Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

ZP 40HB ZP HB ZP HB 40 50 63 80 100 125 F F 4 x 9.5 F 4 x 8 4 x 6 3 x 6.5 4 x 5 G 3 x 4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions (mm) Dimensions (mm) Dimensions (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41 28 43 20.5 30 13 63 65 46 68 31.5 50 4.5 21.5 100 103 69 107 47.5 80 35.5 ZP125HB ZP50HB ZP80HB 50 52 36 54

5 Port Solenoid Valve

Note 4) For the SI Unit part no., refer to page 617. 615 A VQC4000 Series How to Order Valves VQC 4 0 1 0 1 VQC4000 series 5 A B C D E F A Type of actuation B Seal type E Light/Surge voltage suppressor 0 Metal seal 1 Rubber seal 2-position single 3-position exhaust center (A) 4 (B) 2 (B) 2 (A) 4 Nil Yes E Without light, with surge voltage suppressor 1 4 C Function Nil Note 1) Standard (0.95

Cylinder with Lock

Width across flats KB B C V MM BH1 BH2 BH3 TX D E B1 C B ZZ + Stroke S + Stroke H A K BN N1 N MA MB F AL H1 TT B C B1 C B TY With rod boot d e 10.2 f h 10.2 l [mm] Bore size A AL B B1 BH1 BH2 BH3 BN BP C D E F GA GB GC GD GE GF H H1 J 32 22 19.5 46 46 23 38.5 46.5 59 1/8 32.5 12 30 13 37.5 13 37.5 18.5 4 13 47 6 M6 x 1.0 40 30 27 57 52 28.5 42.5 48.5 73 1/8 38 16 35 13 59.5 14 44.5 19.5 4

7.4

B 4-position dual 3-port (N.O. + N.O.) (Pressure center) C 4-position dual 3-port (N.C. + N.O.) Electrical entry Symbol Specifications Configuration Body Ported Note) It cannot be mounted on a manifold.

ZX

Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.

EXxx-OMK0006

Bytes 4 to 7 are always 0.

Output block / Power block

(Including insulator) 1.65 mm 4 Black: Min. bending radius (Fixed) 40 mm 5 Grey: : Refer to Accessories (page 49) for cables. -35No.EX-OMH0025-C Examples of Internal Circuit and Wiring EX9-OET1 EX9-OET2 1: Solenoid valve connector 2: SI unit connector -36No.EX-OMH0025-C EX9-PE1 + EX9-OEP1 EX9-PE1 + EX9-OEP2 1: Solenoid valve connector 3: Output block connector 2: SI unit connector 4: Power

AWG

C C U K P O A A S H L to C U S O H L to B D !

Cylinder with lock

Doc. no.C96N-OM0198Q PRODUCT NAME Cylinder with lock MODEL / Series / Product Number C96N*32&100-*C Contents Safety Instructions P.2 1. Product Specifications P.4 1-1. Cylinder specifications P.4 1-2. Lock unit specifications P.4 1-3. Stop accuracy P.4 1-4. Precautions on model selection P.5 2. Installation and Handing P.9 2-1. Air supply P.9 2-2. Design P.10 2-3. Mounting P.11 2-4.

VCW

4 PPS, NBR Armature assembly Push rod assembly 3 4 5 6 7 NBR O-ring 5 6 7 FKM, EPDM, PTFE O-ring FKM, EPDM, PTFE NBR Stainless steel Return spring Return spring Stainless steel Brass Body Stainless steel Body Stainless steel Brass Bracket Dimensions A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket mounting dimensions A B C D E F G H J L Bracket part no.

HRX-OM-I051

fluid . 4-2 4.3.2 Supply of circulating fluid . 4-3 4.4 Requirement for System Startup . 4-4 4.4.1 Turning ON power. 4-4 4.4.2 Circulating fluid temperature setting . 4-5 4.5 System Startup and Shutdown . 4-5 4.5.1 System startup . 4-5 4.5.2 System shutdown . 4-5 Chapter 5 System Operation . 5-1 5.1 Operation Display Panel . 5-1 5.2 Flow Chart of Operation Screen. 5-2 5.3 Operation Screen

Cylinder with lock

Doc. no.C96N-OM0197Q PRODUCT NAME Cylinder with lock MODEL / Series / Product Number CP96N*32&100-*C Contents Safety Instructions P.2 1. Product Specifications P.4 1-1. Cylinder specifications P.4 1-2. Lock unit specifications P.4 1-3. Stop accuracy P.4 1-4. Precautions on model selection P.5 2. Installation and Handing P.9 2-1. Air supply P.9 2-2. Design P.10 2-3. Mounting P.11 2-4.

Digital Gap Checker

Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 ISA3-mmm-mmmB-LNm ISA3-mmm-mmmB-RNm 44.6 L1 L1 44.6 52.5 30 52.5 30 64.5 H 90.1 115.9 64.5 Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 Unit: mm Stations 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 *: Bracket mounting only *1: Conforming to ISO16030 *2: Conforming to

Lightweight and Compact

[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating

Thermo-con/Rack Mount Type

Circulating fluid outlet Rc1/4 Ventilation hole (air outlet) 3.

&snac

R e f e r t o " R e p l a c e m e n t o f m o d u l e s e t ' ( P . 4 ) ' W h e n t h e c o n d i t i o n s t a t e d i n t a b l e 4 r e a c e s , e x h a n g e d e ! . i P o i n t c n e c k e f .

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

(b) Vcc B-1 Brown 12 5 5m GND A-1 Black 13 8 8m* A B-2 Red 7 A A-2 Black 6 A 10m* B B-3 Orange 9 B 15m* B A-3 Black 8 SD+(RX) B-4 Yellow 11 C 20m* SD-(TX) A-4 Black 10 Black 3 * Produced upon receipt of (c) Signal name Terminal No.

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS NTJ-015SUS SNKJ-016SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.