Compact

High speed transfer Workpiece direct mounting Long stroke Light load transfer Combining with external guide Long stroke LEC S LEC SS-T Size Work load [kg] Size Work load [kg] Size Work load [kg] Size Work load [kg] 25 25 25 25 6 10 10 10 LEC Y 32 32 32 32 11 20 20 20 Motorless LAT LZ Size Size Size Size 25 32 25 32 25 32 25 32 LC3F2 Stroke [mm] Stroke [mm] Stroke [mm] Stroke [mm] 2000

0.

For details on IP65 enclosure, refer to page 32.

Rotary Table/Rack & Pinion Style Series MSQ

75.4 70 10.6 29 18.5 14 5 12 50 32 84 37 6.5 33.5 65h9 67h9 32H9 9 22H9 10 4.5 3 6.5 17 8.6 14 8.5 85.4 80 14 38 22 19 6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 10 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

HRX-OM-S004

4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-6 Cooling capacity(HRS150-A-20/40/46/46-) 8.4 Cooling capacity HRS Series 8-12 HRX-OM-S004 Chapter 8 Documents : Facility water temperature 32 oC 8.4.3 HRS100-W-20/40/46: Facility water temperature 40 oC 14 14 12 12 10 10 Cooling capacity [kW] Cooling

Clamp Cylinder with Lock Series CLK1

cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 GA W GB 17 1010 32 3 BX 14 30 45 45 M 3 Approx.

Air Cylinder Series MB

range B FD FE FT FX FY FZ Fd Front flange/(F) 32 40 50 63 80 100 25 31 38.5 39.5 45.5 54 125 to 1400 138 14 7 20 180 102 216 57.5 to 700 to 800 to 1000 to 1000 to 1000 to 1000 50 55 70 80 100 120 7 9 9 9 12 14 3 3 2 2 4 4 10 10 12 12 16 16 64 72 90 100 126 150 32 36 45 50 63 75 79 90 110 120 153 178 Port Cushion valve 4-FD Fd FY B Without air cushion Bore size (mm) FX FZ ZZ FT FE 32 40 147

0.4

Purchasing order is available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 32 35 39 43 16 18 32 35 39 43 6 8 10 12 6 8.5 10 20.5 22 20.5 22 11.5 Port plug VVQ1000-58A The plug is used to block the cylinder port.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Parallel I/O Connector I/O 1 Wiring example NPN JXC73 PNP JXC83 24 VDC Load 24 VDC Load OUT0 10 OUT0 10 1 1 +COM1 +COM1 OUT1 30 OUT1 30 Load Load 21 21 +COM2 +COM2 OUT2 11 OUT2 11 Load Load 2 2 IN0 IN0 OUT3 31 OUT3 31 Load Load 22 22 IN1 IN1 OUT4 12 OUT4 12 Load Load 3 3 IN2 IN2 OUT5 32 OUT5 32 Load Load OUT6 13 OUT6 13 Load Load 23 23 IN3 IN3 OUT7 33 OUT7 33 Load Load 4 4 IN4 IN4 OUT8 14

10

Q2 S2 F D G1/2 (44) 31.5 32 25 Y T R E C R C G1/2 (1.5) (1.5) Y E B1 B A A B1 B 2 x P Port size 2 x P Port size U W M U W M 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole X (mm) Mounting bracket dimensions Port size P Size A B B1 C D E F M 12.8 19 19 U 46 56 56 W 36 46 46 X 11 13 13 Y 6 7 7 1 2 19 24 24 30 43 45 45 50 21 22.5 22.5 25 61 (67) 76 (84) 81 (89) 86.5 30 35 40 40 9.5 12 12

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

: 32 mm width Compact yet provides a large flow capacity: Sonic conductance C: 12 dm3/(sbar) {4/2 5/3(A/B EA/EB)} Low power consumption: 1.8 W (DC) Fluid Operating pressure range Air 0.15 to 0.9 MPa 0.1 to 0.9 MPa 10 to 50C (No freezing.

HRX-OM-X084

returnT1 8 9 White Blue (CN1) 2 2 (CN2) (CN6) 1/2 Brown Black (CN6) 3/3 1 3 37 Refrigerator suctionT2 2 4 Black Blue PCB1 38 Circulating fluid outlet 39 Brown 1 9 (CN1) 2/2 (CN5) 40 Blue 2 13 (CN4) (CN3) 1 2 1 3 11 12 1 3 PCB2 Blue 3 15 PS1 Brown 27 Black Black 20 Blue Refrigerant high pressure Blue 10 Brown 1 32 Yellow/Green Black White Black Black 2 C2 Gree 14 Blue [G5] (CN2) 16 Blue 3

reduces flow setting time

Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

1

15 17 10 22 0 0.033 11 8.5 33 6 Width across flats 8 length 3.5 M10 x 1.25 27 M22 x 1.5 25 8 15.5 M5 x 0.8 32 17.5 15 17 10 22 0 0.033 11 8.5 33 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 M22 x 1.5 32 12 15.5 M5 x 0.8 40 23.5 20.5 22 14 27 0 0.039 12 9.5 39 8 Width across flats 12 length 3.5 M14 x 1.5 42.5 M27 x 2 40 13 15.5 M8 x 1.25 Port Thread: M5 Female Rod End [mm] [mm] Port

HRX-OM-M090

Terminal no.12 Switch Terminal no. 12 11 Recommended accessory cable dia. is 0.14 to 1.5mm2 9 10 Terminal no.1 Fig. 3-7 Wiring of contact for remote signal inputsExample 3.3 Installation HRS Series 3-12 HRX-OM-M090 Chapter 3 Transport and Setting Up 3. Plug the prepared connector in to the contact input/output connector that is on the back of the thermo-chiller.

MGC

70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 50 75 150 115 82.5 45 194 42 M10 200 95 12 11 135 115 210 190 19 23 142 Bore size (mm) W WH W V U T S Z R Y Q X O P 20 25 32 40 50 30 23 36 40 86 12 26 140 12 80 21 30 M6 x 1 M5 x 0.8 30 25 44 47 98 13 31 153 12 80 21 37 M6 x 1 M5 x 0.8 25 28.5 50 53 112 16 38 161 12 82 21 37 M6 x 1 Rc 1/8 20 33 60 63 132 20 47 188 12 92 25 44 M8 x 1.25

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model VCHC 1/8" ASD230FM-U10/32-01 12 8.4 12.9 29.4 17.5 5/32" ASD230FM-U10/32-03 13 9.3 ASR ASQ 10-32 UNF 8 10 11.7 7.8 29.6 33.8 30.1 34.6 25.1 28.8 9.6 3/16" ASD230FM-U10/32-05 35.2 23.3 16.5 14 11.4 1/4" ASD330FM-U10/32-07 32.6 20.7 13.5 15 12 14 34.6 39.6 3/16" ASD330FM-N01-05S 39.5 23.9 16.5 30 11.4 12.7 11.8 10.6 35.2 32 1/4" 27 NPT 1/8 ASD330FM-N01

VQC

SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) ^{Rc 1/2 N7 (1/4") N9 (5}

HRX-OM-Q026

8 Documents 8.4 Cooling Capacity 8.4.1 HRSH100-A-20/4014 Ambient temperature: 32 oC 12 10 Cooling capacity [kW] Ambient temperature: 43 oC 8 Ambient temperature: 45 oC 6 4 2 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-7: Cooling Capacity (HRSH100-A-20/40-) 8.4.2 HRSH150-A-20/4025 Ambient temperature: 32 oC 20 Cooling capacity [kW] 15 Ambient temperature: 43 oC Ambient