m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
Hand Valve Series VH Body size (Base size) 2 3 4 6 1/4 base 3/8 base 1/2 base 1 base Port size (Nominal size) 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Piping/Mounting Piping Note) Mounting method Body Panel mounting Body Panel mounting Symbol 0 1 2 3 Side Side Bottom Bottom Thread type Nil N F Note) Only side piping is available for VH200 and VH600 and R port is located on the bottom.
Stations: 08 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: C [Vacuum Pump System PE Port Female Thread Specification (M3)], 1st Nominal Nozzle
Stations: 10 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: C [Vacuum Pump System PE Port Female Thread Specification (M3)], 1st Nominal Nozzle
Size: 25, Motor Mounting Position: D (In-line), Lead: A (Size 25: 12mm, Size 32/40: 16mm), Stroke: 150mm, Motor Option: B (with Lock), Rod End Thread: Rod End Female Thread, Mounting: F (Rod Flange), Actuator Cable Type, Length: M3 (3), Controller: C51 [Parallel Input (NPN)], Controller Mounting: 8 (DIN Rail), Communication Plug Connector, I/O Cable: 3 (I/O Cable, 3m)
Size: 40, Motor Mounting Position: D (In-line), Lead: B (Size 25: 6mm, Size 32/40: 8mm), Stroke: 200mm, Motor Option: without Option, Rod End Thread: Rod End Female Thread, Mounting: F (Rod Flange), Actuator Cable Type, Length: M3 (3), Controller: CD1 (DeviceNetâ„¢), Controller Mounting: 7 (Screw Mounting), Communication Plug Connector, I/O Cable: S (Straight Type Communication Plug Connector
Size: 40, Motor Mounting Position: D (In-line), Lead: C (Size 25: 3mm, Size 32/40: 4mm), Stroke: 250mm, Motor Option: B (with Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: F (Rod Flange), Actuator Cable Type, Length: M3 (3), Controller: C91 (Ether Net/IPâ„¢), Controller Mounting: 8 (DIN Rail), Communication Plug Connector, I/O Cable: None
Action: S (Single Acting (N.O.)), Finger Option: None, Body Option: M (End Boss, M3 Port), Dust Cover: F (Fluoro Rubber), Made-to-Order: X5 (Fluororubber Seal)
Pad Diameter: B04 (ø4, Blast Type), Pad Type: MU (Flat, Works w/Adapters ZP2A-M01P, ZP2A-M02P, ZP2A-M04), Pad Material: F (FKM), Mounting: A3 (M3 X 0.5 Male Thread)
Pad Diameter: B035 (ø3.5, Blast Type), Pad Type: MU (Flat, Works w/Adapters ZP2A-M01P, ZP2A-M02P, ZP2A-M04), Pad Material: F (FKM), Mounting: A3 (M3 X 0.5 Male Thread)
Pad Diameter: B05 (ø5, Blast Type), Pad Type: MU (Flat, Works w/Adapters ZP2A-M01P, ZP2A-M02P, ZP2A-M04), Pad Material: F (FKM), Mounting: A3 (M3 X 0.5 Male Thread)
Pad Diameter: B04 (ø4, Blast Type), Pad Material: F (FKM), Mounting: A3 (M3 x 0.5, Male Thread)
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74
m (99.9% filtered particle size)Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) Note 4) Note 5)200PolycarbonateSemi-standardRelieving type0.74