AIR SLIDE TABLE

Solid state switch A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(A,C) 16.5 16.5 16.5 16.5 16.5 16.5 16.5 14.1 6.1 6.1 14.1 14.1 33.1 33.1 MXQ16(A) 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20 14 14 21 21 27 46 46 MXQ20(A) 32.2 21.2 21.2 21.2

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

8 B P.C.D.36 (Mounting thread) 60 120 14 120 M5 x 0.8 M5 x 0.8 Finger closing port Finger opening port 13 A C 45 M5 x 0.8 Finger closing port M5 x 0.8 Finger opening port 25 25 6 x M4 x 0.7 thread depth 8 (A, B, C common view) Auto switch mounting groove MHZ 42 +0.02 0 (A, B, C common view) 3 x 4 depth 8 14h9 0 0.043 MHF 1.5 MHL 9 24.6 MHR 18 4.7 3.4 2 x 3 MHK 55.5 (60) MHS 10 2 x 4.2 21

Mechanically Jointed Rodless Cylinder Series MY2

4 #1@3@9 Section A-A A MY3A MY3B MY3M A $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 55 56 57 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 17 18 19 20 21 23 24 25 26 27 28 Description Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin Note Hard anodized Hard anodized Hard anodized Hard anodized Hard

Cylinder with Lock Series CNS

[Vertical] [Load in the direction of rod extension] [Load in the direction of rod retraction] W Cylinder sliding resistance (N) Cam unlocking torque (standard) (Nm) Width across flats (mm) Socket SOL.C Bore size (mm) SOL.C 125 140 160 JIS B 4636 + 2 point angle socket 16 16 18 21 961 1216 1579 68.6 78.4 156.8 JIS B 4636 + 2 point angle socket 18 SOL.B JIS B 4636 + 2 point angle socket 21

Clamp Cylinder Series CK1

Hard chrome plated 2 Steel wire 1 1 1 1 1 1 2 3 2 4 1 2 2 1 1 1 Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Copper alloy Aluminum alloy Aluminum alloy Spring steel Magnetic field resistant auto switch M4 x 0.7 x 12 L Hexagon socket head button screw 2 pcs. per switch 2 pcs. per switch Hexagon socket head cap screw 20 M4 x 0.7 x 8 L Steel wire Hexagon socket head cap screw 21

ZSE3/ISE3

output specifications 21 and 23.

VHK

B L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 Q L2 M1 Model 1(P)2(A) 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 11 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-M5-06F VHKl-M5-04F 18 41 16.5 3.5 3.4 1.2 21 51 11 23 53 13 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-01S-06F VHKl-01S-04F 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 1 8 8 VHKl-01S-08F 62.2

Digital Flow Switch

cover (Part no.: ZS-46-D) 47.8 50.8 33.5 34.5 20.2 11 R4.5 R4.5 33.5 34.5 21 42.4 Panel thickness 0.5 to 7 Power supply/output connection lead wire (Part no.: ZS-46-5L) Sensor connector (Part no.: ZS-28-CA-4) 5 12.35 Pin no.

Heavy Duty Stopper Cylinder

D-P3DWA A B Auto switch Hs Ht Auto Switch Proper Mounting Position (mm) Auto switch model D-P3DWA RSQ B 43 Hs 35 Ht A Bore size RSG 50 63 80 19 6.5 21 10 48.5 44 RS2H RS2H 35 17 56.5 54 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Stopper Cylinder

11 17 12 12.5 17.5 22.5 23 28 20 9.5 21 10.5 15 25.5 11 21.5 5.5 6 11 30.5 31 36 28 3 29 4 8.5 33.5 4.5 29.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

bolt MY1H LZ Stroke Bore size (Shock absorber stroke) T S E EA EB W h TT Stroke adjustment unit Shock absorber FC FA EY EC (mm) E EA EB EC EY h S T TT FA FC Shock absorber model Applicable cylinder W F MY1H25 18 9 40 7.5 53.5 16 21 3.5 46.7 7 53 RB1007 5 (Max.16.5) MY1H32 25 14 45.6 9.5 67.5 23 20 4.5 67.3 12 64 RB1412 8 (Max.20) MY1H40 31 19 55 11 82 24.5 26 4.5 67.3 12 9 (Max.25) 75

NCA1

21 Series NCA1 Rod Boot Rod Boot Material Material Nylon Neoprene Max. temperature 140F (60C) 230F (110C) Suffix for option J K Max. temperature is for boot only.

NCA1

NCA1-P325 NCA1-P800 NCA1-P1000 CB 1 1/4 1 1/2 2 CD 3/4 1 1 3/8 DD 17/32 21/32 21/32 E 3 1/2 4 1/2 5 F 5/8 3/4 7/8 FL 1 7/8 2 1/4 3 LR 1 1/4 1 1/2 2 1/8 M 3/4 1 1 3/8 MR 7/8 1 1/4 1 5/8 R 2.56 3.25 3.81 Weight (lbs) 3.11 5.80 10.42 Note: Pivot pin is not included Clevis Bracket CB CW CW CD MR BA E LR DD AA M F E FL Dimensions Part No.

Table of Contents - Tubing

TUB-21 Related Equipment .

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Applicable bore size (mm) SNJ-016SUS d A1 L L1 NDd9 MM B C H B C d H 0.030 0.060 0.030 0.060 10 10 10 14 7 3.3 8 16.2 4 8.1 3.2 15.2 21 M10 x 1.0 M4 x 0.7 M4 x 0.7 16 16 16 Y-J016SUS 17 8 NTJ-015SUS 5 11 19.6 4 9.2 4 SNKJ-016SUS 16.6 21 M12 x 1.0 M5 x 0.8 M5 x 0.8 NX R1 NDH10 U1 Part no. + 0.048 0 + 0.048 0 Y-J010SUS 3.3 3.2 8 10 Y-J016SUS 5 6.5 12 10 Rod End Cap CJ5 CG5 T-bracket Flat type

VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 M1 Q L1 L2 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6

Air Slide Table/Long Stroke Type Series MXY

1, @2 and @6 each. 12 GR-S-020(20g) MXY12-PS GR-S-050(50g) 223 Series MXY Dimensions 2 x M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M 5P) 2 x M5 x 0.8 Piping port FL (Plug: M-5P) 2 x M5 x 0.8 21 21 FH 2 x M thread depth MM +0.03 0 R RL Width across flats MB (lock plate fixing bolt) PR MA (Stroke

Series CXSJ 11-/12- ø6, ø10 21-/22- Dual Rod Cylinder/Compact Type

-/22-: Lithium soap based grease Grease 12-: Class 4, 21-: Class 5 Cleanliness class (ISO class) 11-/22-: Class 3 The maximum piston speed shown in the table above applies to the extension side.

VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 M1 Q L1 L2 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 3.4 1.2 21 51 11 23 53 13 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 8 18 41 55.4 23.8 31.6 56.9 24.3

High Vacuum Slit Valve

When the shaft moves up and down, axial seal between a body 21 and outside is realized by O-rings and and a bellows .