1

Example: The figure below is based on the condition of set values as P1 = 40 [kPa] and P2 = 20 [kPa].

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

20 25 12 16 20 25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5 MPa

Clean Regulator/Fluororesin Type

Description Material Note 12 Fluorine coated Valve spring 1 14 15 16 Insert bushing Nut Collar New PFA New PFA New PFA 13 Fluorine coated Valve spring 2 883 SRF Series Dimensions/SRF10 Integrated fittings 23 Pilot port Rc, NPT 1/8 12 R 54 32 48 40 1 2 SMC 4 x 3.5 (Mounting hole) 23 IN OUT 26 32 5.5 (81) HEX.18 With nut 23 Pilot port Rc, NPT 1/8 12 R 48 32 40 1 2 SMC 4 x 3.5 (Mounting hole

Air Combination

Body size 20 30 40 40-06 50 60 Max. moment (M) [N m] 14.5 16 19.5 35 45 45 Max. moment (M) = Length (L) x Load (F) Length (L) Air filter, filter regulator and mist separator Load (F) (1) Drain guide is not equipped with valve function. Be sure to connect piping for drain. No piping for drain allows the drain and compressed air to exhaust freely.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Standard port Relief port Eh8 D FY B MM AL K NA FT 4 x 7 A FX Mounting hole N Z N F FZ S + Stroke H ZZ + Stroke 40 Standard port Relief port (mm) H G FZ FT E 2 x 7 Mounting hole F FX FY AL A Bore size B2 24 22 22 18 D B B1 Stroke range 0 40 32 25 20 20-0.033 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 50 45 45 41 75 19.5 19.5 15.5 . 40 40 34

Modular Type Regulator Series AR

50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10 1/8 3/8 1/4 1/2 3/8 3/4 1/2 1 3/4 Option Note 1) 1 Symbol Nil B G Note 2) Applicable model AR25 to 60

Low Friction Cylinders Metal Seal Type

Low Friction Cylinders Metal Seal Type 30, 40 newly added Compact Low Friction Cylinder Series MQQ Bore size (mm) 10 16 20 25 30 40 Operating pressure range (MPa) Actuation speed (mm/s) Series MQQT Standard type 0.005 to 0.5 0.3 to 300 0.5 to 500 MQQL Lateral load resisting type (Built-in ball bushing) 0.005 to 0.7 Lateral Load Resisting Low Friction Cylinder Series MQM Series Bore size

5 Port Solenoid Valve Series SV

Tie-rod base A 34 pin connector allows up to 16 stations with double solenoids.

Large Size Vacuum Module: Series ZR

Pressure Switch for Vacuum: ZSE2-0RIndicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer ZSE2-0RZSE2-0R-L ZSE2-0R-C ZSE2-0R-CL ZSE2-0R-CN L SET H L SET H 15 15 9 9 2 x M2.5 x 41L Mounting thread 2 x M2.5 x 41L Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port

Cylinder with lock

Operation 32 C96N32-PS 17 Rod seal 1 pc 40 Rod seal 1 pc 41 Piston seal 1 pc 42 Large cushion seal 2 pcs 43 Small cushion seal 1 pcs 45 Cylinder tube gasket 2 pcs 40 C96N40-PS 50 C96N50-PS 63 C96N63-PS 80 C96N80-PS 100 C96N100-PS Lock part is replaced as an entire unit. The seal kit for replacement contains the rod seal for the cylinder and lock.

KP/KPQ/KPG

18.5 M L 8 12 KPQL12-00 KPGL12-00 31.4 7.5 25 50 40 20 20.9 Note 1) D indicates the maximum diameter.

212

MPa) Fluid: Water LVR20 LVR40 LVR50 12 [45] 26 [100] 1.1 [4] 24 [90] 11 [40] 0.9 [3.5] Flow rate gal/min [L/min] Flow rate gal/min [L/min] Flow rate gal/min [L/min] 21 [80] 9.2 [35] 0.8 [3] 18 [70] 7.9 [30] 0.7 [2.5] 16 [60] 6.6 [25] 13 [50] 0.5 [2] 5.3 [20] 11 [40] 0.4 [1.5] 4.0 [15] 8 [30] 0.3 [1] 2.6 [10] 5 [20] 0.1 [0.5] 1.3 [5] 2.6 [10] 0 0 0 0 0 0 15 [0.1] 29 [0.2] 44 [0.3] 58 [0.4

IP8101 Series

Mode button 1s Set button 1s or Mode button 1s Set button 1s B D C Fig. 40 No.DIG-31900-OM002 49 B Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-1 C Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-2 D Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

Regulator

P22 Note) Fluorine grease is recommended when applying additional grease. -16- 10. How to Replace the Components Warning Before replacement, make sure that no pressure remains in the epuipment. Also, make sure to loosen the knob of the regulator so that the set pressure is zero.

DOC1023126

CDQ2 series) side by side, maintain 40 mm minimum around the motor. 40 40 40 40 40 40 40 40 Air cylinder installation with an auto switch is forbidden in the shaded area. Example 2 When installing electric actuator LEY(G) or LEFEQFEQY series with an auto switch by side, leave a gap of 40 mm or more with respect to the position where the magnet passes.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

" One-touch fitting for VR F2 With side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 SYA5000 VH 3 SYA3000 5 SYA5000 SYA7000 VHS 7 SYA7000 SYA 5 1 C6 Body ported 20 40 SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Nil Rc G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation

Air cylinder (Series compatible with secondary batteries)

trunnion (Different surfaces and same surfaces) 15 80 85 90 75 1 D-A9-900 75 40 (n 4 85 40 (n 4 80 40 (n 4 90 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) (Different surfaces and same surfaces) 15 80 85 90 95 D-M9-900 1 D-M9W-900 80 40 (n 4 90 40 (n 4 85 40 (n 4 95 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8

HRX-OM-R039

Fig. 8.4-3 Cooling capacity(HRSE012-A-20/23) HRSE Series Product Warranty 8-7 HRX-OM-R039 Chapter 8 Documents 8.4.4 HRSE018-A-20/23-(T) Ambient Ambient 2000 2000 Temperature Temperature 25 35 40 25 35 40 1500 1500 Cooling capacity[W] Cooling capacity[W] 1000 1000 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circurating fluid temperature[] Circurating fluid temperature[]] 50Hz 60Hz The cooling

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

16 Series MIW/MIS Specific Product Precautions 1 Be sure to read before handling.