Compact and Lightweight

60 75 60 Air consumption Suction flow rate 40 40 50 40 50 40 Suction flow rate Vacuum pressure 20 20 25 20 25 20 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 10 20 30 40 50 Supply pressure [MPa] 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 10 20 60 80 Supply pressure [MPa] Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] 226 Body Ported Type Vacuum Ejector ZH Series Exhaust Characteristics

Vacuum Pad

4 2 Vertical Lateral Area 75% reduced Male thread Female thread Barb fitting (Applicable tubing: 2) One-touch fitting (Applicable tubing: 2) Female thread Barb fitting (Applicable tubing: 2) One-touch fitting (Applicable tubing: 2) 2 x 7 pcs. 4 x 7 pcs.

Vacuum Pad: Ball Joint Type

D C J H I Hexagon width across flats 8 M5 x 0.8 J H F Hexagon width across flats 10 Hexagon width across flats 2 Hexagon width across flats 12 F M8 x 1.25 Y D C Hexagon width across flats 12 Hexagon width across flats 3 2 A B 3 2 A B Dimensions: 10 mm Stroke (mm) B Stroke: 10 mm A C D F H I J Y Model ZPT10F10-B5-A10 10 12 10 12.5 27 38.5 74.5 1.5 ZPT13F10-B5-A10 13 15 23 10.5 13 27.5 39 75

Safety Instructions

Fluoropolymer tubing, Series TL/TIL) Insert fitting Miniature fittings M, MS series (Hose nipple type) Fluoropolymer fitting LQ1 series MS Applicable fittings Note 2) Applications: Food, semiconductor, medical, automobile and machine tools fields LQ 20C 100C 200C 260C Recommended radius Refraction value 1.6 0.9 0.45 0.23 15 8 0.9 0.5 0.25 0.15 45 31 0.9 0.5 0.25 0.15 55 35 0.9 0.5 0.25 0.15 75

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

N.O. q IFW50--75/76 e Color of lead wire Black Symbol Contact q w Power supply (Common) w Red Terminal (Relay terminal) 24 VDC Gray e Power supply (Light terminal) N.O. N.C. q IFW50--85/86 e Color of lead wire Black Symbol Contact q w Power supply (Common) White Terminal (Relay terminal) w 24 VDC Gray e Power supply (Light terminal) N.C. N.O.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

ADM200

kW 6 sec/min (3 cycle/min) /75 to 110 kW 8 sec/min (4 cycle/min) /220 to 370 kW 4 Component Parts Replacement Parts 6 8 Part no.

Heatless Air Dryer Series ID 1

Replace the adsorbent according to color of the indicator. 1 4 1 2 1 2 3 4 520 615 850 961 45 45 75 75 9 9 9 9 120 120 170 170 95 95 95 95 59.5 59.5 88 88 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 134.5 134.5 183 183 222 222 302 302 Dew point temperature (Atmospheric pressure) 30C or less 18C 10C 5C Color of indicator ID300 ID400 ID600 Dark blue Light blue Light pink air, the capillary

CRQ2

L L 13 16 22.5 24.5 28.5 Size Screw M4 M4 M6 M8 M8 10 15 20 30 40 11-8-8 9 Series CRQ2 Compact Rotary Actuator Rack & Pinion Style Proper Auto Switch Mounting Position at Rotation End Solid state switch Reed switch Rotating angle Size Operating angle ( m) Operating angle ( m) Hysteresis angle Hysteresis angle 75 (41) A 10.5 13.5 13.5 17.5 26 32 33 41 38 47.5 B 13 22.5 18 30.5 34.5 53.5 45

Auto Switch Guide

(Including bracket, screw) Applicable bore size (mm) 40 BMU2-040 50 BMU2-040 63 BMU2-040 Cylinder series MDU 10-20-74 75 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Tie-rod Mounting Style Reed switchD-A53, D-A54, D-A56, D-A64 D-A67, D-A59W Solid state switchD-F59, D-F5P D-J59, D-J51, D-F5BAL D-F59W, D-F5PW, D-J59W D-F59F, D-F5NTL

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

PD PC Supply port 2-P FF FE EB EA D FC FA GA FG FB FD GD HA, HB GC GB C B A 87 117 105 135 165 125 155 185 215 270 250 310 Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 59 79 72 92 112 86.5 106.5 126.5 144 184 165 205 28 38 33 43 53 38.5 48.5 58.5 71 91 85 105 6 (Effective depth 2.5) 19 20 30 28 38 48 32 42 52 55 75 64 84 16

RB/RBL/RBQ

165 410 75 It denotes the values at the maximum energy absorption per one cycle.

RSQ

16 Round bar, Chamfered, Roller 0.15 0.14 Mounting bolt 20 Double acting Single acting, Spring extend Round bar, Chamfered, Roller 0.24 0.25 0.23 Round bar, Chamfered, Roller 0.44 0.46 0.42 32 RE A B C D Lever with built-in shock absorber 0.53 0.55 0.51 (mm) Round bar, Chamfered, Roller 0.74 0.80 0.86 Double acting with spring loaded REC 40 Model C 5 D 40 48 53 55 60 65 60 65 70 75

Size: 75 [300scfm, 510m³/hr (ANR)], Voltage: Three-phase, 460VAC, 60Hz, Connection Port Thread: Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube, Option: L+T

Size: 75 [300scfm, 510m³/hr (ANR)], Voltage: Three-phase, 460VAC, 60Hz, Connection Port Thread: Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube, Option: R+T

Size: 75 [300scfm, 510m³/hr (ANR)], Voltage: Three-phase, 460VAC, 60Hz, Connection Port Thread: Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube, Option: L+R

Size: 75 [300scfm, 510m³/hr (ANR)], Voltage: Three-phase, 460VAC, 60Hz, Connection Port Thread: Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube, Option: T+V

Size: 75 [300scfm, 510m³/hr (ANR)], Voltage: Three-phase, 460VAC, 60Hz, Connection Port Thread: Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube, Option: R+T+V

Size: 75 [300scfm, 510m³/hr (ANR)], Voltage: Three-phase, 460VAC, 60Hz, Connection Port Thread: Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube, Option: L+R+T

Bore Size: 40 (1 1/2"), Stroke, Inch: 75, Stroke, Hundredths of an Inch: 75