SMC Corporation of America
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Table 3.2-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of Differential temp. of Model radiation 3 oC between inside and 6 oC between inside and (kW) outside of installation outside of installation area area HRS400-A-46Approx.52 865 435 Installation environment specifications Sound noise: HRS400-A-46 : 71 dB(A) Front 1m, height

Table 3.2-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of Differential temp. of Model radiation 3 oC between inside and 6 oC between inside and (kW) outside of installation outside of installation area area HRL100-A-20 Approx.18 305 155 HRL200-A-20 Approx.35 590 295 HRL300-A-20 Approx.45 760 380 Installation environment specifications

Table 3.2-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of Differential temp. of Model radiation 3 oC between inside and 6 oC between inside and (kW) outside of installation outside of installation area area HRL100-A-20 Approx.18 305 155 HRL200-A-20 Approx.35 590 295 HRL300-A-20 Approx.45 760 380 Installation environment specifications

Table 3.2-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of Differential temp. of Model radiation 3 oC between inside and 6 oC between inside and (kW) outside of installation outside of installation area area HRL100-A-40 Approx.18 305 155 HRL200-A-40 Approx.35 590 295 HRL300-A-40 Approx.45 760 380 3.2 Installation HRL Series 3-6

Table 3-1 Amount of heat radiation and required ventilation Required amount of ventilation [m3/min] Model No.

Table 3-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of 3 C between inside Differential temp. of 6 C between inside radiation Model (kW) and outside of and outside of installation area installation area HRR010-A-10/20Approx.2 40 20 3.2 Installation HRR Series 3-4 HRX-OM-X084 Chapter 3 Transport and Setting Up The water cooled

Table 3-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of 3 C between inside Differential temp. of 6 C between inside radiation Model (kW) and outside of and outside of installation area installation area HRR012-A-10/20Approx.2 40 20 HRR018-A-10/20Approx.4 70 40 HRR024-A-10/20Approx.5 90 50 HRR030-A-10/20Approx.6 100 60 3.2 Installation

Table 3-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of 3 C between inside Differential temp. of 6 C between inside radiation Model (kW) and outside of and outside of installation area installation area HRR050-A-20/40Approx.10 140 70 3.2 Installation HRR Series 3-4 HRX-OM-X071 Chapter 3 Transport and Setting Up The water cooled

HRS090 Series 2.1 Precautions for communication 2-1 HRX-OM-T004 Chapter 2 Contact input/output communication 2.2 Communication specification Table 2.2-1 DIO Communication specification Item Specification Connector type M3 terminal block Contact input Insulation method Photo coupler signal Rated input voltage DC24V Input voltage range DC 21.6V to 26.4V Rated input current 5mA TYP Input impedance

HRSH Series 2.1 Precautions for communication 2-1 HRX-OM-R028 Chapter 2 Contact input/output communication 2.2 Communication specification Table 2.2-1 DIO Communication specification Item Specification Connector type M3 terminal block Contact input signal Insulation method Photo coupler Rated input voltage DC24V Input voltage range DC 21.6V to 26.4V Rated input current 5mA TYP Input impedance

Attach the included filter cover and air filter (hook the protruding part of the filter cover on the product) and tighten screws to the required torque (M3: 0.63Nm). [] key (UP key) Increases set data. [MODE] key Used to change screens and modes.

Signal 1 Thermostat + 2 Thermostat 3 RTD sensor terminal A (internal temp. sensor) 4 RTD sensor terminal B (internal temp. sensor) 5 RTD sensor terminal B (internal temp. sensor) 6 Leak sensor +24V 7 Leak sensor signal input 8 Leak sensor 24VE Signal connector 9-10 Unused Earth FG 4) Terminal block HED003-C2*, HED005-C2*, HED007-C2* MORIMATSU: M111A-7A, Fixed screw M3 Connection cable; 22AWG

Step 3 Preparation2 Step 4 Body assembly 3 3 Bolt 1 2 Bolt size, Tool, Tightening torque of bolt (Nm) Valve seal 1 2 1 Bolt size valve Hex Tightening torque wrench size 16 M3 3 0.7 4 4 25 M5 4 1.5 40 M6 5 2.5 Bonnet 50 M8 6 6.1 assembly 63 M10 8 15 80 Body [For XLA-] Pilot port 0.4 MPa [For XLC-] Air should not be applied.

Step 7 Reassembly of bonnet assembly (No.2) 3 Bolt 1 2 4 Bonnet assembly Pilot port Bolt size, Tool, Tightening torque of bolt (Nm) valve Bolt size Hex Tightening size wrench torque XLF-16 M3 3 0.7 -25 M5 4 1.5 -40 M6 5 2.5 -50 M8 6 6.1 -63 M10 8 15 -80 Body Supply air pressure of 0.4MPa (G) to the pilot port.

80 Actuating type Double acting(Dual operation) , pressurize to open/close Fluid Inactive gas under vacuum Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pa m3

XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pa m3

Table 4 Inner cover fixing screw tightening torque[Nm] Model Screw size Tightening torque CYV15 M3 x 0.5 0.3 CYV32 M6 x 1 2.45 Sine suction mechanism is installed as a standard specification. However, cushion effect adjustment is not available. 7. Maintenance (1) Do not disassemble the cylinder tube, linear guide, slide table and other components.

. <> () () 6080 D-M9A(V) M3M3 0.6 0.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1) (M2.5) 2) M3 BM5 12 - 13 - 3. 14 - 1) 2)1 (30) * *(NC=b )(D-M9E(V)) 15 - / 16 - 3. CM2-*Z 3-1. a) b GR-S-010(10g )GR-S-020(20g ) P18, 4.

Size 10 Size 15 P211070-10 P211090-10 Stainless Hexagon socket set screw Stainless 3 Hexagon nut steel 1 M3 3 steel 1 M33L Cross recessed round head screw Stainless Cross recessed round head screw Stainless 2 steel 2 M34L 2 steel 3 M312L Stainless Aluminum steel 1 1 Joint alloy 1 Chromated 1 Joint No. Description Material Qty Note No.

Bolt size for mounting on axial direction Bolt Size Mounting on the top Mounting at bottom Bolt Tap depth When using body tap When using body through hole 1 M30.5 3.5 M40.7 M3 2 3 M50.8 M4 7 M40.7 4.5 Table 6.