P

X2709 2 B 02 30 R B AW Body size Flow direction Nil Flow direction: Left to right R Flow direction: Right to left 30 Body size 30 40 Body size 40 60 Body size 60 Bowl Port size 2 Metal bowl Symbol Port size Body size 30 40 60 02 Rc1/4 V V 03 Rc3/8 V V 04 Rc1/2 V 06 Rc3/4 V V 10 Rc1 V Mounting option1 Nil Without mounting option B2 With bracket H3 With set nut (for panel mount) Waterproof

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

Standard Stroke Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 80, 100, 125, 150 20 to 63 Theoretical Output OUT IN 10, 15, 20, 25, 30, 35, 40, 45, 50, 60, 80, 100, 125 80, 100 Unit: N Manufacture of Intermediate Stroke Bore size (mm) Operating direction Operating pressure (MPa) 0.3 0.5 0.7 Dealing with the stroke by the 1 mm interval by using an exclusive

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

Smooth Cylinder Series CQSY 12, 16, 20, 25 How to Order B 20 D 30 C CQSY M9BW B D 20 30 C CDQSY With auto switch Number of auto switches Nil S n With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

288 406 486 5620 7180 8255 100 160 200 30 40 20 Note) The width at closing/opening represent the valve when the exterior of the workpiece is being held. 927

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ 20, 25, 32, 40, 50, 63, 80, 100 How to Order CLQ B F D 30 40 M9BW 30 40 B CDLQ F D With auto switch With auto switch (Built-in magnet) Made to Order Refer to page 817 for details.

CRA1

2 Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 How to Order Mounting style Basic style Foot style B L Rotating angle 90 180 Rod end shape 90 180 Double shaft CRA1 B W 30 90 Size 30 CRA1 B S 50 90 Size 50 to 100 Mounting style Air cushion None With air cushion Nil C B L Basic style Foot style Flange style F For part numbers, refer to the tables below.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Membrane Air Dryer/Single Unit Type Series IDG < A IDG < A Series Reduced purge

RoHS Membrane Air Dryer/Single Unit Type Series IDG30 IDG30 50 60 75 100 Option Standard dew point temperature and air flow rate Contents Symbol Symbol Flow rate by size Outlet air flow rate (L/min [ANR]) Standard dew point (oC) 30 20 None (Standard) Nil P R 50 500 60

Centering Unit MACM Series

30 mm (MACM6) 50 50 mm (MACM10) Nil Unsupported P Port side photo sensor mounted type B Port back side photo sensor mounted type Specications Precautions Model MACM2-12 MACM4-20 MACM6-30 MACM10-50 Max. allowable load weight lbf [KN] 450 [2] 900 [4] 1350 [6] 2250 [10] Be sure to read this before handling the products.

Guide Table Series MGF ø 40, ø 63, ø 100

Guide Table Series MGF 40, 63, 100 How to Order Port thread type Rc NPT G Nil TN TF MGF 63 30 M9BW Made to Order Refer to page 413 for details. Guide Table Bore size/ Standard stroke (mm) Number of auto switches 40 63 100 30, 50, 75, 100 30, 50, 75, 100 30, 50, 75, 100 2 pcs. 1 pc. "n" pcs.

MHL2

68 98 585 60 60 110 170 795 16 40 80 130 210 935 40 82 122 1025 60 80 142 222 1495 20 40 100 162 262 1690 50 100 150 1690 60 100 182 282 2560 25 MHZ 40 120 200 320 2775 70 150 220 2905 30 MHF 120 198 318 3820 32 20 MHL 160 242 402 4655 100 188 288 5270 30 JIS Symbol MHR 160 246 406 6830 40 20 200 286 486 7905 MHK Note) The open and close time spans represent the value when the exterior of

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107 241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628

MVGQ

Cylinder M 12 30 M9BW MVGQ 1 0 5 L Z MA SYJ3 3 Valve Made to Order 9 ! " Type of actuation Speed controller specifications 1 2 ! > .& , MA MB &3 &3 F Coil specification Manual override Nil+ =3:! , Nil . AC specifications (50@60 Hz) DC specifications 5 6 V S R * !, -! ;@ ,2 # # 1 2 3 4 T ? !, -!

CJ2X

Low Speed Cylinder Double Acting, Single Rod Series CJ2X 10, 16 How to Order Bore size 10 16 10 mm 16 mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate stroke other than above is manufactured upon receipt of order.

Compact Cylinder with Air Cushion Series RQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order RQ B 32 50 50 32 RDQ B M9BW With auto switch With auto switch Made to Order (Built-in magnet) For details, refer to page 775. Mounting bracket Number of auto

, 40, 50 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 40, 50, 75, 100 Made to Order (For details, refer to pages 1420 and 1470.)

Clean Exhaust Filter SFE Series

Max. ow capacity L/min (ANR) 3F 4 30 4G 6 65 5H 8 130 7J 10 200 Plug-in type Bracket SFE-BR 3 Symbol Applicable model 3 SFE3l 4 SFE4l 5 SFE5l 7 SFE7l One-touch tting type Specications Model SFE11 SFE3 SFE4 SFE5 SFE7 Fluid Note 1) Air Maximum ow capacity Note 2) Up to 3 L/min (ANR) Up to 30 L/min (ANR) Up to 65 L/min (ANR) Up to 130 L/min (ANR) Up to 200 L/min (ANR) Filtration rating Note

Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet, OVAL CUP WITH BUFFER, VACUUM PAD, ZP, ZP2, ZP3, M30, 48.9 lb

Oval pad with adapter, Vertical vacuum inlet direction, Pad size: 3.5 x 7, 4 x 10, 5 x 10, 6 x 10, 4 x 20, 5 x 20, 6 x 20, 8 x 20, 4 x 30, 5 x 30, 6 x 30, 8 x 30, Pad material: NBR, silicone rubber, urethane rubber, FKM, conductive NBR, conductive silicone rubber, M5 x 0.8 vacuum inlet, OVAL CUP WITH ADAPTER, VACUUM PAD, ZP, ZP2, ZP3, M30, 9.9 lb