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With individual release pressure supply (PD) port type Note 21) D PD port Note 19) When more than one option is selected, list the option symbols in an alphabetical order. Example) -BJ Note 20) For an ejector, PE is common with EXH, so it is not necessary to specify the option. Thread size is M3. Note 21) Only M3 is available for PD port size.

Auto switch Auto Switch Specifications D-M9N(With indicator light) Auto switch model D-M9N Electrical entry direction In-line Wiring 3-wire Output NPN type Applicable load IC circuit,Relay,PLC Power supply voltage DC51224V(4.5 to 28V) Current consumption 10 mA or less Load voltage Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less at 40 mA) Current leakage

Here, : Deformation ratio (%) d: Tubing diameter (mm) L: Measured length (mm) D: Mandrel diameter (mm) (Twice against the minimum bending radius) Test temperature: 20 +/5oC Relative humidity: 65 +/5% 5 - 2. Specific Product Precautions (2) Mounting/ Piping (3) Check the model, type and size before installation.

[June 2018] D: Contents revised in several places. [February 2020] E: Contents are added. [February 2021] F: Contents revised in several places. [January 2022] G: Contents revised in several places. [October 2022] H: Contents revised.

J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 73 Regulator Series

Select the model with air flow capacity exceeding the calculated corrected air flow from data D of the table below.

(A,C) Note.5) VXF-26AA VXF-26AC 24.529.5 29.434.3 VXF(A)26A(B,D) Note.5) VXF-26AB VXF-26AD VXF(A)25B(A,B,C,D) VXF-25AA VXF-25AC 12.515 1517.5 VXF(A)26B(A,C) Note.5) VXF-26BA VXF-26BC VXF(A)26B(B,D) Note.5) VXF-26BB VXF-26BD VXF(A)26C(A,C) Note.5) VXF-26CA VXF-26CC VXF(A)26C(B,D) Note.5) VXF-26CB VXF-26CD 24.529.5 29.434.3 VXF(A)26D(A,C) Note.5,6) VXF-26CA VXF-26CC VXF(A)26D(B,D) Note.5,6)

No.VT315-OMH0002-D PRODUCT NAME Direct Operated 3 Port Solenoid Valve MODEL / Series / Product Number Series: VT315 Contents Safety Instructions -2,3 Precautions on Design / Selection -4,5 Mounting -5 Piping -5 Wiring -6 Lubrication -6 Air Supply -6 Operating Environment -6,7 Maintenance -7 Specific Product Precautions -810 Trouble shooting -11,12 -1VT315-OMH0002-D Safety Instructions These

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

2 x 3.4 33 IZH 30 30 52 46 44 26 17 11 40 5 8 x 3.4 20 26 12 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Internal mounting Pivot mounting 21 33 (Mounting angle adjustable range) (90) 61 61 30 Pivoting bracket/IZN10-B2 20 3.4 56 64 28 20 (Mounting angle adjustablerange) 20 9.5 9 90 24 3.4 4 14 40 2 x Hexagon socket head cap screw M3 x 16 59 11 (Accessory) 18 457 IZN10 Series Dimensions

BF SOL RUN Display Description NOTE When connecting manifold valve only without connecting Input unit manifold, LEDs of COM A D do not light. To make them light, connect a terminal plug to the unused connector of SI unit ( "C1" or "0" ). Settings for display Turns on: COM D is receiving data. Turns off: COM D has no received data. Turns on: COM C is receiving data.

Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

Compact Cylinder: Guide Rod Type 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Series CQM How to Order B 20 10 CQM M9BW B 20 10 CDQM With auto switch Number of auto switches With auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc. n pcs.

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

MS Burst pressure (MPa) 20 to +60C (No freezing) Polyurethane Burst pressure Black T 15 10 10 20 VMG Maximum operating pressure How to Order Operating temperature (C) Precautions 2 TFU0425 B Be sure to read before handling.

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For