IDX-OM-P023E

The instructions described in this manual must be followed in addition to ISO 4414*1) and JIS B 8370*2) and other safety regulations. *1) ISO4414: Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems. *2) JIS B 8370: General rules for pneumatic equipment.

IDX-OM-P026E

The instructions described in this manual must be followed in addition to ISO 4414*1) and JIS B 8370*2) and other safety regulations. *1) ISO4414: Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems. *2) JIS B 8370: General rules for pneumatic equipment.

IDX-OM-W095

A IDFC60-23-TIDFC70-23-T IDFC80-23-TIDFC90-23-T M3.5 8.5mm M4.0 9.5mm [3.2.5 ] IDFC60/70/80/90 Series 11-3 IDX-OM-W095 T 11.5 IDFC60/70-23-T A B AC 230V50Hz CM OLR FM MC MC2 PRS ILS THR C01 C11 TB CN TDR GFCI EDV PE BK WH IDFC80/90-20-T GR SY A B AC 230V50Hz BU BR YE OR G/Y / IDFC60/70/80/90 Series 11-4 IDX-OM-W095 V 12 V V 12.1 0 () 12.2 ( 10m) (12mm)

IDX-OM-N030

Replacement method Standard replacement period Refrigerating compressor 1 B 20,000 hours (6 years) High pressure switch 1 B 20,000 hours (6 years) Low pressure switch 1 A 20,000 hours (6 years) Pressure switch 1 A 20,000 hours (6 years) Magnetic contactor 1 A 20,000 hours (6 years) 2 Fan motor A 20,000 hours (6 years) (Only IDF150F: 3) Programmable controllers 1 A 20,000 hours (6 years) Switch

IDX-OM-W034

SIZE PORT SIZE B G H D E WITH LAMP SWITCH DRAFT AIR OUTLET THERMOMETER EVAPORATION BALL VALVE BLOCK TERMINAL AUTO DRAIN F C VENTILATION VENTILATION [DIA.911]) (WIRE DIA.0.4 ENTRY HOLE POWER CORD DRAIN TUBE LENGTH39.4[1000] J N M K L P [4XDIA.13] 4XDIA.0.5 (SIZE OF RECOMMENDED BOLTM10) A B C D E F G H J K L M N P Q R Model Port Size Dimensions (inch [mm] ) 31.5 [800] 34.2 [868] IDFB55E 2 1.4

IDX-OM-W035

G D E F C (35.4[900]) J M N P L K H 4x0..5 (0.4[9~11mm] [4x13] [IDFB22E-11*(L=2800)] Unitinch [mm] A B C D E F G H J K L M N P 30.5 23.6 IDFB22E 1 [775] [600] 3.3 11.4 24.5 5.3 15.9 27.5 3.7 1.8 1 0.5 12.4 13.4 [290] [623] [134] [405] [698] [93] [46] [25] [13] [314] [85] [340] 26.8 33.7 IDFB37E 1/2 [855] [680] R IDFB55E/75E Q A B H G E D F C (0.4 (39.4[1000]) J L K M N P 4x0..5 [4x13

Pressure Relief 3 Port Valve with Locking Holes

How to Order VHS 30 03 D Semi-standard: Select one each for a to b. Semi-standard symbol: When more than one specifications is required, indicate in alphanumeric order.

VP3145-OMM0003

8370: JIS B 8361: JIS B 9960-1: 1 : JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VP3145-OMM0003 VP31*5 / 1 1.5 *3) *3) 1 1 3 VP3145-OMM0003 VP31 5 3 / / () C-R C-R ( ) DC 5% AC 15% (ON)(OFF) 0.1 0oC 0.2Mpa (INOUT ) 4 VP3145-OMM0003 VP31 5 3 / ( ) 9 ) 1 ()ISO VG32 2 ()ISO VG32 5m Nm Rc 3/8 2224 Rc 1/2 2830 Rc 3/4 2830 Rc 1 3638 Rc 11/4 4042 Rc 11/2 4850 Rc 2 4850 +/5 VP3145

3/5 Port Solenoid Valve

Common SUP/Common EXH Common SUP/ Individual EXH Type 40 (VV5K3-40): Base mounted (A, B port bottom ported) Type 20 (VV5K3-20): Body ported (A, B port top ported) Type 42 (VV5K3-42): Base mounted (A, B port side ported) Type 41 (VV5K3-41): Base mounted (A, B port side ported) Type S41 Type S42 (VV5K3-S41) (VV5K3-S42) Type 21 (VV5K3-21): Body ported (A, B port top ported) 12 VK300-OMH0002-

VT317-OMH0003

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

VT325-OMT0001

8370: JIS B 8361: JIS B 9960-1: -(1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VT325-OMT0001 / / / / 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 3 VT325-OMT0001 VT325 Series VT325 Series VT325 Series VT325 Series 3 3 3 3 / / / / / / / / C-R ( ) C-R DC 2% AC 15% (SSR (SSR (SSR (SSR ) ) ) ) AC AC AC AC 1 (C-R ) OFF 2)() 1V -10 () () ( ( ( ( ) ) ) ) () 1 DC

VT315-OMH0005

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VT315**-OMH0005-A / / / / 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) * * * *3) 3) 3) 3) 1 1 1 1 1 1 1 1 () 3 VT315**-OMH0005-A VT315 Series VT315 Series VT315 Series VT315 Series 3 3 3 3 / / / / / / / / 3 () C-R ( )C-R DC 5% () () () ( ( ( ( ) ) ) ) () AC 15% (SSR (SSR (SSR (SSR ) ) ) ) AC AC AC

EX260-SPR-A_eng

Element Description RXD/TXD-N Receive/transmit data, negative 8 Fieldbus interface connector (BUS OUT) PROFIBUS DP connection (M12 5-pole socket, B-coded) 1 9 Unused DANGER indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. 2 Fieldbus interface connector (BUS IN) PROFIBUS DP connection (M12 5-pole plug, B-coded) Power supply connector

SI unit for CC-Link

If a single-solenoid valve is mounted on the standard wiring manifold, the output number for the B side valve is skipped. : Custom wiring for mixed mounting single-solenoid valves and double-solenoid valves can be specified with a Wiring Specification Sheet.

id_idw_and_ida_series_air_dyers

ID-200Z ID-300Z ID-400Z ID-600Z 15.4 18.7 40.8 55.1 A B C inch mm inch mm inch mm 120 120 170 170 Operation Principles Provides dry air at dew point as low as 58F (50C).

AKH/AKB Series Check Valve with One-touch Fitting

Inch Size A L Connection thread size NPT (a) Weight g Effective area (mm) A H L Model (b) 1/8 1/4 3/8 1/2 AKB01-N01S AKB02-N02S AKB03-N03S AKB04-N04S 14.29 17.46 22.23 23.81 24.2 40 44.9 55.5 20.2 34 38.4 47.5 18 44 86 113 6.5 14 24 34 1/8 1/4 3/8 1/2 Connection thread size (b) Reference dimension after screwing into NPT threads.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Description Panel mounting adapter A, B ZS-22-E Front protective cover + Panel mounting adapter ZS-26-B ZS-26-C With mounting bracket Panel mounting adapter With waterproof seal, mounting screw With waterproof seal, mounting screw Panel Front protective cover PF2D30 Mounting screw (M3 x 8 L) (accessory) Panel mounting adapter A Panel mounting adapter Panel mounting adapter B Mounting bracket

Clean Rodless Cylinder Series CYP

c d e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

Regulator for 2 MPa ARX 20

Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.