In-line Air Filter

Characteristics ZFC11 2 ZFC12/1A 3.2, 1/8" ZFC32/3A 3.2, 1/8" 0.3 MPa 0.1 MPa 0.3 MPa 0.3 MPa 30 30 30 0.1 MPa Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.5 MPa 0.1 MPa 0.5 MPa 20 20 20 0.5 MPa 0.7 MPa 0.7 MPa 0.7 MPa 10 10 10 0 0 0 5 10 15 0 0 10 20 30 40 60 50 0 10 20 30 40 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC33/3B 4, 5/32" ZFC53/5B

0.4

Polarity SOL.a (+) () 1A 1 station SOL.b (+) () 1B 1A 2A 3A 4A 5A 6A 7A 8A 9A 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.a COM 10A 9A 8A 7A 6A 5A 4A 3A 2A 1A (+) () 2A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 2 stations SOL.b (+) () 2B SOL.a (+) () 3A 3 stations SOL.b (+) () 3B SOL.a 4A (+) () 4 stations SOL.b 4B (+) () SOL.a (+) () 5A 5 stations SOL.b 5B (+) () SOL.a 6A (+) () 6 stations SOL.b 6B

SQ1000/2000

A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B COM 10A 9A 8A 7A 6A 5A 4A 3A 2A 1A (+) () 2A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 2 SOL. B (+) () 2B SOL. A (+) () 3A Station 3 SOL. B (+) 3B () SOL. A (+) 4A () Station 4 SOL. B 4B (+) () SOL. A (+) () 5A Station 5 SOL. B (+) 5B () SOL. A (+) () 6A Station 6 SOL. B 6B (+) () SOL. A 7A (+) () Station 7 SOL. B 7B (+) () SOL. A (+) () 8A Station 8 SOL.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

VQ1 3 5 Flat cable kit Series VQ1000 VV5Q13-08JUO 1 set Manifold base part number VQ1130-5-C6 4 sets Valve part number (Stations 1 to 4) VQ1230-5B-C6 4 sets Valve part number (Stations 5 to 8) Options (with blocking valve & port plug) Type of actuation Add the "" symbol at the beginning of part numbers for solenoid valves, etc., to be mounted.

0.4

SOL.A 8A () (+) Station 8 SOL.B 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 8B () (+) 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A () (+) Station 9 SOL.B 9B () (+) SOL.A 10A () (+) Station 10 SOL.B 10B () (+) Note) When using the negative COM specification, use valves for negative COM. (+) () COM Note) Negative COM spec.

LEC-OM07605CN

250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A 5.4 1B 83 3B 20.8 5B

KR

MS-5UL 3.18, 2.18 x M5 For soft nylon tube M5 female x M5 male Body rotates at 360 around the stud axis MS-5AU-3 For polyurethane tube 3.18, 2 x M5 P . 27 Universal tee MS-5UT M5 female x M5 female x M5 male P . 27 Body rotates at 360 around the stud axis 4, 2.5 x M5 MS-5AU-4 For soft nylon and polyurethane tube Push For reducing Rc 1/8 female to M5 female R x M5 female 1 8 6, 4 x M5 MS-5B

0.4

SOL.A 1A () (+) 1B () (+) Station 1 SOL.B 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A () (+) 2B () (+) Station 2 SOL.B SOL.A 1.

Metal Seal/Rubber Seal Series VQ Body Ported

(Stations 1 to 4) VQ1230-5B-C64 sets Valve part no.

Compact 5-Port Solenoid Valve

9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A Station 2 Station 3 Station 4 Station 5 10A COM 10B Station 6 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 7 Station 8 If alignment is not specified, the internal wiring will be double wiring (connected to SOL. a and SOL. b) regardless

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

pressure (Outlet pressure) Note) Pressure switch IS1000P-2-1 Pressure switch MP2-3 Set pressure range: OFF 0.1 to 0.6 MPa Regulator with filter (3) Blanking plate MP3-2 0.08 MPa or less Differential Pressure switch Plug Lead Type Plug-in VVQ4000-24A-10 1a Contact Release valve LED (RED) Light Plug lead VVQ4000-24A-15 Caution 2 VA (AC), 2 W (DC) Max. switch capacity Filter element INA-13-854-12-5B

Air Fittings & Tubing

Weight: 12g Weight: 59g Bushing: M-5B Plug: M-5P Weight: 1.3g Weight: 5.8g Gasket: M-5G1 Gasket: M-5GH Weight: 0.04g Weight: 0.01g SM5B, #28 to #31 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to p.2.0-7 and 2.0-8 for more detailed precautions of every series.

OMS0020

0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B

5 Port Solenoid Valve

SOL.A 1A () (+) SOL.B 1B () (+) Station 1 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A () (+) SOL.B 2B () (+) Station 2 SOL.A 3A () (+) SOL.B 3B () (+) Station 3 SOL.A 4A () (+) SOL.B 4B () (+) Station 4 SOL.A 5A () (+) 10A COM SOL.B 5B () (+) Station 5 10B SOL.A 6A () (+) SOL.B 6B () (+) Station 6 SOL.A 7A

Stability of suction position,

Description Material (Surface treatment) Note XT661 1 Vacuum pad NBR, Silicone rubber, Urethane rubber, FKM, Mark-free NBR 1 Vacuum pad NBR, Silicone rubber, Urethane rubber, FKM, Mark-free NBR Pad form: Flat type with groove, Bellows type with groove 2 Plate Aluminum alloy (Clear anodized) 3 O-ring FKM 4 Shaft Stainless steel 5a Shaft ring A Stainless steel 5b Shaft ring B Stainless steel

VFR

MPa Pressure (2) switch IS1000P-2-1 0.1 to 0.6 MPa Plug-in type MP2-2 MP3-2 AXT625-18A For filter regulator For pressure switch For air release valve 0.08 MPa 1a LED (RED) Blanking plate Filter element Max. switch capacity Max. operating current Inside voltage drop Air release valve (Single only) Operating pressure range 2 VA AC, 2 W DC 24 VAC, DC or less: 50 mA 100 VAC, DC: 20 mA 111511-5B

VFS

manual drain) Filtration degree Regulator U side Air release (2) valve spacer 5 m VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Set pressure (Outlet pressure) Pressure switch(1) 0.05 to 0.85 MPa Pressure(3) switch VZS MP2-3 MP3-2 VVFS3000-24A-10 INA-13-854-12-5B

LEC-OM02904

2 7 17 7 (2) No.PB4522 [Hz] PB45 No.PB45 0 2 2 [Hz] [Hz] [Hz] 0 1 2 3 4 5 6 7 8 9 A B C D E F 40.0dB 24.1dB 18.1dB 14.5dB 12.0dB 10.1dB 00 01 02 03 2250 1125 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

1R (D side mounting) VVFS3000-24A-2R (D side mounting) IS1000P-2-1 Filter regulator Pressure switch Release valve Air filter (With auto-drain/With manual drain) Filtration degree Regulator SYJ Air release valve spacer Plug-in type 5 m (2) SZ Set pressure (Outlet pressure) Pressure switch(1) 0.05 to 0.85 MPa Pressure switch (3) MP2-3 MP3-2 VVFS3000-24A-10 INA-13-854-12-5B

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

mounting) VVFS2000-24A-2R (D side mounting) VVFS2000-24A-2L (U side mounting) (1) 5 m Air release valve spacer VP4 0.05 to 0.85 MPa S0700 (2) Pressure switch 0.1 to 0.6 MPa VQ IS1000P-2-1 Plug-in type 0.08 MPa 1a LED (RED) MP2-2 MP3-2 AXT625-18A For filter regulator For pressure switch For air release valve VQ4 Blanking plate VQ5 2 VA AC, 2 W DC Filter element 111511-5B