XMA/XYA Series

Specifications Model Note 1 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 Flange (valve) size 16,CF034 25 40,CF070 50 63,CF114 80 Actuating type Normally closed (Pressurize to open , spring seal) Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance

OMR0031

A master PLC can communicate with up to 16 devices via the RS485 serial interface. (20) Configuration of Step Data The Step Data values can be configured.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

25.3 8 15.2 23 13.4 34.7 AS221F-N01-07SD AS221F-01-10SD 1/4" 13.2 23.9 31 17 21 10 18.5 44.5 35.3 25 23 15.3 AS221F-N01-09SD AS221F-02-04SD 15.2 25.3 32.4 18.5 5/16" 16 4 10.4 25 34.4 25.2 40 AS221F-N02-03SD AS221F-02-06SD 5/32" 10.4 25.2 34.4 16 17 6 12.8 17.7 R 1/4 17 18.5 7.2 1.2 34.7 40 40.2 AS221F-N02-05SD AS221F-02-08SD 3/16" 12.8 25.2 34.5 16.5 36.4 18.5 27.2 8 15.2 42 17.7 AS221F-N02

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

Electric Actuator Miniature Rod Type Miniature Slide table Type

AREA output signal is turned on from Area 1:16[mm] between Area 2:18[mm].

SI unit for EtherNet/IP TM

/32 EX260-SEN3/-SEN4: 16/16 1: The product for "Device Revision 2.2" manufactured in June 2016 or later supports this specification version.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series. 9. Wire the microswitch according to the symbols on the upper insulators. (They will be opposite the terminal symbols on the microswitch. The terminals are screw terminals.) 10.

MRQB-OM0002

L 5 4.4 [mm] L M 32 40 9 M6 4.3 16 4-3. A 4.4 4.4 5 B C E A D F 4.5 32 5.7 40 4.8 4-4. 4.5 4.6 (POSI LOCK) ISEL(MECHALOCK) NBK(Clamp Lock) 32 PSL-K-12 MA-12-26 CLH-1218 40 PSL-K-14 MA-14-28 CLH-1423 17 4-5. 4.6 4-6. 4.74.7 2 4.7 32 Rc1/8 Rc1/8 M50.8 40 Rc1/8 Rc1/8 M50.8 4.7 , A) , , , B) , ,1.52 18 5. 5. 5. 5. ,, 5-1.

XMH/XYH Series

Specifications Table 4 Model Note 1 XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures ,

Trimmer Auto Switch

Series 10 12 16 20 25 32 40 50 63 80 100 MGP 3.5 5.0 4.5 4.5 5.5 5.5 5.5 5.5 5.5 6.0 MGZ 5.5 6.5 6.5 CA2 4.0 4.0 6.0 6.0 6.0 Sensor unit: D-F7K Air cylinder Unit: mm Tube I.D.

ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

Bore size (Stroke (mm)) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Applicable Auto Switches/Refer to Best Pneumatics No. 3 for further information on auto switches.

39

port Nil TN 90 G 105 NPT 120 135 A015 C S CKZT Clamp Arm 40 Mounting hole Bore size 40 80 Equivalent Power clamp cylinder European type D1 H D2 D1 D2 H symbol S B 6 7 16 6 9 25 8 20 8 10.2 10.2 25 Bore size Only S type is available for A015 of 40. 40 80 40 Arm mounting position 80 Equivalent Right D1 D2 Offset H R A015 A045 Offset 15 Offset 45 Center D1 D2 C H Left D1 D2 L H Cylinder Specifications

Modular Type Air Filters Series AF

14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

parts 16 Mounting and Installation 17 Wiring 17 Setting and Adjustment 18 LED Display 22 Specification 25 Specifications 25 Dimensions 26 End Plate Model Indication and How to Order 27 Summary of Product parts 28 Mounting and Installation 30 Wiring 30 Specification 32 Specifications 32 Dimensions 33 IO-Link Master Unit Model Indication and How to Order 40 Summary of Product parts 40 Mounting

PSE530/200

Refer to Connecting to other series on page 16-3-21.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

6 12.9 33 17 39.9 34.9 34.4 29.4 18.5 (17.5) AS231F-02-08 AS231F-01-09 18.5 12.9 16.2 21 15.2 30.9 28.2 40.8 35.2 45.1 18.5 5/16" 28.2 18.3 15.2 8 36 12.9 AS231F-02-10 AS231F-02-03 32 10.9 30.6 16 16.2 21.9 39.6 10.4 38.7 47.9 21 5/32" 31 20.2 18.5 10 40 1/4 AS331F-02-06 AS231F-02-05 33 10.9 31.1 16.5 23.9 16.2 42.1 11.6 38.5 46.5 17 3/16" 25.2 12.8 6 20.6 12.9 60 17 AS331F-02-08 AS231F-

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

ZHP ZHP Male thread 5/16-18UNC F 3/8-16UNC G Female thread 5/16-18UNC H 3/8-16UNC ZU VQD-V Ejector Specifications Recommended Work Load [N] ZHP-07l ZHP-10ZHP-12ZHP-15 Nozzle nominal size [mm] 0.7 1.0 1.2 1.5 ZHP63 ZHP80 Horizontal lifting 66 106 Vertical lifting 33 53 Max. suction flow rate [L/min (ANR)] 30 51 62 77 Air consumption [L/min (ANR)] 24 40 58 87 Use this product with the recommended

RSH

10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Load speed : u (m/min) m=0 Load speed : u (m/min) m=0.1 4.3-4 Heavy Duty

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

c

Operating temperature (oC) 1 Fluoropolymer Tubing (PFA) Inch Size Series TILM RoHS Series Inch size Size Model Tubing size inch mm inch mm TILM01 1/8" x 0.086" 1/8" TILMB01 1/8" x 1/16" 1/8" TILM05 3/16" x 1/8" 3/16" 4.75 1/8" 3.15 TILM07 1/4" x 5/32" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85