EXxx-OML0010CN

a) b) -34No.EX-OML0010CN-C 3. (23 ) ((3640 )) -35No.EX-OML0010CN-C No. () 1 (D_Format) 2 (Undr_Rng) *SI -36No.EX-OML0010CN-C No. () 3 (Over_Rng) (SC_MonOp) (SC_MonSs) 4 Op Ss *SI -37No.EX-OML0010CN-C No. () 5 (SC_RstOp) () (PWRC_Mon) 6 *SI -38No.EX-OML0010CN-C No. () () (PWRO_Mon) 7 8 (Inrush) *SI -39No.EX-OML0010CN-C No. () 9 (Filter_T) 10 (SigExt_T) *SI -40No.EX-OML0010CN-C

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Direct Operated 3 Port Solenoid Valve

Drain or garbage invaded a valve. 7.

Digital Pressure Switch

[February 2020] C: Contents are added. [February 2021] D: Contents revised in several places.

Refrigerated Air Dryer

(C) 32 Ambient temperature (C) 10 Outlet air pressure dew point (C) Compressed air Working fluid 5 to 80 Inlet air pressure (C) 0.15 to 1.0 Inlet air temperature (MPa) 2 to 40 (Relative humidity of 85% or less) Ambient temperature (humidity) (C) Note 3) Power supply voltage (frequency) Single phase: 100 VAC (50 Hz), 100 to 110 VAC (60 Hz) Single phase: 200 VAC (50 Hz), 200 to 220 VAC (60

Miniature Tubing & Miniature Fittings

(mm) Thread Weight g H A B C E F D G I J Model M3 x 0.5 M5 x 0.8 M-3ALU-2 M-5ALHU-2 5 7 9 11 6.5 7.5 2.5 3.5 9.4 13.5 5 7 1.6 3.5 0.9 2.5 3 4 4 2 x 1 .2 Parts list Width across flats H Applicable tubing 4 3 2 1 Material Brass Brass Brass No. 1 2 3 4 Description Sleeve Stud Barb elbow Gasket Note Electroless nickel plated Electroless nickel plated Electroless nickel plated NBR, Stainless

Miniature Tubing & Miniature Fittings Series TU/M

(mm) Thread Weight g H A B C E F D G I J Model M3 x 0.5 M5 x 0.8 M-3ALU-2 M-5ALHU-2 5 7 9 11 6.5 7.5 2.5 3.5 9.4 13.5 5 7 1.6 3.5 0.9 2.5 3 4 4 2 x 1 .2 Parts list Width across flats H Applicable tubing 4 3 2 1 Material Brass Brass Brass No. 1 2 3 4 Description Sleeve Stud Barb elbow Gasket Note Electroless nickel plated Electroless nickel plated Electroless nickel plated NBR, Stainless

Digital Flow Switch (Remote type monitor unit)

Normal condition (NOR): Flow measurement reference condition 101.3 kPa, 0 C.

High Vacuum L Type Valve

Mount the needle seat or S valve seal assembly. 15 XL*-OMI0011-E Step 6 Step 7 Tightening torque of bolt C Nm Bolt C O ring Model Tightening S valve seal Ass'y or Needle seat torque XLD-25 0.360.1 Other than XLD-25 0.630.1 Mounting surface of O ring Body Pilot port S Apply 0.3MPa of air pressure to the pilot port S.

1.63

C dimension (Body length): 84 mm Example MGPW MGPW MGQ Theoretical Output MGG OUT IN Made to Order: Individual Specifications (For details, refer to page 517.)

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide

IDUS/IDFS

(C) Outlet air press. dew point (C) Ambient temp.

Large Bore Compact Cylinder Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2B18010DC C (D) Q2B20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2B18020DC C (D) Q2B20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2B18030DC C (D) Q2B20030DC M18 x 155 l M18 x 165 l 36 155 39 165 C (D) Q2B18040DC C (D) Q2B20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2B18050DC C (D) Q2B20050DC

LV50-OMQ0002

C : Contents revised in several places. D : Contents are added. E : Contents revised in several places. F : Contents revised in several places.

CE

CE1 Series/ 1. / 1 1.5 *3) *3)1 1 () 1. 2. 3. a. b. c. 4. a. b. c. 6. 1. 7. a.060 b.2585%RH c. d. e. 8. ,, f. g.( 9. ) h. i. j. k. l. 2. 1. 2. 1. 3 2. 1. 3. 4. 1. 12:0.071.0MPa 2063:0.051.0MPa :060 5. 2. 1. 5m 1. 2. 2. 3.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

C D E F Dimensions Part no.

3 Port Air Operated Valve

Doc. no.VT315-OMH0004-C PRODUCT NAME 3 Port Air Operated Valve MODEL / Series / Product Number VTA/VOA315 Series Contents Safety Instructions -2,3 Design/Selection -4 Mounting -4 Piping -4,5 Lubrication -5 Air Supply -5 Operating Environment -6 Maintenance -6 Specific Product Precautions -7 Troubleshooting -8 1 No.VT315-OMH0004-C Safety Instructions These safety instructions are intended

HAW

Seal 7 Non-asbestos Seal 42047#1 (1 pc.) 8 Note) Consult with SMC when replacing parts since special tools are required for replacement. 17 Series HAW Dimensions HAW2/7 E F 2 x V Rc 2 x Y Rc Air outlet Air inlet Cooling water outlet Q 87 G K J H Cooling water inlet S L T 2 x 2 x U D W Rc N (M) Drain B C A HAW22 to 110 Air outlet Air inlet F E HAW110-30 P 2 x Y Rc 2 x V Screw-in (Z) (L) (ZA

CKZ2N

A B C D E F G H I J L M Part no.

High Vacuum L Type Valve

) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20