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() (H_1) () (H1) (H1) (H_1) (H1) (H1) OUT1 OUT2"1""2"() P_1 P_2 -29No.PS-OML0002CN-G [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1] OUT1(2729) 1[-], [F 3] <> [F 3] [F 3] -30No.PS-OML0002CN-G [F 4] <> [F 4] 1000 100 [F 4] [MPa]/[kPa(ZSE)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg] 26[F 0] -31No.PS-OML0002CN-G [F 5] <> [F 5] [F 5] -32No.PS-OML0002CN-G OUT1 AP1 (OUT1AP1

Common wire Double (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB) 413 5 Port Solenoid Valve 10-SZ3000 Specific Product Precautions 3 Be sure to read this before handling. Directional Control Valves Air Grippers Modular F. R.

3/8 Supply from both sides when there are 4 or more stations 88 (M) 96 (L) n x port 2 (A): 1/4, 3/8 L Dimension n L1 = 46n + 31, L2 = 46n + 15 n: Station 2 123 107 3 169 153 4 215 199 5 261 245 6 307 291 VEX L L1 L2 1971 Series VEX3 Construction/Working Principle/Component Parts (3) 2(A) R 3(R) (1) 2(A) R 3(R) (2) Closed center 7 3 VEX3120 (Air operated) This is a 3 port switch valve in

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

AL30/AL40 w Semi-standard/Bowl Assembly Part No. t e Model Semi-standard specifications With switch Bowl material With drain guide With barb fitting With bowl guard IN OUT AL20 AL10 AL60 AL50 AL40-06 AL40 AL30 Lowest limit ON Lowest limit OFF y r u C3SL-3 C4SL-3 C4SL-3 C1SL-3 C2SL-3 C3SL-3 C1SL-3 C2SL-3 C2SL-C C2SL-C Polycarbonate C2SL-3C C2SL-3C C3SL-3W C4SL-3W C4SL-3W C4SL-6 C4SL-36

AL30/AL40 w Semi-standard/Bowl Assembly Part No. t e Model Semi-standard specifications With switch Bowl material With drain guide With barb fitting With bowl guard IN OUT AL20 AL10 AL60 AL50 AL40-06 AL40 AL30 Lowest limit ON Lowest limit OFF y r u C3SL-3 C4SL-3 C4SL-3 C1SL-3 C2SL-3 C3SL-3 C1SL-3 C2SL-3 C2SL-C C2SL-C Polycarbonate C2SL-3C C2SL-3C C3SL-3W C4SL-3W C4SL-3W C4SL-6 C4SL-36

0.01 psi 0.02 0.01 0.1 InHg 0.1 0.1 mmHg 1 1 -28No.PS-OMS0006CN-G [F 1] OUT1 OUT1 ONON ONOFF 31 <> [F 1] OFF [OFF]OFF 22 [Err] [P_1] [P1L][P1H] [P_1][n_1] Pn (50 ) -29No.PS-OMS0006CN-G 22 [H_1] [WH1] (50 ) 24 ON ON OFF OFF [F 1] OUT1 1 2 2 -30No.PS-OMS0006CN-G H_1 WH1 WH1 H_1 WH1 WH1 OFF OFF 1Er689 -31No.PS-OMS0006CN-G [F 3] <> [F 3] [F 3] 190% 2(2430) -32No.PS-OMS0006CN-G

The product i s adj ust ed t o each speci f i cat i on at t he t i m e of shi pm ent f rom t he f act ory. Avoi d unnecessary di sassem bl y or rem oval of part s, as t hi s m ay cause f ai l ure. 3 CAU TI O N Take t he f ol l ow i ng m easures agai nst m al f unct i on due t o noi se. I nst al l a l i ne f i l t er i n t he AC pow er suppl y l i ne t o rem ove noi se.

F: Contents revised in several places. [July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009-2018 SMC Corporation All Rights Reserved No.PS-OMH0006-F

Circulating FluidTypical Physical PropertyValues Fluorinated Fluids Density [kg/m 3] Physical property value Temperature 10C 20C 50C 80C Specific heat C [J/(kg K)] 1.87 x 10 3 0.87 x 10 3 1.80 x 10 3 0.96 x 10 3 1.74 x 10 3 1.05 x 10 3 1.67 x 10 3 1.14 x 10 3 Water Density : 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 133 Peltier-Type Chiller Thermo-con (Air-cooled) Series HEC-A

( ref er t o P11) Press t he and keys si m ul t aneousl y f or 3 seconds or m ore

Plug-in F Note) A Single/ Double A side 5 24 VDC 2 2 position double 6 12 VDC G Grommet Grommet, With surge voltage suppressor 3 3 position closed center B Double B side 9 Other Option 4 3 position exhaust center GS 3A 3 position A side Option Electrical entry, Light/Surge voltage suppressor 5 3 position pressure center L L plug connector 6 3 position double check 3B 3 position B side

( ref er t o P11) Press t he and keys si m ul t aneousl y f or 3 seconds or m ore

( ref er t o P11) Press t he and keys si m ul t aneousl y f or 3 seconds or m ore

Contact SMC regarding the PSI and F unit specifications. Note 3) Separate spacers are required for modular unit.

24 3-M3 x 0.5 28 3-M3 x 0.5 G Width across flats 24 10 E 10 ZX F F E ZR Y Y 6 3 ZM 18 18 C C ZH A A B D B D ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions Dimensions A (mm) ZL (mm) Model Model A B C D E F G Y B C D E F G Y ZY ZPT40HB-B8 ZPT40HB-A14

phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) Set temp. range 5 to 35C Set temp. range 5 to 35C Set temp. range 5 to 35C Temp. stability 0.1C Temp. stability

8 inch) (C) (D) 59 (59) IN OUT 11 (F) 170 7 Purge air for dehumidification Purge air for dehumidification (Maintenance space 100 mm or more) Port size : Rc 1/4, 3/8 (NPT, G threads are not available.)

i s di spl ayed ( press Skey t o ) "Zero cl ear" i s execut ed, af t er 3 seconds. Rel ease keys t i l l l ess t han 3 seconds t o i s di spl ayed f or approx. 1 second. Ret urns t o t he st at e i m m edi at el y af t er t urni ng on of t he pow er suppl y. ( keys are l ocked) ( not e) The adj ust abl e range i s w i t hi n 5% F. S f rom t he st at e of t he f act ory shi pm ent .