SMC Corporation of America
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The time interval for memorizing is 5 minutes. Accumulated-value hold time Outputs a value proportional to the flow rate. When the analogue output is in the range 1 to 5 V, it will vary between 1 to 5 V according to the rate of flow. The same for analogue output of 0 to 10 V or 4 to 20 mA.

5 J 3 E 0.5 10 10 K 5 Straight G 1 15 15 M 10 H 2 Straight N None S 3 J 3 T 5 Angle K 5 To use AC adapter, with transistor Input/Output specify "N", and select AC adapter with the option number.

LEM-OM00203 PRODUCT NAME Electric Actuator / Low profile slider type MODEL / Series / Product Number LEM Series Applicable models: LEMB, LEMC, LEMH, LEMHT L LE EM MB B 2 25 5/ /3 32 2 L LE EM MC C 2 25 5/ /3 32 2 ( (C Ca am m f fo ol ll lo ow we er r g gu ui id de e t ty yp pe e) ) ( (B Ba as si ic c t ty yp pe e) ) L LE EM MH H 2 25 5/ /3 32 2 L LE EM MH HT T 2 25 5/ /3 32 2

Vacuum pressure Suction flow rate 13-5-5 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS-

Centralized wiring type IISA2S-1 IISA2S-2 IISA2S-3 IISA2S-4 IISA2S-5 IISA2S-6 Individual wiring type IISA2P-1 IISA2P-2 IISA2P-3 IISA2P-4 IISA2P-5 IISA2P-6 ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 73.0 135.5 173.0 210.5 248.0 285.5 323.0 35 35 5.5 Pressure Gauge for Air Catch Sensor Round pressure gauge Square embedded pressure gauge G36 01 Connection thread GC3 4 4 AS Nil

RS-232C RS-485 5 4 1 1 Unused BUS+ 2 RD BUS 3 SD Unused 4 Unused Unused 5 SG SG 6-9 Unused Unused 9 8 7 6 3. External sensor connector (EXT.SENSOR) D-sub 15 pin (socket) Holding screw: M2.6 4 5 6 3 8 7 1 2 Pin No.

Valve / Body type 1 3 5 Solenoid valve option Refer to Table (2) shown below for availability.

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H A function to store the accumulated flow value in the products internal memory. The flow value will be stored at a set time interval of either 2 or 5 minutes.

Auto switch . 20 5Operating method or operation . 21 5-1Precautions for Design . 21 5-2. Installation . 21 5-3. Wiring example to robot controller (common to NPN/PNP) . 30 5-4.YASKAWA Plug & Play Kit . 31 5-4-1. Installing YASKAWA Plug & Play Kit . 31 5-4-2. Tool Presets . 36 5-4-3. Utility Window . 37 5-4-4. Air Gripper Integration Window . 38 5-5. Air supply . 42 5-6. Piping . 43 5-7.

.B210T 3000 S E R I E S Y30T .B310T 4000 S E R I E S Y40T .B410T 4000-06 S E R I E S Y50T .B510T 5/6000 S E R I E S Y60T .B610T D I M E N S I O N S T T Y P E B R A C K E T Spacer with T-type bracket A B C D E F G R L H Y10T 20 12 4.5 3 25 5 8 2.25 27 40 Y20T 24 15 5.5 3 30 5 10 2.75 33 40 Y30T 35 16 7 4 41 7 11 3.5 45 70 Y40T 40 22 9 4 50 7 14 4.5 50 80 Y50T 40 22 9 4 50 7 14 4.5 50 80 Y60T

10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 0.5 25 Air N2 Thermal type Argon (MEMS) CO2 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal New New type Air N2 (MEMS) 1 L/min 5 500 Bypass flow type 10 1000 PF2A 0.1 L/min 1 10 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal Air N2 type (Thermistor) 5 L/min 50 500 5 L/min 150 3000 300 6000 10 L/min 12000 600

Note 5) Bowl O-ring and other O-rings are slightly lubricated.

6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G MY2H25G MY2H40G PF 3.5 5.5 17 Z 160 210 330 X 6 7.5 9 XX 12 14 23 Y 5 5 8 VV 10.5 15.3 29 TT 12.5 19.3 35.4 U 4 5 6 UU 3 4.4 2 SS 9.7 14 21.5 R 5 5 8 RR 5.3 8.5 11 RW 40 50 53.5 QW 40 60 57 PP 5.3 8 16 Q 152 198 312 QQ 16.4 20.4 25.5 PB 40 60 70 PA 40 60 100 PC 7.2 8.2

Therefore, to operate the cylinder, make sure to use an SMC speed controller and adjust the piston speed to 500 mm/s or less. d L (mm) 25 20 32 40 Size 30 29 L 33 36 8 5 d 5 5 Retaining Ring Installation/Removal Caution 2.