20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

75 kPa to 0.2 MPa1.1 mm10 ms or less (at pneumatic pressure)Zero leakage, either external or internal (at water pressure)0.3 MPa0 to 50C0 to 50C (with no condensation)18 lFreeIP40 or equivalent20 g12, 24 VDC?10% of rated voltageClass BStandardWith power- saving circuitWith power- saving circuit50 dB

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

Dimensions/20 to 40 Basic/CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G Width across flats B1 I 2-Eh8 D MM AL A F F NA 1.5 1.5 N N K H S + Stroke ZZ + Stroke Boss-cut ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20

Clean Rodless Cylinder Series CYP

screw TA TA WB WA TB TB R W (mm) C ED A EK B F E G H HA HB HG HI HL HP HS HT J JK K Model +0.030 0 CYP15 5.4 9.5 8 4 9.5 12.5 4H9 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6 x 1 10 21 +0.030 0 CYP32 8.6 6H9 13 12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6 69 M4 x 0.7 6 4.5 67 M5 x 0.8 25 60 105 48 45 23 13 18

Rotary Table Series MSU

25.5 (34.5: Connector type) Angle adjustment bolt 2-M5 x 0.8 (Port position: Side port type only) A port B port 31 25 20.5 (26.5: Connector type) 50 65 Connector type 8 4 Connector type 10 Series MSUA Rotary Table High Precision Type Construction Single vane 180 (Indicates intermediate position) 90 (Indicates A port pressurized) Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18

Rotary Table Series MSQ

MSQB1A(Size:1) Rotary Table Rotary Table Series MSQ Size:1, 2, 3, 7 Compact and light weight design Compact and light weight design Coming out in September, 2001 A Size Weight(g) Model 70 105 150 250 1 2 3 7 MSQB1A MSQB2A MSQB3A MSQB7A B mm Size Model A B C D 1 2 3 7 MSQB1A MSQB2A MSQB3A MSQB7A 50.5 56 60 73.5 28 30 34.5 41 25 28 30.5 34.5 16 18 20.5 23 C D Scale :100% (MSQB1A) Flexible

Compact Guide Cylinder End Lock Type SeriesMGP

32 32 46 M10 x 1.5 22 M10 x 1.5 8.6 50 102 74 20 16 12 78 16.5 13.5 16.5 162 M10 39 39 58 M10 x 1.5 22 M10 x 1.5 8.6 63 (mm) WB WA Bore size (mm) OB OL P PA PB PW Q R S T U VA VB 75st or less Over 75 to 175st 75st or less Over 75 to 175st Over 175 to 275st Over 175 to 275st Over 275st Over 275st 11 7.5 Rc1/8 32 15 34 30 96 44 110 78 98 63 124 200 300 83 121 171 45 48 32 11 7.5 Rc1/8 38 18

Modular Type Regulator Series AR

75 90 95 J 25 30 30 41 50 50 70 70 B 58 94 101 116 128 129 169 176 K 28 34 34 40 54 54 66 66 C 11 26.5 28 31 36 36 43 46 L 30 44 44 46 54 56 65.8 65.8 D 25 57 55 59 68 68 87 87 M 4.5 5.4 5.4 6.5 8.5 8.5 11 11 E 26 65 64 66 74 74 84 84 N 6.5 15.4 15.4 8 10.5 10.5 13 13 F 29.5 28.5 30.5 35 35 44.5 44.5 P 40 55 55 53 70 70 90 90 G 0 2 Note) V 6 6 7 7 7 Q 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 S 18

Soft Start-up Valve AV2000/3000/4000/5000

Material AV5000 AV2000 AV4000 AV3000 SF4--80 Pilot valve assembly Piston A assembly Piston B assembly Main valve assembly Check valve Piston guide assembly Needle assembly Valve spring Piston spring Check spring Needle spring C type snap ring for shaft C type snap ring for hole Seal Seal O-ring 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 POM, NBR P424204A P424404A P424504A P424304A Brass, NBR

Modular Type Lubricator Series AL

specifications: 1000cm3 tank 106 90 106 E Port size Bracket (option) 70 66 3.2 13 11 C P IN OUT H OUT With float switch B 210 Specifications Contact capacity: 15VA(AC) 15W(DC) Contact point: 1a, 1b B 210 Min. clearance for maintenance G 1/2 Float switch Part number: IS400-1 to 2 Min. clearance for maintenance With bracket B With float switch B 374 383 383 382 385 C E Model Port size H 25 18

Ambient Dryer Series AMG

20 '10 456 180 s t5 24 1m 1 U 220 1 1 0 18 6.0

Modular Type Filter Regulator Series AW

drain With pressure gauge Bracket mounting size Port size Model C 48 73 86 92 93 A 25 40 53 70 75 D 25 52 59 75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18

Refrigerated Air Dryer Series IDF/IDU

phase, AC100/100 to 110 Single phase, AC200/200 to 220 Power source (V) 50/60Hz 165 195 310 360 330 370 165 195 175 210 210 250 200 230 320 385 335 380 210 240 200 230 170 200 175 210 165 195 165 195 165 195 165 195 165 195 50Hz 60Hz 50Hz 60Hz AC 100V AC 200V Power consumption (W) Note2) 50/60Hz Refrigerant Air connection Weight R134a 28 Rc3/8 23 Rc1/2 27 Rc3/4 28 Rc3/4 27 23 Rc1/2 22 18

Low Profile Slide Table MXF Series

MXF Series Product Features .page 120 MXF Series How to Order .page 121 Specifications .page 122 Table Deflection .pages 123-124 Construction/ Parts List, Seal Kits .page 125 Dimensional Drawings.pages 126-129 Auto Switch Specifications and Mounting .page 130 Please see safety instructions on page 18. 119 MXF Series 8, 12, 16, 20 Low Profile Slide Table 120 Low Profile Slide Table MXF

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .

Rotary Actuator NCRA1 Series Single Rack and Pinion

q NC G RA1B with Auto swllch cap"ou,O J T With Auto Swllch Capsbiliry J | | D-withbuin-inmasner J I &-*"-l See above Bor See above ,f The stsrda|d liead wire length is 18 inches. "L' is addecl for 10loot long lead wire. E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NcRAl/n".x and Pinion ryp Symbol \ -D \ l ?

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Due to this movement, the fluid 18 Series PB1000 Process Pump Built-in Solenoid Valve Type/Air Operated Type Piping and Operation/Built-in Solenoid Valve Type/Air Operated Type Piping Bottom view Discharge port OUT Solenoid valve lead wires Air exhaust portEXH Suction port IN Air supply port SUP Foot (optional) Manual override pin Top view The PB1013 air operated type has a plug in the

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Due to this movement, the fluid 18 Series PB1000 Piping and Operation/Built-in Solenoid Valve Type/Air Operated Type Piping Bottom view Discharge port OUT Solenoid valve lead wires Air exhaust portEXH Suction port IN Air supply port SUP Foot (optional) Manual override pin Top view The PB1013 air operated type has a plug in the air exhaust port EXH.