Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

11 20 12 11 21 15 23 30 40 40 65 D 11 4 18 4 4 10.4 10.4 14 13 M 6 19.5 10 10 12.8 12.8 14 8 A L 4.2 8 17 15.2 21.5 26 18 15.2 (R) 10 19 18.5 24 41 29 18.5 Connection threads H 12 22 20.9 25 58 46 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

Ejector Valve Unit, Series ZYY/ZYX

40 -80 -80 -80 -80 Vacuum pressure Vacuum pressure kPa Vacuum pressure kPa Vacuum pressure kPa Vacuum pressure kPa Air consumption Air consumption 30 30 -60 -60 -60 -60 20 20 -40 -40 -40 -40 Suction flow rate Suction flow rate 10 10 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure MPa Suction flow rate l/min (ANR) Supply

Air Slide Table Series MXS

Bore size (Stroke (mm)) 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 6 8 12 16 20 25 Functional option Standard With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) FP Adjuster option Note

LG1H

4-M8 x 1.25 thread depth 10 20 8H10 depth 10 Encoder signal line Bending radius 80 Motor power line Bending radius 80 8H10 depth 8 35 85 210 78.5 78.5 Stroke + 229 (table movement range) 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 386 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 The body mounting reference plane and work piece

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

20 2110 20 21Direct Operated Precision Regulator (For Special Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

F

15 40.2 AS221F-U01-10 20.9 17 8.9 23.3 14.5 1/4 4 18.5 17.2 32.5 AS221F-U02-04 31.1 32 26.6 39.4 34.4 11 23.9 15.5 6 33.1 AS221F-U02-06 31.3 15.2 27.2 18.5 8 36.4 AS221F-U02-08 33.6 18.5 33.9 21 10 19 43.2 AS221F-U02-10 35.5 19 11 26.4 15.5 3/8 6 23 19.4 37.9 AS321F-U03-06 52.5 37.6 32.6 45 40 15.2 29.5 18.5 8 41 AS321F-U03-08 54.9 18.5 31.8 21 10 43.3 AS321F-U03-10 56.8 20.9 32.8 22 12

Ejector Valve Unit Series ZYY/ZYX 1

) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure 30 30 60 60 60 60 Air consumption Air consumption 20 20 40 40 40 40 Suction flow rate Suction flow rate 10 10 20 20 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 0.1 0.2

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

gasket DXT200-9-8 Applicable base Sub-plate SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Manifold base + Manifold gasket SYJ500-5-5 + Manifold gasket SYJ500-5-4 Model no.: SYJ500-10-1A Round head combination screw M2.5 x 7, Matt nickel plated Applicable base Sub-plate SS3YJ5-40 SS3YJ5-41 SS3YJ5-40R SS3YJ5-41R Applicable base SS3YJ5-21R SS3YJ5-20 Manifold base Blanking plate SYJ500-10-3 Manifold

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Ui = 28 V li = 225 mA (resistively limited) Pi = 1 W Ci = 0 nF Li = 0 mH 52-SY5000 52-SY7000 52-SY9000 Series 10 to 45C (No freezing) Temperature class T6 Ambient and fluid temperature 10 to 50C (No freezing) Temperature class T4, T5 40C less (at rated) Coil temperature rise 24 VDC (system rated voltage) at 1.1 W Barrier input voltage (non hazardous area) 12 VDC at 0.52 W Coil rated voltage

XL-OMY0002

XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63,XLD-80,XLD-100 S 1 SUS304+ 4 1) S S O 2) S O FKM 5 O 6 S O 2 FKM 9 S SUS304 10 11 XL-OMY0002 6. 6-1.

High Vacuum L Type Valve

Specifications Model XLD-25 XLD-40 XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 Flange (valve) size 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Main pumping 14 45 80 160 200 300 800 Note 1) Initial pumping 0.5 to 3 2

30

(mm) a b Note 2) Effective area (mm2) W Note 1) D W Weight (g) L1 L2 P M1 M2 N O Model P 3.2 4 6 8 10 12 4 6 8 10 12 16 KQB2U23-04 KQB2U04-06 KQB2U06-08 KQB2U08-10 KQB2U10-12 KQB2U12-16 3.2 3.2 4.2 4.2 4.2 4.2 5.6 5.6 8 8 8 8 3.2 4.2 13.4 25.6 40 57.4 8.5 11.9 19.3 32 47.6 67.6 9.1 11.4 13.7 16.6 18.7 24.6 27 29.3 33.7 38.3 43 47.4 10.8 11.2 12.2 13.8 14 15.6 8.1 9.1 11.5 14.6 17.6 19.8 16.4

LEYx-OMZ0015

5 16 8 4 20 10 5 2.86 Impact resistance/vibration Resistance [m/s2] Note5) 50 / 20 50 / 20 50 / 20 Ball screw Drive method Ball screw and Belt [1:1] / Ball screw Ball screw and Belt [1.25:1] Ball screw Ball screw and Belt [4:7] Guide type Sliding bush (Piston rod part) Sliding bush (Piston rod part) Sliding bush (Piston rod part) Operating temperature range [] 5 to 40 5 to 40 5 to 40 Operating

Step Motor Controller (Servo / 24 VDC)

Setting Data Entry . 35 7.1 Step data . 35 7.2 Basic parameter . 38 7.3 Return to origin parameter . 40 8.

T

Polyurethane Coil Tubing: Series 10-TCU For details, refer to Pneumatic Clean Series catalog. Specifications 10-TCU 10-TCU 10-TCU 10-TCU 0425B-1 0425B-2 0425B-3 0604B-1 0604B-2 0604B-3 0805B-1 10-TCU 10-TCU 10-TCU Model Tubing O.D. (mm) No. of cores 2 cores 3 cores 1 core 2 cores 3 cores 1 core 1 core 4 6 4 8 5 Tubing I.D.

LG1H

Not required. m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 58 for deflection data. 48 Standard Motor/Horizontal Mount Specification Series LG1H21 With Coupling Dimensions/LG1H21PA 110 4 x M6 x 1 thread depth 10 67 20 0.02 4 x M8 x 1.25 thread depth 10 8H10 depth 10 8H10 depth 8 160 (123.5) Stroke + 180 (table movement range) 82.5 10 107 95 Work piece mounting reference plane 55 Body

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS32l1FG-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS32l1FG-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 29 (30) AS32l1FG-03-08(S)A 8 13.2 22.7 33 14.2 AS32l1FG-03-10(S)A 10 15.9 26.7 37 28 15.6 30 (31) AS32l1FG-03-12(S)A 12 18.5