3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

, NPT1/41, G1/41, Rc1/8, URJ1/42, TSJ1/43 Copy function5, Auto-shift function5 Copy function, Auto-shift function 1 M5 female threaded 2 Face seal fitting 3 Compression fitting 4 1 output in SIO mode (NPN or PNP switching type) 5 This function is not provided with the IO-Link compatible type. 3-Screen Display High-Precision Digital Pressure Switch ZSE20B(F)/ISE20B Series How to Order p. 13

30

49.5 60 74.5 20 25, 32 40 50, 63 Semi-standard type Pneumatic: to 1 MPa (mm) Maximum thread depth P Allowable eccentricity U Maximum operating tensile and compressive force N Applicable cylinder bore size Model Nominal size Pitch Center of sphere R M A B D E F G H Weight kg 20 25 32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5 20 20 20 22 22 21 24 24 31 31 31 41

Compact Cylinder

26.5 Weight 57 g 29 16 24 + Stroke 26 23% volume reduction 25.5 + Stroke 29 Weight 61 g 42% weight reduction 32 Weight 106 g 36 20 40% volume reduction 30 27.5 + Stroke 34 + Stroke 36 Weight 82 g 45% weight reduction 36 Weight 150 g 40 25 40% volume reduction 30 + Stroke 33.5 37.5 + Stroke 40 Weight 135 g 33% weight reduction 43.5 1 32 Weight 202 g 49.5 35% volume reduction 32.5 + Stroke 41

Thermoelectric Bath

) 1.2 (30) 1.2 (30) 1.6 (41) 1.9 (49) 1.0 (25) 5.8 (148) 5.4 (138) 5.4 (138) 0.35 (9) (8.0 (204)) 0.59 (15) 7.8 (198) DC connector Facility water outlet Rc1/4 Facility water inlet Rc1/4 For -N spec.

Slider Type Ball Screw Drive/11-LEFS Series

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

CLA

mmt ,-.ow "",.f I Bore size (mm) A DB BN BP BO DC 00 oE F GA GB GC GO GL GR J K LZ MM Without boot With boot 40 500 25-500 27 30 60 96 '/. y. 44 16 32 10 85 15 26 54 10 10 M8Xl.25 6 71 M14X1 .S 50 600 25-600 32 35 70 108 'I, 'I< 52 20 40 10 95 17 27 59 13 12 M8X1.25 7 80 M18xi.S 'I, 35 86 40 1 -'02 115 129 20 25 40 52 10 14 17 32 37 102 113 67 72 18 15 17 63 80 26 30 7 99 -SOO 750 32600 41

VZA2000

0 to 1.0 VZA4121, 4141 Pilot pressure range (MPa) 2 3 4 2 3 4 VZA4 21, 4 41 0.1 to 1.0 Impact/Vibration resistance (m/s2) Note) 150/50 Operating pressure Pilot pressure Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF .

Vacuum Unit

(Ejector system) 41 A Vacuum Unit ZK2mA Series Electrical Wiring Specifications D-sub Connector Flat Ribbon Cable Connector Triangle mark indicator position Polarity Terminal Connector terminal no. Terminal number Polarity number Connector terminal no.

Stability of suction position,

ZP3EA-YAL16 [Weight: 116.6 g] M16 x 1.5 Width across flats 22 Width across flats 19 M14 x 1 6 6 25 24.5 49.5 16 5 5 25 41 M5 x 0.8/ Effective thread depth 5 Rc1/8 14.5 9 9.9 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-100UM ZP3E-125UM ZP3E-63BM ZP3E-80BM ZP3E-100BM ZP3E-125BM 7 M10 x 1 M16 x 1.5 Applicable pad part no.

ZSE30A(F)/ISE30A

Note) When the display calibration function is used, the set pressure value may change 1 digit. 41 ZSE30A(F)/ISE30A Series The F in ( ) shows the function code number. Refer to the Operation Manual for the details of operation procedures and function codes.

CRQ2

L L 13 16 22.5 24.5 28.5 Size Screw M4 M4 M6 M8 M8 10 15 20 30 40 11-8-8 9 Series CRQ2 Compact Rotary Actuator Rack & Pinion Style Proper Auto Switch Mounting Position at Rotation End Solid state switch Reed switch Rotating angle Size Operating angle ( m) Operating angle ( m) Hysteresis angle Hysteresis angle 75 (41) A 10.5 13.5 13.5 17.5 26 32 33 41 38 47.5 B 13 22.5 18 30.5 34.5 53.5 45

Rotary Cylinder Series MRQ Size: 32, 40 1

The standard angle adjustment range of 5 (one side) is changed to in this type. + 5 95 (mm) E Mounting screw Y Q Stroke 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 Size 58.5 ( 5 Stroke)/2 61 ( 10 Stroke)/2 61 ( 15 Stroke)

MVGQ

For details, refer to page 10-20-41. 10-16-20

C85

7 2C 2D e r t y u i Hard chrome plated Chromate Nickel plating (Switch type only) Nickel plating 6-11-41 41 Series C85R Dimensions [First angle projection] Double acting, Single rod Base mounting/C85RAF Y Without magnet, Built-in magnet (Band mounting type) 8 to 16 Stroke B XB G2 EE WH G1 EE SW 2-LD D D KK NA NA B LH K AM C N2 LX NA N1 NA S + Stroke H L ZZ + Stroke Head cover Y Head cover

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Use the collision speed when calculating dynamic moment. 12 28 41 MXP16 26 Symbol Unit Definition Definition Symbol Symbol Unit mm An (n = 1 to 3) V Collision speed mm/s Correction values of moment center position distance J E Va Average speed Kinetic energy mm/s J Emax W Load weight Allowable kinetic energy kg mm Ln (n = 1 to 3) Wa Allowable load weight Overhang kg Nm M (Mp, My, Mr) We

Size: 1/2, Model Combination: AW+AL, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 1/2, Model Combination: AF+AR+AL, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 1/2, Model Combination: AF+AR, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 1/2, Model Combination: AF+AR, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.O., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 1/2, Model Combination: AF+AR+AL, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -