in X, Y, Z directions, 2 hours each 490m/s in X, Y, Z directions, 3 times each 290g (without lead wire) 250g (without lead wire) Equivalent to IP65 3/8 1/2 1/8, 1/4 Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min or l).]
AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12
AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12
60 30 2] 1000 [mm/s [mm/s] 48 10 5 20 12 6 2] 1000 [mm/s [mm] 5 1 LEFS 32H 32A 32B 40H 40A 40B [mm/s] 30 2] 1000 [mm/s [mm/s] 24 16 8 30 20 10 2] 1000 [mm/s [mm] 1 LEF 7 LED f 50 No.JXC-OMU0004-A LEFB LEFB16 LEFB25 LEFB32 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 48 200 48 200 48 200 1 60 300 60 300 60 300 2 70 400 70 400 70 400 3 80 500 80 500 80 500 4 100 600 100 600 100
The port at a right angle to them is 3(R) port (EXH). Be sure to comfirm before connecting since erroneous connection will cause malfunction. 2. When the valve is exposed to a large amount of dust and debris, install a silencer on 3(R) port (EXH) to protect the valve. Otherwise, dust will ingress from 3(R) port and cause air leakage.
(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.
(mm) Note) Type 04 06 08 10 12 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Made to Order (For details, refer to page 659.) Control type Note) For applicable tubing O.D. selection, refer to the Model.
1% F .S. or less Repeatability 0.4 4% F .S.
Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0
Speed 000 Absolute 000 100mm/s 001 Relative 001 200mm/s ESC keySET key ESC keySET key AX IS. Step 1 Step 1 No. Move mode No. Speed 000 Absolute 000 100mm/s () 001 Relative 001 200mm/s b) SET AX IS. AX IS. Step 1 Step 1 No. Move mode No. Speed 000 Absolute SET 000 300mm/s SET 001 Relative 001 200mm/s 58 - (3-2) TB Ver.511 Step data Step No.
Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -
Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -
Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -
Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -
Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -
Size: M5, Reverse Flow Function: Standard, Thread: M Thread, Rc(PT), Port Size: M5, Accessory 1: None, Accessory 2: None, Option 1: None, Option 2: None, Option 3: Flow Direction: Right->Left
Set Pressure: 0.005MPa~0.2MPa, Port Size: M5X0.8, Gauge Port Direction: Right
Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread