Non-contact Gripper

. * Air purification rating: JIS B 8392-1 (ISO8573-1) Quality Degree 4, 4, 2 or more Bernoulli type XT661 X321 4C Outer body diameter: 4C 39 mm 6C 59 mm 8C 79 mm 10C 99 mm 4C 6C 8C 10C 120E 150E Bernoulli type Outer body diameter (mm) 39 59 79 99 l120 l150 Piping port size M5 x 0.8 Rc 1/8 XT661 X322 120E Fluid Air* Operating pressure 0.01 to 0.4 MPa Body size: l Proof pressure 0.6 MPa Ambient

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

VXP21/22/23

Hz) 50 20 (32) 11 60 17 (28) 7 Model Power source AC VXP21 DC 50 40 18 60 35 12 AC VXP22 DC 50 50 21 60 45 17 AC VXP23 DC 4 5 6 7 8 9 Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99

Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing)

With shock absorber (mm) With bumper bolt (mm) (mm) (NC) Y: Minimum (NA) X: Minimum necessary space necessary space 6 19 44 11 32 10 28 58 10.5 34 15 28 58 10.5 34 20 28 63 10.5 39 25 49 89 12.5 41 32 52 99 11.5 43 40 51 99 10.5 43 Note) The dimensions above show the minimum necessary space for the replacement of the shock absorber and bumper bolt. (Full length of the stopper + 10mm) 2.

Compressed Air Cleaning Filter Series

Through the adoption of an element that is exclusively used for removing water droplets and the ample housing interior space, a 99% water removal rate has been achieved.

3 Port Solenoid Valve/

.: 6, 1/4" (With check valve) (External pilot port) (M12 connector) 2 x 1/2" [3(R) port] 67 6.5 Applicable cable O.D. 3.5 to 7 2 x 6.2 (For mounting) G1/2 Channel 2 113.5 41.5 36 94.5 77.5 Channel 1 36 21 9.5 (88.9) 16 18 (14) (Max. 10) 224.2 117.3 27.2 (70.7) A 124.8 99 View A For M12 connector 36 18 e w Vent port (6.2) 1/2" [1(P) port] 40 r Pin number (22.9) (With check valve) q 88.9 80

3 Port Air Operated Valve

N.O. 40 12 NC 51.5 115.1 107.1 107.1 115.1 86 24 1P 51.5 NO 12 1/2 1(P) port 1/8 12(PA) port (Pitch) P = 41 8 37 M5 x 0.8 (Breathing hole) L1 L2 (Station n) (Station 1) 1/8 12(PA) port 12 127 94.5 78.2 2A 2A 63 19 1/2 2(A) port (Pitch) P = 41 37 2 stations 115 99 156 140 197 181 238 222 279 263 320 304 361 345 402 386 443 427 484 468 525 509 566 550 607 591 648 632 689 673 730 714 771 755

PFxx-OMP0001CN

5F.S.(00.8 MPa0.6 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 2 V (80 mA ) 4 0.05 0.1 0.5 1 2 5 0 -62No.PF-OMP0001CN-F PFMB7501 PFMB7102 PFMB7202 15 V420 mA () 1 k 6 24 V 600 12 V 300 7 0.4 V ()30 msec. 8 9 L/mincfm 10 3 Lft -25525 L/min -501050 L/min -1002100 L/min (-44 [ 0]) (-99

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

state switch D-M9B, D-M9N Reed switch D-A93 (mm) (mm) Stroke (mm) 20 41 29 47 35 Stroke (mm) 20 45 25 51 31 Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99

Table of Contents

End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 End of March '99 Product name Model Model Page End of July '94 End of July '94 End of

VS 8-2/VS 8-4

RD SD LRUN PW B RATE 6.5 112 99 80 x1 x10 STATION NO.

Pilot Operated

98.5 99 198.5 (205.5) 112.5 105 104.5 105 ( ) denotes the value for N.O. 12 Series VXD21/22/23 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

3 Port Solenoid Valve/

.: 6, 1/4" (With check valve) (External pilot port) (M12 connector) 2 x 1/2" [3(R) port] 67 6.5 Applicable cable O.D. 3.5 to 7 2 x 6.2 (For mounting) G1/2 Channel 2 113.5 41.5 36 94.5 77.5 Channel 1 36 21 9.5 (88.9) 16 18 (14) (Max. 10) 224.2 117.3 27.2 (70.7) A 124.8 99 View A For M12 connector 36 18 e w Vent port (6.2) 1/2" [1(P) port] 40 r Pin number (22.9) (With check valve) q 88.9 80

Line Filter

Min. operating pressure of auto drain 0.1MPa N.O. 1m Nominal filtration ratingNote1) (99% filtered particle size) Water droplet removal ratioNote2) 99% Max. air flow capacityNote3) 2200L/min(ANR) 3700L/min(ANR) Compressed air purity classNote4) ISO8573-1:2010 [4:7:4] 100cm3 Drain capacity Bowl material Stainless steel Weight 1.23kg 1.46kg Note1) Conditions in accordance with [Test method

Compact Cylinder with Air Cushion and Lock Series RLQ

Bore size (mm) 32, 40 50, 63 Stroke range (mm) 21 to 99 31 to 99 Stroke range Part number: RLQB32-47-B A special tube is manufactured for a 47 mm stroke.

EX250-SPR_eng

Setting range: 1 to 99 (10 dec.) Example: Example: 2 Address is set in network by using ET200 hand held unit or PG (programing tool). Once address is set, it is saved even if power is cut. Setting range: 1 to 125 (10 dec.) Value set on shipment: 125. CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

EX600-SPRA_eng

of occupied valve 8 outputs Number of occupied valve 16 outputs Number of occupied valve 24 outputs Number of occupied valve 32 outputs Configuration X10 2 0 9 0 0 Mark C on the unit Mark B at cable end Mark A at cable end : : Address (1) Setting of the terminal resistor X1 Content 3 4 1 2 5 0 9 1 0 8 7 : : Content 9 6 5 x10 x1 0 5 4 1 2 3 0 (default setting) Node Address 8 7 9 6 125 100 99

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

2-8 counter bore depth 4.4 45 0.2 50 0.2 45 0.2 48 25 56 58 6.3 5 2.1 M4 x 0.7 x 14.5l and M4 x 0.7 (hexagon bolt) (hexagon nut) 2-M5 x 0.8 (through) 1 9 2-M3 x 0.5 (through) 30 (Z) 4-M4 x 0.7 thread depth 5 (same on reverse side) 3 10 Model S ZZ Z SS CXS15-10-XB19 10 89 70 38.5 8 CXS15-15-XB19 15 94 75 25 4-M5 x 0.8 Thread depth 4.5 (piping port) (same on reverse side) CXS15-20-XB19 20 99

VVXA21/22

The right side of the common port provides plug. 17-3-99 4 The VX series will be revised shortly.

PFxx-OMS0001CN

MPa0.6 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 1.5 V (80 mA ) 3 0.05 0.1 0.5 1 2 4 0 -66No.PF-OMS0001CN-A PFMC7501 PFMC7102 PFMC7202 15 V420 mA () 1 k 5 24 V 600 12 V 300 50 6 0.4 V ()30 msec. 7 8 3/min) L/mincfm(ft 9 3 Lft -25525 L/min -501050 L/min -1002100 L/min (-44 [0]) (-99