CV/MVGQ

A B C D F H HX MM NA NB ND S Z 90 [91] NN Bore size (mm) 10 8 0 0.022 10 0 0.022 15 12 14 4 8 28 35 M4 x 0.7 12.5 9.5 46 M8 x 1 91 [92] 16 15 18 20 5 8 28 41 M5 x 0.8 12.5 9.5 47 M10 x 1 10-15-7 8 Series CVJ5 Axial Foot Style (L) CVJ5L M5 x 0.8 M5 x 0.8 53.5 [54.5] 28 [34.5] M5 x 0.8 Manual override Width across flats B1 16 [17] S + Stroke Z + Stroke Mounting hole Rod End Nut H1 B1 Bore

Smooth Cylinder/Low Speed Cylinder

-X 1191 Series CM2Y Basic Style (B) CM2YB Bore size Stroke H1 H2 G G 2 x NN 2 x P (Rc, NPT, G) Width across flats B2 Width across flats B1 I 2 x Eh8 NA D Effective thread length 2 x FL Width across flats KA MM AL A F N N K NA 1.5 1.5 S + Stroke F H ZZ + Stroke Boss-cut ZZ + Stroke (mm) B1 FL K KA N NA NN P S B2 D H2 I MM ZZ E A F AL G H H1 Bore size (mm) 0 0.033 0 0.033 0 0.033 0 0.039 20

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

With rod end male thread: MQQ-DM Rod end nut H1 (mm) Bore size (mm) L1 C1 H1 X 10 23.5 10.5 M5 x 0.8 15.5 16 26.5 11.5 M6 x 1.0 16.5 C1 20 28.5 13.5 M8 x 1.25 18.5 Rod end thread adapter X 25 34.5 16.5 M10 x 1.25 22.5 L1 30 40.5 22.5 M14 x 1.5 28.5 40 40.5 22.5 M14 x 1.5 28.5 Refer to page 9 for details regarding the rod end thread adapter and the rod end nut. 5 Compact Low Friction Cylinder

CNG

Applicable bore size (mm) B1 C D d H1 Applicable bore size (mm) Part No.

1

C NA C NA D E E AL A H S + Stroke ZZ + Stroke F NA C NA C MM 4 x JA 4 x JB Female thread MM Depth A1 H ZZ + Stroke Female rod end Female Rod End [mm] [mm] Bore size A AL B1 C D E F H H1 JA JB KA MM NA Bore size A1 H MM 20 14.5 12 13 15.5 8 14 0 0.1 2 21 5 M4 x 0.7 depth 7 M4 x 0.7 depth 5.5 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x 0.7 25 17.5 15 17 16.5 10 14 0 0.1 2 24

CV/MVGQ

How to order solenoid valves/VS424-00 Voltage Electrical entry Not replaceable. 10-15-70 Valve Mounted Cylinder Double Acting, Single Rod Series CVS1 Basic Style: CVS1B Lube type (CVS1B), Non-lube type (CVS1BN) 212.4 157.8 With rod boot 28 HX 59 Width across flats KA RE A B 69.4 4-J 16.5 Width across flats B1 12 MM H1 REC 24.5 20 W E WD Connecting port A With rod boot 2-Rc 1/4 CX 34.5 AL

155

Pivoting Nozzle with Self-Align Fitting / KNK (mm) Model Nozzle diameter D Connection size L1 L2 With across flats H1 H2 H3 17 19 24 27 KNK-10-600 KNK-12-600 KNK-16-600 KNK-20-600 10 12 16 20 6 6 6 6 17 17 17 17 17 17 24 27 17 17 17 17 41.7 41.2 41.8 43.8 35 D H3 H1 H2 L1 L2 8.5 Pivoting Nozzle with Male Thread / KNK (mm) Model Nozzle diameter D Connection size L1 A With across flats H1 H2

CNG

Applicable bore size (mm) B1 C D d H1 Applicable snap ring Applicable snap ring t m Part no.

MNB

C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR D C E GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11

SI Unit for Vacuum Manifold

Hysteresis H1 Sub Size Acc ess Default (dec) Content Description index [byte] 1 2 R/W 0x0032 Vacuum confirmation hysteresis (H1) of CH0 Set vacuum confirmation hysteresis (H1) for each CH. Refer to Section 5.

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

CV/MVGQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 16 [17] S + Stroke Z + Stroke Mounting hole Rod End Nut H1 B1 Bore size (mm) 10 16 7 3.2 8 4 [ ]: Denotes the values of AC.

Smooth Cylinder

Dimensions/20 to 40 Basic/CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G Width across flats B1 I 2-Eh8 D MM AL A F F NA 1.5 1.5 N N K H S + Stroke ZZ + Stroke Boss-cut ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20

PSxx-OMF0005CN

ON (+)ON 1 OFF ()ON OFF DC(+)DC(-) 2 ON 80 mA 3 () DC(+)DC(-) NPN PNP ( ) 4 OFF () ( ) 5 () DIN 6 -24No.PS-OMF0005CN-E No. 7 / ( 8 () ) -25No.PS-OMF0005CN-E ISA2-G1 ISA2-G5 ISA2-H1 ISA2-H5 0.010.25 mm 0.030.50 mm (5 m) 30200 kPa 50200 kPa 1.5 20 50 kPa 5 10 L/min (ANR) 100 kPa 8 15 200 kPa 12 22 DC1224 V10 (p-p)10() 15 mA NPN PNP NPN PNP 1 1 1 80 mA 30 V(

Air Cylinder

H1 D 0 E0.05 I C R0.4 Width across flats B1 8 x J Width across flats NA Width across flats KA TZ ZZ + Stroke Z + Stroke With air cushion 2 x P (Rc, NPT, G) GA WA GB WB W 10 Cushion valve, Width across flats WH With rod boot 8 8 h + l IJ e JH JW f l ZZ + l + Stroke Z + l + Stroke (mm) Bore size Stroke range Rc, NPT port G port A AL B1 C CD CZ D E F H H1 I J K KA L MM NA Standard Long stroke

CV/MVGQ

AL A K F N N 71 LL S + Stroke H ZZ + Stroke ZZ + l + Stroke h + l Bore size (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 C D E F H1 I K KA LL MM N Q S J Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 30 35 35 40 40 84 90 98 116 126 The minimum stroke of the one with rod boot is

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.

5

1.75 10 26 RZQ Bore size (mm) M MM N P S WA ZZ 40 11 M14 x 1.5 27 1/4 84 18.5 146 50 11 M18 x 1.5 30 3/8 90 18.5 159 63 14 M18 x 1.5 31 3/8 98 23 170 80 17 M22 x 1.5 37 1/2 116 28.5 204 100 17 M26 x 1.5 40 1/2 126 28.5 215 Axial Foot: CA2YL G 2 x P G 2 x P MM H1 AL A H MM H1 AL A H G G 2 x Cushion valve K 2 x Cushion valve K 4 x J B1 4 x J B1 F F 4 x LD 4 x LD D D E E B C B C LY LH LY LH

Fluoropolymer Piping Equipment

Note 2) For details of the applicable tubing sizes, refer to page 945. 901 LQ1 Series Dimensions Space saving union tee reducing: LQ1T-S-R B side M2 B side M2 H2 2 x B M1 M1 H1 (E2) 2 x B H2 (L2) L2 M1 M3 M3 F F A side C side A side C side 1/4 1/4 1/4 (E1) (E3) G (E3) H1 H3 H3 G H1 L1 L3 L3 (L1) Class 2 to 5 Type T1 Type T2 Class 2 to 5 M2 B side B side M2 H2 (E2) H1 M1 2 x B 2 x B H2 (L2

S Couplers Series KK/KKH/KK13

Effective area mm2 L1 H1 Width across flats Min. bore size M H2 Width across flats 14 Body size Mass g Model L2 Applicable hose KK3P-50N 5/8 14 21.4 4.5 12.7 36.1 13.7 1/8 -60N 6/9 5.4 18.3 38.8 18.4 17 39.9 16.5 H1 H2 -65N 6.5/10 21.9 35.9 5.9 KK4P-50N 14 43.9 13.7 17 5/8 34.7 12.7 4.5 -60N 6/9 48.4 5.4 18.3 17 46.7 16.5 1/4 -65N 6.5/10 5.9 21.9 45.1 25.2 -80N 8/12 34.4 53.2 7.4 47.6 L2