SMC Corporation of America
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Supply power to the upper side EtherCAT device that L/A IN LED is OFF. Connect the connectors of communication cable correctly. Exchange the communication cable if disconnection has been found. EtherCAT L/A IN and L/A OUT are OFF. Check fitting state of connectors and check disconnection of wiring. communication is not established.

Output specifications 25 (L) 26 (L) 67 (L) 26 (L) 27 (L) 67 (L) 1 output NPN open collector 30V, 80mA or less ZSE4 ZSE4B Analog output (1 to 5V) 1 output PNP open collector 80mA or less Analog output (1 to 5V) ZSE4E 2 outputs NPN open collector 30V, 80mA or less 2 outputs PNP open collector 80mA or less Refer to CAT.E824-A "Pressure Switch" for details on switches. 3 Series ZL Construction

ASS AS1001FG AS2001FG AS2051FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations AS3001FG AS4001FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle

K C37 1 25 L Stainless steel G 24 VDC DIN terminal With surge voltage suppressor Note) H 100 VAC J 110 VAC K 200 VAC L 230 VAC N 100 VAC Conduit terminal With surge voltage suppressor P 110 VAC Q 200 VAC R 230 VAC T 100 VAC Conduit With surge voltage suppressor U 110 VAC V 200 VAC W 230 VAC Z Other voltages Note) For the class H type DIN terminal, use it in combination with the connector

(Station 1) 2 2 13 7.7 (Pitch) P=10.5 10.5 (2 port) M5 x 0.8 L plug connector (L) M plug connector (M) 32.5[34.7] <34.7> 11.6 38.1[45.1] <42> 42.3[44.5] <44.5> 27.5 Other dimensions are same as grommet style.

l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2

](mgCaCO3/L) 100 or less 50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L) Shall not be detected.

, (N)VZS, ISO N Positive IN313-DN1-B VQ1000 N NP420-DN1 32 in, 32 out Positive SEMI & Honeywell EX141-SSD1 16 out N Positive SQ1000/2000, SZ3000/5000 SDS (N)VFR/VFS, (N)VZS, ISO 16 out Negative IN313-PR1 N ?

(When reversed output is selected, the sub display (left) shows [n1L/n2L] and [n1H/n2H].) 16000 L/min 12000 L/min 20 L/min 6000 L/min Additional range 3 Blue DC(-) DC(-) WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury.

Next, in the required specification example, the viscosity is 100 mPas and the discharge rate is 2.7 L/min. Since this is equivalent to 45% of the discharge rate for fresh water, 2.7 L/min 0.45 = 6 L/min, indicating that a discharge rate of 6 L/min is required for fresh water. 3.

Bit[70] 3 RWwn+2 1) Bit[F8] 2 4 2147483647 0.01mm Bit[70] 1 RWwn+3 1) Bit[F8] 0 Bit[70] H RWwn+4 1) 2 065500 mm/s2 Bit[F8] L Bit[70] H RWwn+5 1) 2 065500 mm/s2 Bit[F8] L Bit[70] 1 030 10% RWwn+6 1) Bit[F8] 1 030 10% Bit[70] 1 0255 mm/s RWwn+7 1) Bit[F8] 1 030 10% Bit[70] H RWwn+8 1) 2 065500 0.01mm Bit[F8] L ID2 RWwn+917 ID1 ID3 RWwn+1826 ID1 ID4 RWwn+2735 ID1 ID5 RWwn+3644 ID1

The solenoid Only LED of the Solenoid valve valve does not solenoid valve failure work correctly is ON PWR LED is Refer to OFF reference No.1 Yes No PWR(V) LED is Refer to OFF reference No.2 flashes Refer to L ERR LED L RUN LED is reference No.3 flashes OFF OFF or ON OFF Refer to L ERR LED is reference No.4 OFF ON Refer to reference No.5 Flashes or ON Refer to L ERR LED reference No.6 flashes

min) 0.45/0.65 (at 20 l/min) 0.65/0.95 (at 30 l/min) 0.40/0.60 (at 20 l/min) Rated flow Note 6) ( l/min) Main tank capacity Note 7) (l) Sub-tank capacity Note 8) (l) Port size Wetted parts material Temperature range (C) Pressure range (MPa) 20 Approx. 12 Approx. 15 Rc 3/4 Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin 10 to 25 0.3 to 0.7 30 Approx. 22 Approx

F (E) L H G F E B M L 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 9.5 12 18 20 28 36 4.8 6 9 10 14 18 10 17 22.5 24.5 27 30 3.5 4 5 6 7 8 14 20 25 29 37 49 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3T1A LQ3T2A LQ3T3A LQ3T4A LQ3T5A LQ3T6A M 1/4 (E) (E) G H L L Panel Union : LQ3P J Panel Thickness (Max. t) (mm) Inch Size H W2 W1 Model Tubing O.D.

SImA, rma l vollaQl9"IV ()( less ZSE4B-~: -26 Vacuum Analog output 1-5V( S%F S.I. load lq>edaoc:e: IkO ZSE4B -~: -65 P NP output PNP open co~ eclor MmA ISE4LB~i -25 Posilive pressure NPN output NPN0)J (l OJi eclGf 30V. 8rhA, resma l vol tage'!

B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (5.5) (14) (1) B1 A1 5 6 (17.7) (3) 2 1 A6 B6 (18) (6.3) 16 15 L (11) (30.7) -59No.

Current output 4~20mA2.5% F.S. or less Repeatability 0.2% F.S. 2digit or less 0.2% F.S. 1digit or less response time 2.5ms or less (With anti-chattering function:20ms, 160ms and 640ms selection) Hysteresis Hysteresis mode and window comparator mode selection Port size R1/8 (with M5 female) Enclosure IP40 43 Vacuum Regulator Series IRV 60 l/min (ANR) Note) 100 l/min (ANR) Note) 150 l/min (

Flow Sensor Series PFMV5 How to Order PFMV5 05 1 Option (shipped together) Measurement flow range 0.0 to 0.5 l/min 05 10 30 05F 10F 30F None With L-type bracket Nil 0.0 to 1.0 l/min 0.0 to 3.0 l/min 0.5 to 0.5 l/min 1.0 to 1.0 l/min 3.0 to 3.0 l/min A Mounting screw Analog output (1 to 5 V) Output specification 1 2 L-type brackets (with 2 mounting screws) are included.

](mgCaCO3/L) 100 or less 50 or less 50 or less Total hardness (mgCaCO3/L) 200 or less 70 or less 70 or less Calcium hardness (mgCaCO3/L) 150 or less 50 or less 50 or less Ionic state silica (mgSiO2/L) 50 or less 30 or less 30 or less Iron (mg/L) 1.0 or less 0.3 or less 1.0 or less Copper (mg/L) 0.3 or less 0.1 or less 1.0 or less Reference items Sulfide ions (mg/L) Shall not be detected.