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Seal kits consist of items 19 through 21, and can be ordered by using the seal kit number corresponding to each bore size. 13 Series CXS Construction: Ball Bushing Bearing CXSL6 CXSL10 CXSL15 CXSL20 to 32 Parts list Parts list: Standard piping Description Material Synthetic resin Note 2) Note No. 18 19 20 21 22 23 24 25 26 27 28 29 Description Material Aluminum alloy Special steel Special

/min O N () 5 0r/min No.PC17 0 r/min No.PC17 O N 5 0r/min 20r/min ( OFF 70r/min OFF ON (ZSP) 50r/minZSPON 70r/minZSPOFF50r/minZSP ON70r/minZSPOFF ZSPON 20r/min CDPS CDPSON . 4.5.2 (I/O)4.8.2 I/O A () LA CN6-11 CN6-24 PA15 CCWBA/2 ABPC19 DO-2 LAR B () LB CN6-12 CN6-25 LBR Z () LZ CN6-13 CN6-26 11 ON() 400s 100r/min DO-2 LZR 4 21 4 4.5.3 I/O I/F DICOM CN6-5 DC24V(DC24V10% 150mA

PA10] ON DB RD ONRDON SA OFFSAOFFSAON ((X0.05)+20)r/min 20r/min VLC VLCONOFF ZSP ZSPON[Pr. PC07] 1) OFF 70 r/min 2) 3 20 r/min ON 50 r/min () [Pr. PC07] 0 r/min [Pr. PC07] ON -50 r/min 20 r/min OFF () -70 r/min 4 ZSP ON () OFF 50r/min(1)ZSPON 70r/min(2)ZSPOFF 50r/min(3)ZSPON-70r/min(4)ZSPOFF ZSPON 2Or/min 3 16 3.

after 24 hours RECOMMENDED FILTRATION 5 micron V-4104 SERIES (VACUUM) MAX SUPPLY 30" (760 mm) Hg EFFECT OF SUPPLY VARIATION < 0.01" (0.254 mm) Hg per 5" (127 mm) supply change when dead-ended REPEATABILITY < +/0.03" (0.76 mm) Hg DRIFT < .05" (1.27 mm) Hg after 24 hours ALL OTHER SPECIFICATIONS REMAIN THE SAME AS PRESSURE VERSION Part Number Description R-4104-1.5R-4104-3.5R-4104-10R-4104-20R

Example Zero speed is 50r/min DO-1 1) OFF level 70r/min Forward rotation direction 20r/min (Hysteresis width) 3) 2) ON level 50r/min Parameter No.PC07 Servo motor speed 0r/min Parameter No.PC07 ON level 50r/min OFF level 70r/min Reverse rotation direction 20r/min (Hysteresis width) 4) zero speed (ZSP) OFF ON ZPS turns on 1) when the servo motor is decelerated to 50r/min, and ZPS turns off

Example Zero speed is 50r/min DO-1 OFF level 70r/min 1) Forward rotation direction 3) 2) 20r/min (Hysteresis width) ON level 50r/min Parameter No. PC10 Servo motor speed 0r/min Parameter No.

Type of actuation Bracket 1 2 Normally closed Normally open (For manifold type 20, 20R) Bracket is mounted.

) 1 3/4-16 1 1/8 3.9 1 1/2 1/2 7/8 3/8-24 3 3/4 0 1 5 53/64 2.72 4 1/4 2.34 1 3/8 1 2.76 1.18 1.57 1/2 400 (4") 1 3/4-16 1 1/8 4.7 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1 5 53/64 2.72 4 1/4 2.34 1 3/8 1 3.32 1.18 1.57 1/2 CS1 C76 Rod Side Trunnion Style: NCA1U (MT1 mounting style) C85 C95 Y P + Stroke 2-EE (NPTF) CP95 4-DD AA C D across flats NCM EA KK NCA 0.001 0 MM BA B DTD -X Air cushion adj. 20R

Axial piping type (8) MXS8-P 15.5 Operating port 2-M5 x 0.8 40 Max 6.5 (mm) J 39 44 55 73 91 141 Model MXS8-10R MXS8-20R MXS8-30R MXS8-40R MXS8-50R MXS8-75R 15 6.5 Other dimensions are the same as basic style. 13.5 12 Other dimensions are the same as basic style. 8-4-17 18 Series MXS Dimensions: MXS12 Basic style 2-M4 x 0.7 thread depth 5 Operating port 2-M5 x 0.8 9.5 2 4.75 J 8 Max. 11

) 1 3/4-16 1 1/8 3.9 1 1/2 1/2 7/8 3/8-24 3 3/4 0 1 5 53/64 2.72 4 1/4 2.34 1 3/8 1 2.76 1.18 1.57 1/2 400 (4") 1 3/4-16 1 1/8 4.7 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1 5 53/64 2.72 4 1/4 2.34 1 3/8 1 3.32 1.18 1.57 1/2 CS1 C76 Rod Side Trunnion Style: NCA1U (MT1 mounting style) C85 C95 Y P + Stroke 2-EE (NPTF) CP95 4-DD AA C D across flats NCM EA KK NCA 0.001 0 MM BA B DTD -X Air cushion adj. 20R

Zero speed detection (ZSP) has hysteresis width of 20r/min (refer to section 3.5 (1) (b)). 50 r/min 0 to 10 5 36 5. PARAMETERS Control mode No.

2q @1 CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 ye !1 !2 q @1 Component Parts Component Parts: Standard Piping No. !8 !9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 Description Material Synthetic resin Polyurethane Chromium steel NBR NBR NBR Aluminum alloy Aluminum alloy Aluminum alloy Special steel Special steel Note Note Hard anodized Hard chrome plated Hard chrome plated No. q w e r t y u i o !

Example Zero speed is 50r/min 1) OFF level 70r/min Forward rotation direction 20r/min (Hysteresis width) 3) 2) ON level 50r/min Parameter No.PC17 Servo motor speed 0r/min Parameter No.PC17 ON level 50r/min OFF level 70r/min Reverse rotation direction 20r/min (Hysteresis width) 4) zero speed (ZSP) OFF ON ZSP turns on 1) when the servo motor is decelerated to 50r/min, and ZSP turns off 2) when

Example Zero speed is 50r/min 1) OFF level 70r/min Forward rotation direction 20r/min (Hysteresis width) 3) 2) ON level 50r/min Parameter No.PC17 Servo motor speed 0r/min Parameter No.PC17 ON level 50r/min OFF level 70r/min Reverse rotation direction 20r/min (Hysteresis width) 4) zero speed (ZSP) OFF ON ZSP turns on 1) when the servo motor is decelerated to 50r/min, and ZSP turns off 2) when

depth 6 (A, B, C common view) MHW MRHQ 3-3 depth 6 +0.02 0 34 (A, B, C common view) Misc. 12h9 0 0.043 Auto switch mounting groove D1.5 1.5 5 2015.7 4.7 3.5 2-3 12 41.5 (45) 8 2-4.2 17 15.5 2 8 0 0.05 2 3.5 0 0.03 3.5 0 0.03 Open: 22 Closed: 14 2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) 15 15 6 5 5 6 12-5-13 14 Series MHR2/MDHR2 Nominal Size 20 Without auto switch: MHR2-20R

Body Ported External Pilot Applicable solenoid valve series SYJ520R, SYJ720R SYJ 5 7 20R X20 Entry is the same as standard products. External Pilot Port Operating Pressure Range MPa Series Port size Operating pressure range -100 kPa to 0.7 SYJ5000, SYJ7000 M5 x 0.8 Pilot pressure range 0.15 to 0.7 Dimensions SYJ5000: 8 mm longer in total length.

Pressure Control Equipment Industrial Filters CXSL6 @3 @2 @4 CXSL10 CXSL15 @3 @4 @2 @3 @2 @4 CXSL20 to 32 @3 @2 @4 The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CXS. Replacement Parts: Seal Kit Kit no.

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE N360 1.234 ROTARY ACTUATED AIR CHUCK SERIES MHR D I M E N S I O N S W I T H A U T O S W I T C H ( B U I LTI N M A G N E T): MDHR2-15R/15E D I M E N S I O N S S E E N E X T P A G E D I M E N S I O N S W I T H A U T O S W I T C H ( B U I LTI N M A G N E T): MDHR2-20R/20E Courtesy of Steven Engineering

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE N360 1.234 ROTARY ACTUATED AIR CHUCK SERIES MHR D I M E N S I O N S W I T H A U T O S W I T C H ( B U I LTI N M A G N E T): MDHR2-15R/15E D I M E N S I O N S S E E N E X T P A G E D I M E N S I O N S W I T H A U T O S W I T C H ( B U I LTI N M A G N E T): MDHR2-20R/20E FOR MORE TECHNICAL INFORMATION