Stations: 05 (5 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 03 (3 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 04 (4 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 03 (3 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 02 (2 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 05 (5 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 3 Stations, Piping: U Side: Closed; D Side: Open, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 0.5 to 4 L/min, Return Unit Components: w/o Flow Adj.

Stations: 5 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 2 to 16 L/min, Return Unit Components: w/o Flow Adj.

Digital Flow Switch (Remote type monitor unit)

/min Instantaneous Setting/display flow range 1 2 0.5 to 10.5 2.5 to 52.5 5 to 105 10 to 210 25 to 525 L/min L/min L/min L/min L/min flow Min. setting/display unit 0.1 0.5 1.0 2.0 5.0 Flow L/min L/min L/min L/min L/min Accumulated Setting/display flow range 0 to 9 L Flow Min. setting/display unit 1 L Reference condition 3 Standard condition, Normal condition 4 NPN open collector output, PNP

4-channel Flow Monitor (Remote type monitor unit)

min L/min L/min L/min L/min Instantaneous Setting/display flow range 1 2 0.5 to 10.5 2.5 to 52.5 5 to 105 10 to 210 25 to 255 L/min L/min L/min L/min L/min flow Min. setting/display unit 0.1 0.5 1 2 5 Flow L/min L/min L/min L/min L/min Accumulated Setting/display flow range 0 to 9 L Flow Min. setting/display unit 1 L Reference condition 3 Standard condition, Normal condition 4 NPN open collector

Digital Pressure Switch

2.00 to -5.00 to -10.00 to Pressure spec. 1.000 kPa 2.00 kPa 5.00 kPa 10.00 kPa Display/Set pressure range -525 to 525 Pa -1.050 to -2.10 to -5.25 to -10.50 to 1.050 kPa 2.10 kPa 5.25 kPa 10.50 kPa Display/Min. setting unit 1 Pa 0.001 kPa 0.01 kPa 0.01 kPa 0.01 kPa Proof pressure 2.5 kPa 5 kPa 10 kPa 25 kPa 50 kPa Electrical Power supply voltage 12 to 24 VDC (10%), and power supply ripple (p-p

PFxx-OMS0001CN

min 101000 L/min 202000 L/min 5525 L/min 101050 L/min 202100 L/min 0999,999,990 L 1 L/min 10 L (50 msec.) 1 L/pulse 10 L/pulse 1 2 5 00.8MPa 1.2MPa 2 5F.S.(00.8 MPa0.6 MPa ) DC1224 V10 P-P10 55 mA 3F.S. 3F.S. 1F.S.(0.05S 2F.S.) 5F.S.(050 25 ) NPN PNP 80 mA (NPN) DC28 V () NPN 1 V (80 mA ) PNP 1.5 V (80 mA ) 3 0.05 0.1 0.5 1 2 4 0 -66No.PF-OMS0001CN-A PFMC7501 PFMC7102

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector), Light/Surge Voltage

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N06 [Vacuum: NPT3/4; Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector), Light/Surge Voltage

Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N06 [Vacuum: NPT3/4; Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector), Light/Surge Voltage

Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: F06 [Vacuum: G3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector), Light/Surge Voltage

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: F06 [Vacuum: G3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: B1 [Supply Valve (N.O.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: LO (L Plug Vertical Connector w/o Connector), Light/Surge Voltage