3 Port Solenoid Valve/

.: 6, 1/4" (With check valve) (External pilot port) (M12 connector) 2 x 1/2" [3(R) port] 67 6.5 Applicable cable O.D. 3.5 to 7 2 x 6.2 (For mounting) G1/2 Channel 2 113.5 41.5 36 94.5 77.5 Channel 1 36 21 9.5 (88.9) 16 18 (14) (Max. 10) 224.2 117.3 27.2 (70.7) A 124.8 99 View A For M12 connector 36 18 e w Vent port (6.2) 1/2" [1(P) port] 40 r Pin number (22.9) (With check valve) q 88.9 80

Line Filter

Min. operating pressure of auto drain 0.1MPa N.O. 1m Nominal filtration ratingNote1) (99% filtered particle size) Water droplet removal ratioNote2) 99% Max. air flow capacityNote3) 2200L/min(ANR) 3700L/min(ANR) Compressed air purity classNote4) ISO8573-1:2010 [4:7:4] 100cm3 Drain capacity Bowl material Stainless steel Weight 1.23kg 1.46kg Note1) Conditions in accordance with [Test method

Compact Cylinder with Air Cushion and Lock Series RLQ

Bore size (mm) 32, 40 50, 63 Stroke range (mm) 21 to 99 31 to 99 Stroke range Part number: RLQB32-47-B A special tube is manufactured for a 47 mm stroke.

EX250-SPR_eng

Setting range: 1 to 99 (10 dec.) Example: Example: 2 Address is set in network by using ET200 hand held unit or PG (programing tool). Once address is set, it is saved even if power is cut. Setting range: 1 to 125 (10 dec.) Value set on shipment: 125. CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

EX600-SPRA_eng

of occupied valve 8 outputs Number of occupied valve 16 outputs Number of occupied valve 24 outputs Number of occupied valve 32 outputs Configuration X10 2 0 9 0 0 Mark C on the unit Mark B at cable end Mark A at cable end : : Address (1) Setting of the terminal resistor X1 Content 3 4 1 2 5 0 9 1 0 8 7 : : Content 9 6 5 x10 x1 0 5 4 1 2 3 0 (default setting) Node Address 8 7 9 6 125 100 99

VVXA21/22

The right side of the common port provides plug. 17-3-99 4 The VX series will be revised shortly.

PFxx-OMS0001CN

MPa0.6 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 1.5 V (80 mA ) 3 0.05 0.1 0.5 1 2 4 0 -66No.PF-OMS0001CN-A PFMC7501 PFMC7102 PFMC7202 15 V420 mA () 1 k 5 24 V 600 12 V 300 50 6 0.4 V ()30 msec. 7 8 3/min) L/mincfm(ft 9 3 Lft -25525 L/min -501050 L/min -1002100 L/min (-44 [0]) (-99

CEx-OMI0064

UP/DOWN No. 00~99 SET SEL. UP DOWN SEL. UP/DOWN On OFF SET )On/OFF MODE , SEL. , SET RIGHT LEFT UP DOWN RIGHTLEFTUPDOWN 10N 19 - 7-3 7-3-1 -7,999,999+7,999,999, F, (+8,000,000 ,F,-8,000,000 ,-F ,,F) 6 (-999,999+999,999),6 7-3-2 , 0 , ,RS-232C BCD ,,, 7-3-3 ,14 No. 2 1 1 OFF OFF 2 OFF ON 3 ON OFF 4 ON ON 7-3-4 No.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

2-8 counter bore depth 4.4 45 0.2 50 0.2 45 0.2 48 25 56 58 6.3 5 2.1 M4 x 0.7 x 14.5l and M4 x 0.7 (hexagon bolt) (hexagon nut) 2-M5 x 0.8 (through) 1 9 2-M3 x 0.5 (through) 30 (Z) 4-M4 x 0.7 thread depth 5 (same on reverse side) 3 10 Model S ZZ Z SS CXS15-10-XB19 10 89 70 38.5 8 CXS15-15-XB19 15 94 75 25 4-M5 x 0.8 Thread depth 4.5 (piping port) (same on reverse side) CXS15-20-XB19 20 99

Modular F.R.L. Units

74 74 95 A4 43.2 57.2 57.2 75.2 A1 41.6 55.1 55.1 72.6 77.6 A2 61 76 76 99 104 A1 41.6 55.1 55.1 72.6 77.6 A2 43.2 57.2 57.2 75.2 80.2 A3 57 74 74 95 102 A1 41.6 55.1 55.1 72.6 77.6 A2 61 76 76 99 104 A3 57 74 74 95 102 A1 41.6 55.1 55.1 72.6 77.6 A2 61 76 76 99 104 A3 43.2 57.2 57.2 75.2 80.2 AC20-A AC25-A AC30-A AC40-A AC40-06-A K KS V S KV KSV SV A3 43.2 57.2 75.2 Attachment Model A2

CLA

I60 182 0 58 25. 52 11 .2 66 stroke ~ 70 208 0 71 296 65 12.5 80 305 80 226 0 72 315 65 I. 81 324 63 7 99 14 M18Xl .5 % -16 31 % 48.5 13 23 !

Compact Cylinder with Air Cushion

Bore size 20, 25 32, 40 50, 63 80, 100 Stroke range 16 to 49 21 to 99 31 to 99 41 to 99 Allowable kinetic energy Stroke range Refer to "Selection" on page 24 regardng the allowable kinetic energy. Part number: RQB32-47 A special tube is manufactured for a 47mm stroke.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 16 M12 x 1.75 Bore size [mm] K KA LZ M MM N P PG PH PL PW S Without rod boot With rod boot H ZZ e f h l ZZ 40 6 14 71 11 M14 x 1.5 27 1/4 42 11 20 45 153 51 215 43 11.2 59 1/4 stroke 223 50 7 18 80 11 M18 x 1.5 30 3/8 46 10 21 50 168 58 237 52 11.2 66 1/4 stroke 245 63 7 18 99

OMU0023

For Step Data Input Type control signal mode 0: No Step Data executed 1-15: Step Data number currently executed 20: Direct operation 99: Return to Origin position For Pulse Input Type control signal mode 0-3: Step Data number currently executed 99: Return to Origin position Binary digit (decimal value) 0 to 99 ASCII hex "00" to "63" 42 - 5.6 List of Request Functions Function of each function

15

90 4.5 9 16.5 96 18.5 37 106 42 1.5 CY1S32-Z M20 x 1.5 RJ2015HN 91 M8 x 1.25 Rc1/8 NPT1/8 G1/8 40 75 119 110 5.5 11 18.5 116 18.5 37 128 50 3 CY1S40-Z M20 x 1.5 RJ2015LN M8 x 1.25 Rc1/4 NPT1/4 G1/4 65 105 142 120 4.5 9 99 20.5 139 17.5 35 140 64 2 Note) The above figures show the product with auto switches.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 92 93 94 94 95 95 95 95 96 96 96 96 96 97 97 98 98 99 99 99 100 100 102 103 103 104 106 106 107 109 111 111 Caution . Specifications. Construction. Dimensions . Series CQSW Compact Cylinder: Standard Type Double Acting, Double Rod 12, 16, 20, 25 .

21

M26 x 1.5 Width across flats 10 length 3.5 34.5 17.5 15 17 32 12 26 13 10.5 8 34 6 8 37.4 M10 x 1.25 M26 x 1.5 Width across flats 12 length 3.5 42.5 23.5 20.5 22 41 14 32 16 13.5 8 42 8 10 46.4 M14 x 1.5 M32 x 2 Long Male Rod End P S ZZ Boss-cut Female Rod End Bore size 20 25 32 40 Bore size (mm) (mm) Bore size (mm) ZZ A1 8 H MM M4 x 0.7 ZZ 88 A 18 AL H 41 ZZ 109 Bore size 20 25 32 40 55 99

2/3 Port Valve for Various

Hz) 50 20 (32) 11 60 17 (28) 7 Model Power source AC VXP21 DC 50 40 18 60 35 12 AC VXP22 DC 50 50 21 60 45 17 AC VXP23 DC 4 5 6 7 8 9 Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99

FGX-OMZ0008

How to order 002 FGH 100 03 T Element seal aterial PTFE Nominal filtration accuracy Nominal filtration Applicable Applicable Symbol accuracy Element model Element length 002 2m Filtration Element Applicable 004 4m HEPO FGH100 Symbol efficiency length Element 300 006 6m 99% 100 L117 EJ701S 013 13m 200 L246 EJ801S,ED801S X20 0.2m Filtration FGH200 300 L496 EJ901S,ED901S efficiency Membrane

ITV2-OM00118_(PR-E)

Address setting range is 01 to 99. Setting at the time of shipment is 01. 1 9 0 9 0 1 2 2 8 8 7 3 7 3 6 4 6 4 5 5 8 - Setting the terminator Set PROFIBUS communication line terminator. With Terminator (at shipping) Without terminator Without terminator When the product is connected to the terminal of PROFIBUS communication line, be sure to set it to with terminator.