Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

-S Cm402 450 490 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm502 450 490 7.1 3.15 0.44 0.88 0.76 0.88 0.2 JSX31-S Cm702 450 490 30 3/8 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm403 450 520 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm503 450 520 7.1 3.15 0.44 0.88 0.76 0.88 0.2 JSX31-S Cm703 450 520 *1 The flow rate characteristics of this product vary. *2 The values were calculated based

High Vacuum L Type Valve

XLFV16A-30-1-2M9NA-5GS-XN1 Note 4) Bonnet assembly contains the valve seal 1, valve seal 2, and nut assembly. It does not contain external seal. Order separately if it is required.