Type: 10S (Side Ported), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 14 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Type: 11S (Bottom Ported), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 14 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: AA (Direct Mounting, Name Plate w/Station Number)

Type: 10S (Side Ported), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 14 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: AA (Direct Mounting, Name Plate w/Station Number)

Type: 10S (Side Ported), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 14 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail, w/Bracket)

Type: 10S (Side Ported), SI Unit Specification: KA (IO-Link - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 14 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N3 (ø5/32" One-touch Fitting)

Enclosure: W (IP67), SI Unit: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: +COM, Stations: 14 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: Internal Pilot, A, B Port: N3 (5/32" One-touch Fitting)

IDX-OM-X011

IDF60/70/80/90 Series 6.2 Reset the Thermal relay and High Pressure Switch 6-3 IDX-OM-X011 Chapter 6 Troubleshooting 6.2 Reset the Thermal relay and High Pressure Switch IDF190D/240D Series 6-4 IDX-OM-X011 Chapter 7 Documents Chapter 7 Documents 7.1 Specifications Models Item IDF190D IDF240D Standard condition (ANR) Note 1) 50Hz 32 43 60Hz 38 50 Air flow capacity m3/ min Compressor inlet

IDX-OM-Y002

Description Contents of check Date IDF60/70/80/90 Series 11.1 Inspection record 11-1 Revision Rev AApr,2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved

VF1000-OMP0001

-1 M4X48 DXT156-9-8 VF520 DXT156-9-1 VF544 10 VF1000-OMP0001 R () P 11 VF1000-OMP0001 No. 1ISO VG 32 (R) 1. 2. 3. 4. 5. 6. 7. 12 VF1000-OMP0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

VFR5000-OMN0001

P A B 10 VFR5000-OMN0001 VFR5000 Series/ 01F D COM A B 01C COM A B 1)8 2)+COM -COM . 3)D U D 1)8 2)+COM -COM . 3)D U D 11 VFR5000-OMN0001 () X () [3(EB)4(EA) ] () (PE) 12 VFR5000-OMN0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR5000-OMN0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax:

VG300-OMI0003

Ass'y 1(ISO VG 32) [3(R),PE] N.O.1(P) Ass'y Ass'y (P,A,X) X(0.2~0.9MPa) X() 1) 2) 3) 4) 5) 6) 7) -10No.VG300**-OMI0001-A Revision history A Renewal QR 1st printing:iy 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on

VFR3000-OMY0001

(A)(B) (A)(B) Rc 1/8 4 2 4 2 (kg) 0.83 5 1 3 5 1 3 (mm2) PA 44 38 32 (EA)(P)(EB) (EA)(P)(EB) (A)(B) (A)(B) P1=0.7MPa,P2=0.5MPaS PB 38 40 31 4 2 4 2 (mm2) AEA 90 5 1 3 5 1 3 P2=0.5MPaS BEB 77 (EA)(P)(EB) (EA)(P)(EB) ()( ) 2.8N m 7 VFR3000-OMY0001 VFRA3000,4000 3 VFRA3000 VFRA4000 3 1(P) 8 VFR3000-OMY0001 R , 9 VFR3000-OMY0001 No. 1ISO VG 32 R (1) (2) (3) (4) (5) (6) 10 VFR3000

EX260-SDN_eng

Bit: 7 0 Byte 0 Offset Fieldbus interface connector layout 16 outputs type 6 0: Solenoid valve: OFF 1: Solenoid valve: ON Bit: 7 0 Byte 1 Offset BUS OUT: M12 5-pole Socket A-coded 32 outputs type EX260 Series for DeviceNetTM BUS IN: M12 5-pole Plug A-coded Bit: 7 0 Byte 2 Offset Contact layout Bit: 7 0 No.

EX260-SPR-A_eng

No.2 No.1 No.4 No.3 No.6 No.5 No.8 No.7 Caution 64 16 32 4 8 1 2 1 0 0 0 0 0 1 0 After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly.

Mechanically Jointed Rodless Cylinder/Linear Guide Type Series MY1H-Z

NBR No. 8 Rod seal 1 Piston seal 9 KB00217 KB00217 KB00217 1 NBR O-ring 12 KA00037 KA00037 KA00037 1 NBR O-ring 14 KA00048 KA00048 KA00048 2 NBR Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 96

Digital Flow Switch for Water Series PF3W 3-color display ®

Note) G, F, J: Made to Order Reference: 1 [L/min] 0.2642 [gal/min] 1 [gal/min] 3.785 [L/min] oF = 9/5oC + 32 Note 2) Note 2) Note 2) Note 2) Options/Part No. Lead wire Nil N When optional parts are required separately, use the following part numbers to place an order.

Miniature Tubing & Miniature Fittings Series TU/M

When reusing the tubing, cut off the previously installed portion of the tubing to avoid possible leakage and/or disconnection of the tubing. 3.2, 4 Port size 3 5 32 04 M3 x 0.5 M5 x 0.8 3.2 4 2 Barb fitting: M-3AU-2, M-5AU-2 Series M Applicable tubing O.D. x I.D.

Compact Vacuum Ejector Series ZQ

Note 2) Including a 0.3 m connector for the supply and release valves and a 0.6 m connector for the switch. 23 -80 kPa 14 46 Maximum vacuum pressure Calculation of weight for the manifold type (Single unit weight) x (Number of stations) + (Weight of end plate assembly for manifold) Example) Switch + 8 stations with suction filter 109 g x 8 + 122 g = 994 g Supply pressure range 0.3 MPa to

High Purity Chemical Valve

(Breathing port) R LVN 2 x Q TL/TIL PB LQ3 G H PA C SMC A B N E J B (F) Dimensions (mm) A B C D E F G H J K L M M5 x 0.8 R N Q Model LVC2m LVC3m LVC4m LVC5m LVC6m 30 30 54.5 44 11 79 28.5 13 4 20 37 3.5 23.5 M3 x 0.5 36 47 79 56 16.5 106 43 17.5 7.5 34 46 5.5 39 46 60 96 68 22 131 55 18 8 42 57 5.5 48 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 58 75 129 84 26 154 68 27.5 8 56 71 6.5 62 58 75 138 84 32

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 14 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N3 (ø5/32" One-touch Fitting)