E-P HYREG ® Series VY1 1

7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700 1 VY1900 1 Input signal voltage (current) for starting the operation of a pilot valve VY1D0 (direct operated) (There is dispersion in the following range.) 1 1 Symbol

SYJA3000

A 21 R2 P R1 VlA 13 1 (Bleed port) 11 10 4 15 10 10 5-M5 X 0.8 (Piping port) 8.2 14 14 15 Bracket VM/VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2-M3 X 0.5 (Pilot port) 10 1.8 4 A B (Mounting holes) 3.2 21.5 1.5 22 7 8.2 2.5 (Mounting holes for manifold) 2-P1.8 2-M3 X 0.5 (Pilot port) A B 11 1.5 (Mounting holes) 2-3.2 17.5 18.5 A B (Non-locking) Manual

VM

Voltage AC125V 2 2 4 4 15 10 15 10 AC250V 1.5 1.5 3 3 15 10 15 10 DC8V 1.5 2.5 3 5 15 15 15 15 DC14V 1.5 2.5 3 5 15 10 15 10 DC30V 1.5 2.5 3 5 6 5 6 5 DC125V 0.3 0.05 0.3 0.05 0.5 0.05 0.5 0.05 DC250V 0.2 0.03 0.2 0.03 0.25 0.03 0.25 0.03 JIS Symbol Construction Precautions Component Parts Be sure to read before handling.

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

9 11 14 114 140 170 54 68 84 24.5 28.5 35 5.6 6.8 8.6 18 22 26.5 40.2 50.2 62.7 40.5 50 62 39 49 61.5 53 64 75 14.5 15 20.5 50 60 80 60 80 100 Rc1/8 Rc1/8 Rc1/4 Centralized piping PF PP PG QW Q RR TT TTT VV WWW Model WW XXX Z YH PD PE ZZ (mm) MY1H25 MY1H32 MY1H40 32 42 37.5 15.5 12 14 23.3 28.5 35 20.5 16 20 14.5 16 20 15 16 23.5 206 264 322 42 51 59 7 8 9 37.5 47 59.5 12 16 18.5 220 280

Valve Single Unit

(Coil temperature: 20C, at rated voltage) SX3000 With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) Type of actuation Without light/surge voltage suppressor S, Z type 15 or less 2 position single 10 or less 13 or less 2 position double 15 or less 20 or less 3 position 12 or less SX5000 With light/surge voltage suppressor Response time (ms) (at the pressure

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Clean Room Rodless Cylinder Series CYP ø15, ø32

CY MG Bore size 15 32 15 mm 32 mm CX Auto switch Nil Without auto switch DFor the applicable auto switch model, refer to the table below.

NCQ8

-XB6: Heat resistant (15 to 300F) Air cylinder which changed the seal material and grease, so that it could be used even at higher temperature up to 150C. Standard model no. How to Order Note 1) Operate without lubrication from a pneumatic system lubricator.

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Bore size 6, 10, 15 Type M thread Rc NPT G Symbol BS Nil Shock Absorbers 20, 25, 32, 40 TN TF Type Bore size (mm) 25 32, 40 10, 15 20 6 Standard (shock absorber RB series) Magnetic holding force Refer to page 1517 for specifications.

KS/KX

Applicable tubing Connection thread 15-2-41

2-Color Display Digital Flow Switch Series PFM

min) 100 (kPa) 750 (kPa) 20 10 100 (kPa) 5 10 0 5 10 15 5 10 15 0 Number of needle rotations Number of needle rotations PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 60 120 300 (kPa) 100 300 (kPa) Flow rate (l/min) Flow rate (l/min) 750 (kPa) 100 (kPa) 40 80 750 (kPa) 60 100 (kPa) 20 40 20 0 5 10 15 0 5 10 15 0 Number of needle rotations Number of needle rotations 930 2-Color

Low Profile Slide Table Series MXF

GR-S-005 (5 g) GR-S-010 (10 g) GR-S-020 (20 g) GR-S-050 (50 g) GR-L-005 (5 g) GR-L-010 (10 g) GR-L-020 (20 g) GR-L-050 (50 g) Applied part Guide Cylinder Dimensions: Stroke Adjusting Bolt Applicable size Model Stroke adjustable range (mm) A B C M M C MXF-A827 MXF-A827-X11 MXF-A1227 MXF-A1227-X11 MXF-A1627 MXF-A1627-X11 MXF-A1627-X12 MXF-A2027 MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25

High-precision Digital Pressure Switch ( compatible)

No.PS-OMY0007-A PRODUCT NAME High-precision Digital Pressure Switch ( compatible) MODEL / Series / Product Number ISE79S-#-L2 Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 10 Definition and terminology 12 Mounting and Installation 15 Installation 15 Piping 16 Wiring 18 Outline of Settings [Measurement mode] 21 Pressure Setting 21 3 Step

Plate Cylinder with Lock Series MLU

10 15 15 D-F7, J79 D-F7V, J79C D-F7W, F7WV D-J79W, F7NTL D-F7BAL, F7BAVL D-F79F 20 Only size 40 and 50 can be mounted. 7 6.5 6.5 6.5 D-F7LF 7.5 7 5 7 7 5 D-P5DWL Hysteresis specifications are given as a guide, it is not a guaranteed range.

Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

Digital Flow Switches, Series PF2A, Series PF2W

Real-time flow rate Accumulated flow Display units Note 1, 2) l, ft3 x 10-1 Operating fluid temperature Linearity Repeatability Temperature characteristics Current consumption (No load) Weight Note 3) Port size (Rc, NPT, G) Detection type Indicator light Operating pressure range Proof pressure Accumulated flow range 0 to 50C 5% F.S. or less 1% F.S. or less 2% F.S. or less 3% F.S. or less (15

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P S U W E B K L AA A R X AB I AP Y + Stroke Z + Stroke J V 8-AF AC AD AE 100 piston rod end connection For standard strokes (mm) Bore size (mm) Stroke range (mm) AC G H AB AF AA AE AD F N M D L C K B J AP I A E 63 80 100 75, 100 125, 150 200, 250 300 15 20 depth 14.5 M16 x 2 depth 28 25 25 50 170 13.5 100 66 140 180 30 135 M12 x 1.75 depth 24 228 117 60 65 200 200 15 20

Rotary Table

Bottom mounting (Body tapped) L2 L3 Size Pin Effective depth [mm] Screw Max. screw-in [mm] depth [mm] 10 3 3.5 M8 x 1.25 12 20 4 4.5 M10 x 1.5 15 30 4 4.5 M10 x 1.5 15 50 5 5.5 M12 x 1.75 18 3.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Cable length (L) [m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 (5.7) 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 10 15 Actuator side Controller side 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)