Stability of suction position,

Pad diameter 32 to 50 Dimensions/With Set Screw: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-T32UMl-A10 ZP3E-T40UMl-A10 ZP3E-T50UMl-A10 6 M10 x 1 40 Seal washer Seal washer M10 x 1 31 31 6 Seal washer 6 M10 x 1 Width across flats 6 Width across flats 6 21.5 4.9 21 4.9 21 4.9 Width across flats 6 14.5 14.5 15 3 2 2.5 35 32 43 40 53 50 Weights [g] Weights [g] Weights [g] Pad material

C95

See page 6-12-10 for dimensions. See page 6-12-10 for dimensions.

0.4

mA), Holding 1.26 VA (6 mA) 200 VAC N.C.

Compact 5-Port Solenoid Valve

5 4 3 2 1 8 7 6 5 4 3 2 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Station 1 Station 1 Station 1 Station 2 Station 2 Station 2 Station 3 Station 3 Station 3 Station 4 Station 4 Station 4 COM. (+) 9 () () Station 5 Station 5 COM. (+) 10 (+) (+) (+) (+) (+) (+) (+) (+) Positive common Negative common Station 6 Station 6 Station 7 Station 7 Station 8 Station 8 * When using a valve with no polarity

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C6: 6 (SMC) N7: 1/4" (SMC) Applicable tubing O.D. C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.

Air Cylinder Series MB

6 !7 !

15

FP (Mounting distance) Actuator Motor plate details q w FC Motor mounting surface FD FH FF FE 4 x FA, thread depth FB FG Dimensions [mm] Size Motor type FA FB FC FD FE FF FG FH M1 T1 M2 T2 PD FP 40 NY M3 x 0.5 6 45 30 3.5 6 99 49 M4 x 12 2.7 M2.5 x 10 0.65 8 12.5 NX M2.5 x 10 0.65 8 7 NY M4 x 0.7 6 70 50 3.5 6 123 68 M4 x 12 2.7 M4 x 12 2.7 11 18 NX M5 x 0.8 6 63 40 3.5 6 123 68 M4 x 12 2.7

Air Cylinder

The base oil of grease may seep out. 6.

Swivels

Nitrile Seals EP Seals Fluorocarbon Seals Size Kit Number Size Kit Number Size Kit Number -4/-6 RK-4/6N -4/-6 RK-4/6E -4/-6 RK-4/6V -8/-10 RK-8N -8/-10 RK-8E -8/-10 RK-8V -12 RK-12N -12 RK-12E -12 RK-12V -16 RK-16N -16 RK-16E -16 RK-16V D Swivels Quick Coupling Division 8145 Lewis Road Minneapolis, MN 55427 www.parker.com/quickcouplings D-33

2 Phase Stepper Motor/Without Motor Brake Series LXS

Example) F9N1G2 AC servomotor Motor type A 6 6 pcs.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-M-01 3 4 5 DIN Terminal (D): 10-SYJ5 43-D-01 3 4 5 M8 connector (WO): 10-SYJ5 43-WO-01 3 4 5 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 MAX.10 75.4 50.1[57.1] 64.1 34.7 49 M8 x 1 54.6 37.1 61.2[68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 65.8 59.3 103.4[107.8] 123[127.4] 45.5 45.5 45.5 45.5 18.1 43.3 17 17 17 17 17 17 17 17 141.2 121.2 143 6 8.5 6 6 6 48.9[51.1

45

Refer to external dimensions in pages 1-6-78 to 1-6-79, and then mount it.

Electric Slide Tables

6 t o @3 @6 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

KQ2

(mm) 3.2 4 6 Mass (g) D 2 x applicable tubing Model D L Q M KQ2L23-00 KQ2L04-00 KQ2L06-00 3 6 6 9.6 10.4 12.8 17.5 18 20 4.3 4.5 5.3 15.5 16 17 3 4.2 11.4 2.5 4.2 9.0 8 KQ2L08-00 15.2 23 6 18.5 21.6 14.9 10 10 KQ2L10-00 18.5 26.5 6.8 21 35.2 25.0 17 D 12 KQ2L12-00 20.9 28.5 7.5 22 50.2 39.7 21 16 KQ2L16-00 26.5 34 10 25 100 (84) 29 8 4.2 Note 1) D: Max. diameter Note 2) ( ): Valves for soft

Electric Actuator

Mounting hole (Bearing surface thickness 5) CNP1 CNP2 130 120 CN1 CN3 CN2 6 5 5.5 LECSBm 40 6 Mounting hole 6 135 (Bearing surface thickness 4) 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 1 Battery included. 73 Incremental Type Series LECSA Absolute Type Series LECSB Specifications Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) AC Servo Motor Model Selection Specific

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

MXS

6 !7 !8 !

Air Slide Table Series MXQ

" W W My Mp Mr W W W K=1 6& & 6, . 6* , < MXH Mp W Mr W My W W MXU 6, 1 W 6& * 6* ) K=0.6 W MXS Mey Mep MXQ ; # ; ( 6* ) MXF * 6, MXW ; # 9 $ 9 $ MXJ Graph (1) Allowable Load Mass Coefficient: Table (1) Allowable Kinetic Energy: Emax (J) Table (2) Maximum Allowable Load Mass: Wmax (kg) MXP $ 5 MXY &(' 9 4 5 " '('&2 '('*+ '('.. '(&& '(&1 '(*) $ '('''('&, '('*+ '('.. '('2' '(&* 7 '('.)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

code O.D. 6 to 8 VFS Lead wire O.D.

LVQ

Size Symbol 2 2 2 3 3 4 4 5 5 6 6 A B C A B A B A B A B 2 2 3 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" LVC LVA LVH LVD With reducer Basic size LVQ Note 1) Select a fitting the same