent); Temperature rating: 0-90°C; Output options: PNP/NPN, 1-5V, 4-20mA; Accuracy: ±3% F.S. (display, analog out); ±5% F.S. (temperature sensor); Repeatability: ±2% F.S.

Flow ranges (lpm): 0.5-4, 2-16, 5-40; Port sizes (Rc, NPT, G): 3/8, 1/2, 3/4 (flow range dependent); Temperature rating: 0-90°C

Flow ranges (lpm): 0.5-4, 2-16, 5-40; Port sizes (Rc, NPT, G): 3/8, 1/2, 3/4 (flow range dependent); Temperature rating: 0-90°C; Output options: PNP/NPN, 1-5V, 4-20mA; Accuracy: ±3% F.S. (display, analog out); ±5% F.S. (temperature sensor); Repeatability: ±2% F.S.

The 3 port SX090 can provide large flow rate of 90 L/min from its compact body. 

Body size: 50; Rotation angles: 320°, 90° or 180° (external stopper); Maximum torque: 6.6 N?m (basic), 10 N?m (high); Positioning repeatability: ±0.05°  (±0.01° at end with external stopper); Backlash: ±0.5°

Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility); Temperature range setting: -10 to 90°C (2kW), -20 to 90°C (4, 8, 10kW); Note: Temperature range depends on fluorinated fluid choice; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8

Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: 60% ethylene glycol aqueous solution; Temperature range setting: -10 to 90°C (2kW), -20 to 90°C (4, 8, 10kW); Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Rotary table/vane style; Sizes: 1, 3, 7, 20; Single vane & double vane; 90° & 180° available; Auto Switch capable; Series 25A-MSUB is compatible with secondary battery applications

Body size: 50; Rotation angles: 320°, 90° or 180° (external stopper); Maximum torque: 6.6 N?m (basic), 10 N?m (high); Positioning repeatability: ±0.05°  (±0.01° at end with external stopper); Backlash: ±0.5°

The RMHF2 series offers 64 mm long stroke, which is ideal for a variety of workpieces. 2-Finger, Standard Type; Opening/Closing stroke: 64 mm; External Gripper Force(N): 90; Internal Gripping Force (N): 90; Manual changer built-in; Actuator position sensor mountable

The operating time for arm opening angles of 15° to 90° can be set to 0.6 s. Compiles with NAAMS standard (CKZ5N); 9 opening angles: 15, 30, 45, 60, 75, 90, 105, 120, 135; Easier mechanism unlocking; Space-saving and lightwieght; High clamping force

The RMHF2 series offers 64 mm long stroke, which is ideal for a variety of workpieces. 2-Finger, Standard Type; Opening/Closing stroke: 64 mm; External Gripper Force(N): 90; Internal Gripping Force (N): 90; Manual changer built-in; Actuator position sensor mountable

Foot type mounting ; Applicable to 50, 63, 80, and 100mm bore sizes; Foot bracket can be mounted on the rotary actuator bracket 90° intervals

Magnet: Switch Unit, Angle Adjusting Unit: Angle Adjusting Unit, Body Size: 15mm, Rotation Angle,Vane: Rotation Angle: 90; Vane Style: Single, Port: Body Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Switch Unit, Angle Adjusting Unit: None, Body Size: 10mm, Rotation Angle,Vane: Rotation Angle: 90; Vane Style: Single, Port: Body Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M, Lead Wire or Prewired Connector: 3m, Number: 1 pc

Magnet: Switch Unit, Angle Adjusting Unit: None, Body Size: 15mm, Rotation Angle,Vane: Rotation Angle: 90; Vane Style: Single, Port: Body Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Switch Unit, RBU2W: RBU2W, Angle Adjusting Unit: None, Size: 15, Rotation Angle,Vane: 90° Single Vane, Port Location: Side Ports, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M, Lead Wire or Prewired Connector: -, Number: -

Magnet: Switch Unit, RBU2W: RBU2W, Angle Adjusting Unit: None, Size: 10, Rotation Angle,Vane: 90° Double Vane, Port Location: Side Ports, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Switch Unit, Mounting: Basic, W: W, Angle Adjusting Unit: Angle Adjuster, Size: 15, Rotation Angle - Vane: Angle: 90 Single Vane, Port: Side, Auto Switch: 90--Reed, DC Volt, AC Volt, 2 Wire, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -