PFxx-OMP0001CN

5F.S.(00.8 MPa0.6 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 2 V (80 mA ) 4 0.05 0.1 0.5 1 2 5 0 -62No.PF-OMP0001CN-F PFMB7501 PFMB7102 PFMB7202 15 V420 mA () 1 k 6 24 V 600 12 V 300 7 0.4 V ()30 msec. 8 9 L/mincfm 10 3 Lft -25525 L/min -501050 L/min -1002100 L/min (-44 [ 0]) (-99

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

state switch D-M9B, D-M9N Reed switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99

Table of Contents

End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 Product name Model Model Page End of July '94 End of July '94 End of

VS 8-2/VS 8-4

RD SD LRUN PW B RATE 6.5 112 99 80 x1 x10 STATION NO.

Pilot Operated

98.5 99 198.5 (205.5) 112.5 105 104.5 105 ( ) denotes the value for N.O. 12 Series VXD21/22/23 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

One-touch Fittings

37 13.3 2.5 2.5 1 6 KQ2N06-99 39 13.3 4 4 2 8 KQ2N08-99 43 14.2 6 6 2 10 KQ2N10-99 49 15.6 7.5 7.5 4 12 KQ2N12-99 52 17 9 9 3.3 16 KQ2N16-99 57 20.6 13 13 4.8 2 x Applicable fitting D d L M M Reducer Nipple: KQ2N Applicable fitting b Applicable fitting Model L M1 M2 d Min. port size Weight [g] a b 4 6 KQ2N04-06 38 13.3 13.3 2.5 2 6 8 KQ2N06-08 42 14.2 13.3 4 2 8 10 KQ2N08-10 47 15.6 14.2

3 Port Solenoid Valve/

.: 6, 1/4" (With check valve) (External pilot port) (M12 connector) 2 x 1/2" [3(R) port] 67 6.5 Applicable cable O.D. 3.5 to 7 2 x 6.2 (For mounting) G1/2 Channel 2 113.5 41.5 36 94.5 77.5 Channel 1 36 21 9.5 (88.9) 16 18 (14) (Max. 10) 224.2 117.3 27.2 (70.7) A 124.8 99 View A For M12 connector 36 18 e w Vent port (6.2) 1/2" [1(P) port] 40 r Pin number (22.9) (With check valve) q 88.9 80

Line Filter

Min. operating pressure of auto drain 0.1MPa N.O. 1m Nominal filtration ratingNote1) (99% filtered particle size) Water droplet removal ratioNote2) 99% Max. air flow capacityNote3) 2200L/min(ANR) 3700L/min(ANR) Compressed air purity classNote4) ISO8573-1:2010 [4:7:4] 100cm3 Drain capacity Bowl material Stainless steel Weight 1.23kg 1.46kg Note1) Conditions in accordance with [Test method

Compact Cylinder with Air Cushion and Lock Series RLQ

Bore size (mm) 32, 40 50, 63 Stroke range (mm) 21 to 99 31 to 99 Stroke range Part number: RLQB32-47-B A special tube is manufactured for a 47 mm stroke.

EX250-SPR_eng

Setting range: 1 to 99 (10 dec.) Example: Example: 2 Address is set in network by using ET200 hand held unit or PG (programing tool). Once address is set, it is saved even if power is cut. Setting range: 1 to 125 (10 dec.) Value set on shipment: 125. CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

EX600-SPRA_eng

of occupied valve 8 outputs Number of occupied valve 16 outputs Number of occupied valve 24 outputs Number of occupied valve 32 outputs Configuration X10 2 0 9 0 0 Mark C on the unit Mark B at cable end Mark A at cable end : : Address (1) Setting of the terminal resistor X1 Content 3 4 1 2 5 0 9 1 0 8 7 : : Content 9 6 5 x10 x1 0 5 4 1 2 3 0 (default setting) Node Address 8 7 9 6 125 100 99

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

2-8 counter bore depth 4.4 45 0.2 50 0.2 45 0.2 48 25 56 58 6.3 5 2.1 M4 x 0.7 x 14.5l and M4 x 0.7 (hexagon bolt) (hexagon nut) 2-M5 x 0.8 (through) 1 9 2-M3 x 0.5 (through) 30 (Z) 4-M4 x 0.7 thread depth 5 (same on reverse side) 3 10 Model S ZZ Z SS CXS15-10-XB19 10 89 70 38.5 8 CXS15-15-XB19 15 94 75 25 4-M5 x 0.8 Thread depth 4.5 (piping port) (same on reverse side) CXS15-20-XB19 20 99

VVXA21/22

The right side of the common port provides plug. 17-3-99 4 The VX series will be revised shortly.

PFxx-OMS0001CN

MPa0.6 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 1.5 V (80 mA ) 3 0.05 0.1 0.5 1 2 4 0 -66No.PF-OMS0001CN-A PFMC7501 PFMC7102 PFMC7202 15 V420 mA () 1 k 5 24 V 600 12 V 300 50 6 0.4 V ()30 msec. 7 8 3/min) L/mincfm(ft 9 3 Lft -25525 L/min -501050 L/min -1002100 L/min (-44 [0]) (-99

CEx-OMI0064

UP/DOWN No. 00~99 SET SEL. UP DOWN SEL. UP/DOWN On OFF SET )On/OFF MODE , SEL. , SET RIGHT LEFT UP DOWN RIGHTLEFTUPDOWN 10N 19 - 7-3 7-3-1 -7,999,999+7,999,999, F, (+8,000,000 ,F,-8,000,000 ,-F ,,F) 6 (-999,999+999,999),6 7-3-2 , 0 , ,RS-232C BCD ,,, 7-3-3 ,14 No. 2 1 1 OFF OFF 2 OFF ON 3 ON OFF 4 ON ON 7-3-4 No.

Modular F.R.L. Units

74 74 95 A4 43.2 57.2 57.2 75.2 A1 41.6 55.1 55.1 72.6 77.6 A2 61 76 76 99 104 A1 41.6 55.1 55.1 72.6 77.6 A2 43.2 57.2 57.2 75.2 80.2 A3 57 74 74 95 102 A1 41.6 55.1 55.1 72.6 77.6 A2 61 76 76 99 104 A3 57 74 74 95 102 A1 41.6 55.1 55.1 72.6 77.6 A2 61 76 76 99 104 A3 43.2 57.2 57.2 75.2 80.2 AC20-A AC25-A AC30-A AC40-A AC40-06-A K KS V S KV KSV SV A3 43.2 57.2 75.2 Attachment Model A2

CLA

I60 182 0 58 25. 52 11 .2 66 stroke ~ 70 208 0 71 296 65 12.5 80 305 80 226 0 72 315 65 I. 81 324 63 7 99 14 M18Xl .5 % -16 31 % 48.5 13 23 !

Compact Cylinder with Air Cushion

Bore size 20, 25 32, 40 50, 63 80, 100 Stroke range 16 to 49 21 to 99 31 to 99 41 to 99 Allowable kinetic energy Stroke range Refer to "Selection" on page 24 regardng the allowable kinetic energy. Part number: RQB32-47 A special tube is manufactured for a 47mm stroke.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 16 M12 x 1.75 Bore size [mm] K KA LZ M MM N P PG PH PL PW S Without rod boot With rod boot H ZZ e f h l ZZ 40 6 14 71 11 M14 x 1.5 27 1/4 42 11 20 45 153 51 215 43 11.2 59 1/4 stroke 223 50 7 18 80 11 M18 x 1.5 30 3/8 46 10 21 50 168 58 237 52 11.2 66 1/4 stroke 245 63 7 18 99

OMU0023

For Step Data Input Type control signal mode 0: No Step Data executed 1-15: Step Data number currently executed 20: Direct operation 99: Return to Origin position For Pulse Input Type control signal mode 0-3: Step Data number currently executed 99: Return to Origin position Binary digit (decimal value) 0 to 99 ASCII hex "00" to "63" 42 - 5.6 List of Request Functions Function of each function