HRX-OM-W002

Model number Serial number Type and quantity of refrigerant How to read the serial number A R 001 April 2022 A R 001 Year Symbol Remarks Month Symbol Remarks Serial no. 4 R Repeated from O to Z in alphabetical order, with O for January and Z for December 2022 A 2023 B 5 S Repeat ed from A to Zin alphab etical order 2024 C 6 T Fig 1-1 Position of product label HRR Series 1.4 Product Label

Rotary Table

Thin shaft Position of rotational axis: Perpendicular to the shaft through the center of gravity diameter r a 2 2 r a I = m4 I = m 12 2. Thin rectangular plate 7. Cylinder Position of rotational axis: Parallel side b and Position of rotational axis: Through the center of diameter and gravity through the center of gravity a b a r 2 3 2 2 a r + a I = m 12 I = m 12 3.

AR Series Modular Type Regulator

Outlet pressure (MPa) Set point 0.2 0.15 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 453 AR10-A to AR40-A Series Construction AR10-A AR20-A to 40-06-A t e t e q IN OUT IN OUT r r q w w Component Parts No.

Rotary Table

Cylinder Position of rotational axis: Parallel side b and Position of rotational axis: Through the center of diameter and gravity through the center of gravity a b a r 2 3 2 2 a r a I = m 12 I = m 12 3. Thin rectangular plate (Including 8.

Magnetically Coupled Rodless Cylinder

(The switch will stay ON all the time.) 1) For an auto switch without a contact protection circuit, use a contact protection box when the wire length is 5m or longer. 7. Do not use a load that generates surge voltage. If driving a load such as a relay that generates a surge voltage, use a contact protection box.

Stroke Reading Cylinder and Counter

In order to measure with a discrimination of 0.01 mm, a counter with a 4 times multiplication function (CEU5) is required.

CRQ2

gr ot ey R K Using the Body as a Flange The body's L dimensions are shown in the drawing on the right.

CL

If there is a risk of contact, provide safety measures such as a cover or a system that uses sensors that will activate an emergency stop before contact is made. 2. Use a balance circuit in which lurching of the piston is taken into consideration.

7ND9071en

Check using a feeler gauge that the clearance between the position indicator (109) and the electronics cover is 1 mm. 7 ND90 71 en 17 N O I T A C O L S U O D R A Z A H N O I T A C O L S U O D R A Z A H N O N ND9000H Valve Positioner Position Transmitter X300 Ui (Vmax) = 28 V Ii (Imax) = 120 mA Pi (Pmax) = 1 W Li = 53 uH Ci = 22 nF Ex i Barrier + 1 Uo (Voc) 28 V Io (Isc) 120 mA Po 1 W

Compact

1 t q r e A A B !6 @3 @6 @5 @4 @6 @2 @4 @5 @1 i y u C-C A-A !8 !3 B @7 !2 C w !7 C !5 !0 o Motor option: With lock !3 !1 !2 @0 !9 Component Parts Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

ZR

Bracket A AMJ Misc.

MLGP

9 qo r !3 @1 e #1 #4 @0 !8 t @3 B' CL !7 N@4 CL1 A' A A' A MLGC CNG B MNB @5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !

MLGP

9 qo r !3 @1 e #1 #4 @0 !8 t @3 B' CL !7 N@4 CL1 A' A A' A MLGC CNG B MNB @5 !5 CNA CNS 20, 25: 50 stroke or less Over 100 stroke CLS CLQ Extension locking (Type F) Retraction locking (Type B) MLGP N#2 u #6 y @2 u #6 #2 y #5 @2 i i RLQ MLU ML1C D-X Section B-B' Section B-B' 20Section A-A' !6 !6 Section A-A' Data Component Parts Description Material Note No. !7 !8 !

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

When rod end female thread is used, use a thin wrench when tightening the piston rod. 712 Series CM2R-Z 10-/1121-/2220, 25, 32, 40 Direct Mount Cylinder RoHS How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 R A 40 150 F Z M9BW 21 C D M 2 R A 40 150 F Z M9BW Mounting Number of auto switches Rod end thread A B Bottom Front Nil S n 2 pcs. 1 pc. n pcs.

Dedicated Controller

In combination with L/R keys, this key drives the actuator at high speed during a JOG operation. UP Moves downward for item selections. Also used to decrease values for data entry. DOWN Moves to the left for item selections. Also used to move a numerical value place to the left for data entry. It drives the actuator to the end side during a JOG operation.

RB/RBL/RBQ

ML2B Usable without a stopper nut The strong body can be positioned directly.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Note 1) The chart above shows the leakage test results based on a test conducted using this cylinder construction. a t e l u g c Reduced initial particulate generation e i t 3 n r a e p r a Note 2) To allow fine stroke adjustments, O-ring seals are installed to separate vacuum and atmosphere.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.