SMC Corporation of America
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Bore size (mm) s : Stroke (mm) Temperature Relative humidity Correction factor C2 Vc = D2s 4 25C 40C 10C 0.2 0.4 0.6 20% Fig. 2 Piping Volume Chart 0.5 1.0 1.3 40% 140 1.0 1.7 2.8 60% 2.1 4.0 5.9 75% 120 6 tube Correction Factor C3 for Supply Pressure Supply pressure (MPa) Correction factor C3 10 Tube volume [mm3] 0.4 0.3 80 0.7 0.4 1 0.5 60 1.25 0.6 4 tube 1.6 0.7 40 20 2 tube 0 0 2000 4000

0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 0 00 25 50 75 100 125 150 0 0 500 1000 1500 200 400 600 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AR30(K)-B Rc3/8 AR40(K)-B Rc1/2 AR40(K)-06-B Rc3/4 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 00 0 0 1000 2000 3000 4000

After the machine has stopped, make sure to turn off the breaker of the users equipment (on the upstream side). 2 h 1 h 30 min 20 min 14 min 10 min 6 min 4 min 2 min 1 min Operating time 30 s 20 s Max. 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000 Current (% for chiller main breaker volume) 341 HRL Series Specific Product

300* v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 2 s Min. 1 s Standard item 0.5 s 0.2 s Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v 0.1 s 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000

radiation amount/Facility water specifications> 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000

300* v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 2 s Min. 1 s Standard item 0.5 s 0.2 s Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v 0.1 s 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000

.::.".'" .' . " . ' O~>-/ 0 0 50 100 150 200 250 0 1000 2000 3000 4000 5000 Air flow rate Qlmin (ANR) Air flow rate Qlmin (ANR) AMH650 AMH250 I I I f-j--+Inlet air pressure 0.3MPa r I I 0.5MPa .'_ ",0.06 Air pressure 0.3MPa /' /0.7MPa a. L ~ ::;; '" O.06I---+--+---+---:>I"--+-::-::c:-::!-l ~ / /o~la ~ / /v 0.7MPa ~ /-Y ~0.04 V ~ 0.04 f-i-,I"''---c,..

Specifications AP3600 AP3625 AP3650 AP3657 Operating Parameters Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Select compatible materials of construction for the gas Vacuum to 3000 psig (20.7 MPa) 4000 psig (27.6 MPa) 8000 psig (55.2 MPa) 40 to 160F (40 to 71C) (No freezing) 1) 0.29 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra

Select compatible materials of construction for the gas Vacuum to 3000 psig (20.7 MPa) 4000 psig (27.6 MPa) 8000 psig (55.2 MPa) 14 to 160F (10 to 71C) (No freezing) Operating Parameters Status Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv 0.23 0.28 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 1) 4 x 10-9 Pam3/sec 1) Ra max 15 in. (0.4 m) Option: 10 in

600 800 Flow rate L/min (ANR) Flow rate L/min (ANR) AR25-A Rc3/8 AR30-A Rc3/8 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 500 1000 1500 0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) AR40-A Rc1/2 AR40-06-A Rc3/4 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000

0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 0 00 25 50 75 100 125 150 0 0 500 1000 1500 200 400 600 800 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AR30(K)-B Rc3/8 AR40(K)-B Rc1/2 AR40(K)-06-B Rc3/4 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure [MPa] Outlet pressure [MPa] Outlet pressure [MPa] 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 00 0 0 1000 2000 3000 4000

CY36 Consult with SMC in case a bracket with weight exceeding the above value is to be mounted. 28 27 26 25 24 23 22 21 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1000 2000 3000 4000 5000 6000 CY315 Note 1) According to the dead weight deflection in the figure on the right, provide clearance so that the cylinder does not touch the mounting surface or the load, etc., and is able

Dimension AVL2000 to AVL5000 Soft start up valve with lock out AVL2000/3000/4000/5000 (mm) Port size A B Model C D E F G H Lockable soft start valve. Gradual increase of supply pressure and rapid exhaust of system air when the supply is shut off.

Male thread additional weight 5 Cylinder stroke (mm) Bore size (mm) 10 15 20 25 30 35 40 45 50 75 100 20 32 40 50 180 200 220 240 260 280 300 320 340 360 10 610 710 330 350 370 390 410 430 450 470 490 510 52 760 860 480 500 520 540 560 580 600 620 640 660 52 1250 1400 860 890 920 950 980 1010 1040 1070 1100 100 63 80 100 1770 1970 1250 1290 1330 1370 1410 1450 1490 1530 1570 100 3550 4000

Relation between clamp arm length and maximum clamping force The length of the clamp arm L should be the length given below or less. operating pressure 0.5 MPa 5000 Arm length L Model 4000 Clamping force (N) CKZ3N50 CKZ3T50 CKZ3N63 CKZ3T63 150 mm 63 3000 300 mm 2000 50 1000 0 350 300 250 200 150 100 50 0 Arm length L (mm) Series CKZ3N Allowable load for clamp arm end Refer to the graph on

Type F Y 12 1.7 ZPlOCQ Cl0 10 12 4 13 7.7 > 8 13 . 15, 4 13 7.7 16 18 4 13 8,2 2d 23 4 15 9,5 ZP13CQ C-'3 12 1.8 12.5 1.2 14 1.7 ZP16CQ C16 ZP20CQ G20 ZPlOUO 50UO 00 ZP25CQ G25 25 28 4 15 9.5 14 1.8 32 I 35 4 15 10 ZP32CQ = ZP40CQ C40 .14.5 2.3 40 I 43 7 18 13.7 50 153 7 18 14,7 18.5 3.3 ZPSOCQ G50 Deep type pad -~~ ZPlODO 4000 t" ~F=m-' I S (mm) Part No. r"~ IA 18 IG 10 E U02 2 _2.6 1.2

168 202 275 cylinders, oversized piston rods may be required. 1000 27 60 105 155 190 257 330 1400 24 53 92 142 174 244 308 385 1800 23 48 82 127 160 230 296 366 It must be noted, however, that oversized piston rods transmit more side load 2400 19 45 75 114 145 213 281 347 than is the case with more flexible smaller rods; therefore, the use of oversized 3200 16 41 67 103 130 194 261 329 4000

200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0 RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000

150 CXSM CXSL 10 to 100 15 110, 120, 125, 150 110, 120, 125, 150, 175, 200 20, 25, 32 10 to 100 225, 250, 275, 300 (CXWM16 to 25) 225, 250 (CXWM32) 225, 250, 275 (CXWL16 to 25) 225 (CXWL32) CXWM 16, 20, 25, 32 25 to 200 CXWL 16, 20, 25, 32 225, 250, 275 25 to 200 ML1 25, 32, 40 1001 to 2000 100 to 1000 CY3B 20, 25, 32, 40 2001 to 3000 100 to 1000 CY1B 50, 63 From 2001 200 to 2000 2001 to 4000

Model: 4000 L/min, Pressure Range: 0.005~0.1MPa, Power Voltage: 24VDC, Input Signal: Current Style 4~20mADC, Monitor Output: Analog Output 4~20mA Sink Type, Thread: NPT, Port Size: 4 [1/2 (3000)], Accessory: Flat Bracket, Cable Connector: Right Angle Style 3m, Pressure Display Unit: -, Options: -