Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 411, 18.74000 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 18.74000 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 411, 19.66800 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 19.90000 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 411, 20.13200 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 411, 12.65000 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 21.06000 lb

Double acting, single rod cylinder w/lock , Mounting: basic, axial foot, rod flange, head flange, single clevis, double clevis, center trunnion , Bore sizes (mm): 40, 50, 63, 80, 100 , Strokes up to 1500mm (depending on bore size & mounting) , Auto switch capable, Fine Lock Cylinder, TIE ROD CYLINDER W/LOCK, 409, 22.22000 lb

High Vacuum L Type Valve

J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Grounding should be to a D-class ground. (Ground resistance of 100 or less.) -13- 3. Grounding should be performed near the actuator to shorten the grounding distance. 4. The cross-sectional area of this wire shall be a minimum of 2 mm2. 5. Avoid common grounding with other devices.

HEC-OM-U015

D Level gauge K Circulating fluid OUT Set the Communication protocol.

ALF400 to 900, ALT-5/-9

AV AU AF AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ALF500/600 IR Port size D VEX AMR ITV IC Model Port size VBA C D A B , 1 4 3 8 1 2 , ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 80 85 90 100 100 100 238.5 246.5 295.5 319.5 338.5 344.5 44 46 48 51 59 63

Rotary Table: High Precision Type Vane Style Series MSUA Size: 1, 3, 7, 20 How to Order Connection port location Side ported Nil Bearing type Axial ported E High precision type A Available with side ported Free mount type only, when equipped with auto s

V 5 V, 12 V, 24 V, 100 V Heavy-duty cord Reed switch Parallel cord 100 V Heavy-duty cord 3-wire (NPN) 5 V, 12 V IC circuit Solid state switch Grommet 3-wire (PNP) 12 V MDSUA7 Relay, Connector Grommet Connector Grommet Connector Heavy-duty cord 2-wire 24 V MDSUA20 100 V PLC Reed switch 100 V IC circuit 48 V, 100 V 24 V or less Order example: MSUA20 single vane type (connection port side location

ALF400 to 900, ALT-5/-9

AV AU AF AR ALF500/600 IR Port size D VEX AMR ITV IC Model Port size VBA C D A B , 1 4 3 8 1 2 , ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 80 85 90 100 100 100 238.5 246.5 295.5 319.5 338.5 344.5 44 46 48 51 59 63 VE 3 4 1 3 4, 1 1 1 1 4 1 2 , 2 VY1 G Dimensions: Auto Feed Tank PPA AL Float switch Contact point capacity: AC: 15 VA, DC: 15 W Contact point construction: 1a, 1b Width across

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

High Vacuum L Type Valve

J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2

IN20267

TYPE Class Instance Attribute Size Description Output 100 100 3 1 INT Position set-point Input 150 150 3 2 INT 2 bytes measured position, 2 bytes diagnostics Figure 16-1 Explicit Messaging 41 - IN20267 Installation and Handling 17. Air supply 17.1. Use clean air.

AMF

198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series

PF-OMN0011_C

[F 2] OUT2 -37No.PF-OMN0011CN-C d. ([ tP]) 4. [F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.

XLDV Series

M5 A 3(R) EXE H A mm Model A B C D E Fn Fd G H XLDV25 50 123 48 41.5 7.5 40 26 38.5 XLDV40 65 170 66 53.5 15.0 55 41 48.5 XLDV50 70 183 79 57.5 17.5 75 52 55.0 XLDV63 88 217 100 72.2 20.0 87 95 70 66.5 XLDV80 90 256 117 82.6 26.5 114 110 83 75.0 XLDV100 108 321 154 95.2 38.0 134 130 102 93.5 XLDV160 138 335 200 101.2 40.0 190 180 153 116.5 10 XL-OMM0005-A 6 Period and Scope of Warranty The