Main Line Filter

OPERATING PRESSURE 0.05MPa (With auto drain : 0.1MPa) AMBIENT TEMPERATURE 5 to 60 FLUID TEMPERATURE 5 to 60 FLOW RATE (m3/min) 12.4 23.7 30 45 CAPACITY (m3) 0.023 0.023 0.038 0.054 WEIGHT (kg) 50 50 72 88 3m (FILTRATION EFFICIENCY 99) for FILTRATION RATING Symbol Nil FILTRATION RATING 0.3m (FILTRATION EFFICIENCY 99) for FILTRATION RATING Symbol X13 ELEMENT LIFE One year or when pressure

VXD21/22/23

Model Power source Frequency (Hz) 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 AC VXD21 DC AC VXD22 DC AC VXD23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil (3) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D, N) 99(4) 100(4) AC

Multistage Ejector Series ZL112/212 1

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com With unit switching function (1) Nil With vacuum pressure gauge Exhaust specifications SI unit only (2) M Note 1) W/ unit switching function is not permitted to sell for the domestic use in japan, because the new Weight and Measure Act has been implemented since October ,99

Multistage Ejector Series ZL112.212

Rc1/2 G1/2(3) Nil F N T 1/2-14 NPT 1/2-14 NPTF P Note 1) W/ unit switching function is not permitted to sell for the domestic use in Japan, because the new Weight and Measure Act has been implemented since October ,99.

3 Port Air Operated Valve Series SYJA300

Applicable cable O.D. 3.5 to 7 Station n L1 L2 3 80 68 Station 20 403 391 6 137 125 8 175 163 10 213 201 Station 2 61 49 4 99 87 5 118 106 7 156 144 9 194 182 11 232 220 12 251 239 13 270 258 14 289 277 15 308 296 16 327 315 17 346 334 18 365 353 19 384 372 4-4-46 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ700 Type 40 Manifold: Bottom Ported/SS3YJ7-40Stations -01 [ ] for

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A + Stroke MGQM (Slide bearing) A, E Dimensions MGQL (Ball bushing bearing) A, E Dimensions A E A E Bore size (mm) Bore size (mm) 11 to 99 st 0 11 to 99 st 11 to 39 st 4 41 to 99 st 16 11 to 39 st 55 41 to 99 st 12 16

Refrigerated Air Dryer

AM Select accessories sold separately. 6 Refer to page 99.

Non-contact Gripper

. * Air purification rating: JIS B 8392-1 (ISO8573-1) Quality Degree 4, 4, 2 or more Bernoulli type XT661 X321 4C Outer body diameter: 4C 39 mm 6C 59 mm 8C 79 mm 10C 99 mm 4C 6C 8C 10C 120E 150E Bernoulli type Outer body diameter (mm) 39 59 79 99 l120 l150 Piping port size M5 x 0.8 Rc 1/8 XT661 X322 120E Fluid Air* Operating pressure 0.01 to 0.4 MPa Body size: l Proof pressure 0.6 MPa Ambient

VXP21/22/23

Hz) 50 20 (32) 11 60 17 (28) 7 Model Power source AC VXP21 DC 50 40 18 60 35 12 AC VXP22 DC 50 50 21 60 45 17 AC VXP23 DC 4 5 6 7 8 9 Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99

Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing)

With shock absorber (mm) With bumper bolt (mm) (mm) (NC) Y: Minimum (NA) X: Minimum necessary space necessary space 6 19 44 11 32 10 28 58 10.5 34 15 28 58 10.5 34 20 28 63 10.5 39 25 49 89 12.5 41 32 52 99 11.5 43 40 51 99 10.5 43 Note) The dimensions above show the minimum necessary space for the replacement of the shock absorber and bumper bolt. (Full length of the stopper + 10mm) 2.

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

Compressed Air Cleaning Filter Series

Through the adoption of an element that is exclusively used for removing water droplets and the ample housing interior space, a 99% water removal rate has been achieved.

3 Port Solenoid Valve/

.: 6, 1/4" (With check valve) (External pilot port) (M12 connector) 2 x 1/2" [3(R) port] 67 6.5 Applicable cable O.D. 3.5 to 7 2 x 6.2 (For mounting) G1/2 Channel 2 113.5 41.5 36 94.5 77.5 Channel 1 36 21 9.5 (88.9) 16 18 (14) (Max. 10) 224.2 117.3 27.2 (70.7) A 124.8 99 View A For M12 connector 36 18 e w Vent port (6.2) 1/2" [1(P) port] 40 r Pin number (22.9) (With check valve) q 88.9 80

3 Port Air Operated Valve

N.O. 40 12 NC 51.5 115.1 107.1 107.1 115.1 86 24 1P 51.5 NO 12 1/2 1(P) port 1/8 12(PA) port (Pitch) P = 41 8 37 M5 x 0.8 (Breathing hole) L1 L2 (Station n) (Station 1) 1/8 12(PA) port 12 127 94.5 78.2 2A 2A 63 19 1/2 2(A) port (Pitch) P = 41 37 2 stations 115 99 156 140 197 181 238 222 279 263 320 304 361 345 402 386 443 427 484 468 525 509 566 550 607 591 648 632 689 673 730 714 771 755

PFxx-OMP0001CN

5F.S.(00.8 MPa0.6 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 2 V (80 mA ) 4 0.05 0.1 0.5 1 2 5 0 -62No.PF-OMP0001CN-F PFMB7501 PFMB7102 PFMB7202 15 V420 mA () 1 k 6 24 V 600 12 V 300 7 0.4 V ()30 msec. 8 9 L/mincfm 10 3 Lft -25525 L/min -501050 L/min -1002100 L/min (-44 [ 0]) (-99

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

state switch D-M9B, D-M9N Reed switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99

Table of Contents

End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 Product name Model Model Page End of July '94 End of July '94 End of

VS 8-2/VS 8-4

RD SD LRUN PW B RATE 6.5 112 99 80 x1 x10 STATION NO.

Pilot Operated

98.5 99 198.5 (205.5) 112.5 105 104.5 105 ( ) denotes the value for N.O. 12 Series VXD21/22/23 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

3 Port Solenoid Valve/

.: 6, 1/4" (With check valve) (External pilot port) (M12 connector) 2 x 1/2" [3(R) port] 67 6.5 Applicable cable O.D. 3.5 to 7 2 x 6.2 (For mounting) G1/2 Channel 2 113.5 41.5 36 94.5 77.5 Channel 1 36 21 9.5 (88.9) 16 18 (14) (Max. 10) 224.2 117.3 27.2 (70.7) A 124.8 99 View A For M12 connector 36 18 e w Vent port (6.2) 1/2" [1(P) port] 40 r Pin number (22.9) (With check valve) q 88.9 80